公开(公告)号：WO1992018838A1

公开(公告)日：1992-10-29

申请号：PCT/US1992002722

申请日：1992-04-03

Applicant: LUXTRON CORPORATION

Inventor： LUXTRON CORPORATION ,  WICKERSHEIM, Kenneth, A. ,  ADAMS, Bruce, E.

IPC: G01K11/20

CPC classification number: G01J5/28 ,  G01J1/58 ,  G01J5/041 ,  G01J5/046 ,  G01J5/048 ,  G01J5/08 ,  G01J5/0821 ,  G01J5/0846 ,  G01J5/0887 ,  G01K11/3213

Abstract: High temperature range black body techniques are combined with lower temperature range photoluminescent techniques to provide an optical method and apparatus for measuring temperature over a very wide range. Various optical probe configurations are disclosed which combine the black body and photoluminescent technologies. Signal detection and processing can be combined, and temperature measurements made by the photoluminescent technique within an overlap of the two temperature ranges can be used to calibrate measurements made in the higher range by the black body technique.

公开(公告)号：WO1986003293A1

公开(公告)日：1986-06-05

申请号：PCT/US1985002333

申请日：1985-11-27

Applicant: LUXTRON CORPORATION

Inventor： LUXTRON CORPORATION ,  WICKERSHEIM, Kenneth, A. ,  SUN, Mei, H. ,  HEINEMANN, Stanley, O.

IPC: G01J05/00

CPC classification number: G01K11/3213

Abstract: An optical temperature measurement technique that utilizes the decaying luminescent intensity characteristic of a sensor composed of a luminescent material that is excited to luminescence by a light pulse or other periodic or other intermittent source of radiation. The luminescent emissions of a preferred sensor exhibit an approximately exponential decay with time that is the average of a distribution of chemically reproducible crystallites and are repeatable with a high degree of accuracy regardless of excitation level or prior temperature history of the sensor.

公开(公告)号：WO1993025893A1

公开(公告)日：1993-12-23

申请号：PCT/US1993004936

申请日：1993-05-24

Applicant: LUXTRON CORPORATION

Inventor： LUXTRON CORPORATION ,  LITVAK, Herbert, E.

IPC: G01N21/88

CPC classification number: G01B11/0683

Abstract: A predetermined stage of a changing condition is detected by monitoring a change in a signal relating to the changing condition. For example, the existence of a breakthrough that results from photoresist development, material etching, and the like, is detected by optically monitoring a semiconductor wafer, printed circuit board, and the like, that is being processed. An optimum end of the processing can then be determined in response to a breakthrough being detected, either for the purpose of monitoring the process or in order to automatically terminate the processing at that determined time. As part of the processing that determines the existence of a breakthrough, the optical signal is digitized and individual slope values calculated from groups of consecutive digital signal values.

Abstract translation: 通过监视与变化条件相关的信号的变化来检测变化状态的预定阶段。 例如，通过光学监测正被处理的半导体晶片，印刷电路板等来检测由光致抗蚀剂显影，材料蚀刻等产生的突破的存在。 然后可以响应于检测到突破而确定处理的最佳结束，以便监视过程或为了在该确定的时间自动终止处理。 作为确定突破存在的处理的一部分，光信号被数字化，并且从连续的数字信号值组中计算各个斜率值。

公开(公告)号：WO1992019944A1

公开(公告)日：1992-11-12

申请号：PCT/US1992003456

申请日：1992-04-27

Applicant: LUXTRON CORPORATION ,  SCHIETINGER, Charles, W. ,  ADAMS, Bruce, E.

Inventor： LUXTRON CORPORATION

IPC: G01J05/00

CPC classification number: G01B11/0658 ,  G01J5/0003 ,  G01J5/0007 ,  G01N21/474 ,  G01N21/8422 ,  G01N2021/4742

Abstract: Thermal, optical, physical and chemical characteristics of a substrate (11) surface are determined with non-contact optical techniques that include illuminating (23) the surface with radiation having a ripple intensity characteristic (51), and then measuring the combined intensities (53) of that radiation after modification by the substrate surface and radiation emitted from the surface. Precise determinations of emissivity, reflectivity, temperature, changing surface composition, the existence of any layer formed on the surface and its thickness are all possible from this measurement. They may be made in situ and substantially in real time, thus allowing the measurement to control (39, 41) various processes of treating a substrate surface. This has significant applicability to semiconductor wafer processing and metal processing.

Abstract translation: 使用非接触光学技术确定衬底（11）表面的热，光学，物理和化学特性，其包括用具有纹波强度特性（51）的辐射照射（23）表面，然后测量组合强度（53 ）由基板表面改性后的辐射和从表面发射的辐射。 从该测量可以准确确定发射率，反射率，温度，表面组成，表面上形成的任何层的存在及其厚度。 它们可以在原位和实质上实时制备，从而允许测量控制（39,41）处理基底表面的各种过程。 这对于半导体晶片加工和金属加工具有显着的适用性。

公开(公告)号：WO2004010094A1

公开(公告)日：2004-01-29

申请号：PCT/US2003/021835

申请日：2003-07-11

Applicant: LUXTRON CORPORATION

Inventor： CHAMPETIER, Robert, J.

IPC: G01J5/58

CPC classification number: G01J5/0003 ,  G01J5/58

Abstract: An instrument that measures reflectivity, temperature and roughness of a substrate in a processing chamber remotely, without interfering with the process. The roughness of the substrate is estimated on the basis of depolarization measurements. The instrument automatically corrects for emissivity changes.

