公开(公告)号：WO1997025660A1

公开(公告)日：1997-07-17

申请号：PCT/US1996020005

申请日：1996-12-16

Applicant: LUXTRON CORPORATION

Inventor： LUXTRON CORPORATION ,  SUN, Mei, H. ,  LITVAK, Herbert, E. ,  TZENG, Huey, M. ,  GLENN, Daniel, E. ,  JENSEN, Earl, M. ,  HAUSMAN, Frank, J. ,  ZHOU, Lin, Jun

IPC: G05B19/4065

CPC classification number: B24B37/013 ,  B24B49/04 ,  B24B49/12 ,  G05B19/4065

Abstract: In an apparatus for removing material from an article, such as an exposed surface of an intermediate integrated circuit structure, by planarizing, polishing, etching or the like, a sensor is mechanically coupled to a moving carrier of the article for directing through the article to its first side an electromagnetic radiation beam having a wavelength band to which the structure is substantially transparent. The beam is detected after interacting with the article, such as being reflected from its exposed surface, and resulting information of the state of the processing of the exposed surface is transmitted from the moving carrier to a stationary receiver by radiation without the use of any physical transmission media such as wires or optical fibers. Multiple sensors mounted on the moving article carrier provide information of the uniformity of the processing across the exposed article surface. The radiation signal received by the stationary receiver is used to monitor or control the processing, such as by determining an endpoint thereof.

Abstract translation: 在用于从诸如中间集成电路结构的暴露表面的物品去除材料的设备中，通过平面化，抛光，蚀刻等，将传感器机械耦合到物品的移动载体上，以引导物品引导到物品 其第一面是具有该结构基本上透明的波长带的电磁辐射束。 在与物品相互作用之后检测到光束，例如从其暴露的表面反射，并且通过辐射将暴露表面的处理状态的结果信息从运动载体传输到固定的接收器，而不使用任何物理 传输介质如电线或光纤。 安装在移动物品载体上的多个传感器提供跨过暴露的物品表面的处理的均匀性的信息。 由固定接收机接收的辐射信号用于监视或控制处理，例如通过确定其端点。

公开(公告)号：WO1996010164A1

公开(公告)日：1996-04-04

申请号：PCT/US1995012234

申请日：1995-09-22

Applicant: LUXTRON CORPORATION

Inventor： LUXTRON CORPORATION ,  JENSEN, Earl, M.

IPC: G01J05/00

CPC classification number: G01J1/46 ,  G01J1/18 ,  G01J5/0096 ,  G01J5/061 ,  G01J5/08 ,  G01J5/0821 ,  G01J5/0893

Abstract: An automatic gain control technique integrates samples of an incoming analog signal a controlled amount of time so that the magnitudes of the samples lie within the desired input window of an analog-to-digital converter or other signal processing device. The values of the samples are then determined from a combination of the output of the signal processing device and their integration time. This is utilized in a system for determining the temperature of a surface of an object, without contacting the surface, by measuring the level of its infra-red radiation emission. A particular application of the system is to measure the temperature of a semiconductor wafer within a processing chamber while forming integrated circuits on it. The measuring system is configured on a single printed circuit board with an extra height metal heat sink structure to which a cooling unit is mounted. A photodetector and a circuit chip which performs the signal integrations are mounted within the cooling unit and operated at a uniform temperature. The combination of the variable time integration and cooling techniques greatly increases the signal-to-noise ratio of the measuring system. This allows surface temperature measurements to be made down to about 250 DEG C by measuring object emissions at slightly less than one micron in wavelength, conditions which provide signal levels which are normally too weak to measure accurately.

Abstract translation: 自动增益控制技术将输入的模拟信号的样本集成到受控的时间量，使得样本的幅度位于模数转换器或其它信号处理装置的期望的输入窗口内。 然后根据信号处理装置的输出与其积分时间的组合来确定样本的值。 这用于通过测量其红外辐射发射的水平来确定物体表面的温度而不与表面接触的系统。 该系统的特定应用是在处理室内测量半导体晶片的温度，同时在其上形成集成电路。 测量系统配置在具有安装冷却单元的额外高度的金属散热器结构的单个印刷电路板上。 执行信号积分的光检测器和电路芯片安装在冷却单元内并在均匀的温度下操作。 可变时间积分和冷却技术的结合大大提高了测量系统的信噪比。 这允许通过测量波长稍微小于1微米的物体辐射，使得表面温度测量值降低到约250℃，这些条件提供通常太弱而不能精确测量的信号水平。

公开(公告)号：WO1992010132A1

公开(公告)日：1992-06-25

申请号：PCT/US1991008511

申请日：1991-11-14

Applicant: LUXTRON CORPORATION

Inventor： LUXTRON CORPORATION ,  JENSEN, Earl, M. ,  SUN, Mei, H. ,  VECHT, David, L. ,  MELEN, Robert, E.

IPC: A61B05/00

CPC classification number: G01K11/3213

Abstract: A luminescence-based integrated optical (11) and electronic system (29, 37, 51, 55, 59) for measuring temperature or some other parameter from the decay time of a luminescent sensor (25) is disclosed. A high bandwidth, low noise amplifier (31) applies a detected decaying luminescent signal to a digital system (29, 37, 51) that acquires that signal and processes it in order to determine its decay time characteristics that are related to temperature or another parameter being measured. The digital signal processing includes use of a digital curve-fitting technique. A preferred luminescent material for temperature measurement is a chromium-doped yttrium gallium garnet material. The entire optical and electronic portions of the measuring system can be accommodated on a small single circuit card (131).