Abstract translation: 一种能够远程测量处理室中基板的反射率，温度和粗糙度的仪器，而不会干扰该过程。 基于去极化测量来估计衬底的粗糙度。 仪器自动更正发射率变化。

公开(公告)号：WO1997025660A1

公开(公告)日：1997-07-17

申请号：PCT/US1996020005

申请日：1996-12-16

Applicant: LUXTRON CORPORATION

Inventor： LUXTRON CORPORATION ,  SUN, Mei, H. ,  LITVAK, Herbert, E. ,  TZENG, Huey, M. ,  GLENN, Daniel, E. ,  JENSEN, Earl, M. ,  HAUSMAN, Frank, J. ,  ZHOU, Lin, Jun

IPC: G05B19/4065

CPC classification number: B24B37/013 ,  B24B49/04 ,  B24B49/12 ,  G05B19/4065

Abstract: In an apparatus for removing material from an article, such as an exposed surface of an intermediate integrated circuit structure, by planarizing, polishing, etching or the like, a sensor is mechanically coupled to a moving carrier of the article for directing through the article to its first side an electromagnetic radiation beam having a wavelength band to which the structure is substantially transparent. The beam is detected after interacting with the article, such as being reflected from its exposed surface, and resulting information of the state of the processing of the exposed surface is transmitted from the moving carrier to a stationary receiver by radiation without the use of any physical transmission media such as wires or optical fibers. Multiple sensors mounted on the moving article carrier provide information of the uniformity of the processing across the exposed article surface. The radiation signal received by the stationary receiver is used to monitor or control the processing, such as by determining an endpoint thereof.

Abstract translation: 在用于从诸如中间集成电路结构的暴露表面的物品去除材料的设备中，通过平面化，抛光，蚀刻等，将传感器机械耦合到物品的移动载体上，以引导物品引导到物品 其第一面是具有该结构基本上透明的波长带的电磁辐射束。 在与物品相互作用之后检测到光束，例如从其暴露的表面反射，并且通过辐射将暴露表面的处理状态的结果信息从运动载体传输到固定的接收器，而不使用任何物理 传输介质如电线或光纤。 安装在移动物品载体上的多个传感器提供跨过暴露的物品表面的处理的均匀性的信息。 由固定接收机接收的辐射信号用于监视或控制处理，例如通过确定其端点。

公开(公告)号：WO1986006504A1

公开(公告)日：1986-11-06

申请号：PCT/US1986000897

申请日：1986-04-30

Applicant: LUXTRON CORPORATION

Inventor： LUXTRON CORPORATION ,  ELLIS, Roger, H. ,  ALYEA, John, W.

IPC: G02B06/38

CPC classification number: G02B6/3851 ,  G02B6/3831 ,  G02B6/3858 ,  G02B6/3861 ,  G02B6/3869 ,  G02B6/3885 ,  G02B6/3894

Abstract: A connector (20) for connecting two groups of optical fibers (52) in axial alignment comprises a receptacle (22) having therein a bore (34) extending through it for holding therein two plugs (24), one on each side. The surface of the bore (34) has two flat portions (44), one at each end. The portions of the plugs (24) to be inserted into the bore (34) also have flat portions (42) shaped to contact the flat portions (44) of the bore surface. The shape of the bore (34) and of the plugs (24) are such that after the plugs are inserted into the bore with the complementary flat portions in contact, rotation of the plugs (24) relative to the receptacle (22) is thereby prevented or reduced and so the two plugs (24) are substantially fixed in position relative to each other. Each of the two groups of optical fibers (52) is connected to and fixed in position relative to the flat portions (42) of the two plugs (24), so that after the two plugs (24) are inserted into the bore (34), the two groups of optical fibers (52) are axially aligned. Each plug (24) includes a ferrule having therein a passage and whose cross-section is star-shaped or in the shape of a polygon. The plug (24) also includes an insert (26) shaped to fit into the passage with spaces between the insert and the passage surface. The optical fibers (52) in a group are inserted into the spaces between the insert (26) and the star-shaped or polygon-shaped surface of the passage in the ferrule for connecting the fibers (52) to the plug (24) and for fixing the positions of the optical fibers (52) relative to the flat portion (42) of the plug (24). The spaces between the insert (26) and the ferrule of each plug (24) are preferably tapered to facilitate the insertion of the fibers (52) into the spaces.

公开(公告)号：WO1996010164A1

公开(公告)日：1996-04-04

申请号：PCT/US1995012234

申请日：1995-09-22

Applicant: LUXTRON CORPORATION

Inventor： LUXTRON CORPORATION ,  JENSEN, Earl, M.

IPC: G01J05/00

CPC classification number: G01J1/46 ,  G01J1/18 ,  G01J5/0096 ,  G01J5/061 ,  G01J5/08 ,  G01J5/0821 ,  G01J5/0893

Abstract: An automatic gain control technique integrates samples of an incoming analog signal a controlled amount of time so that the magnitudes of the samples lie within the desired input window of an analog-to-digital converter or other signal processing device. The values of the samples are then determined from a combination of the output of the signal processing device and their integration time. This is utilized in a system for determining the temperature of a surface of an object, without contacting the surface, by measuring the level of its infra-red radiation emission. A particular application of the system is to measure the temperature of a semiconductor wafer within a processing chamber while forming integrated circuits on it. The measuring system is configured on a single printed circuit board with an extra height metal heat sink structure to which a cooling unit is mounted. A photodetector and a circuit chip which performs the signal integrations are mounted within the cooling unit and operated at a uniform temperature. The combination of the variable time integration and cooling techniques greatly increases the signal-to-noise ratio of the measuring system. This allows surface temperature measurements to be made down to about 250 DEG C by measuring object emissions at slightly less than one micron in wavelength, conditions which provide signal levels which are normally too weak to measure accurately.

Abstract translation: 自动增益控制技术将输入的模拟信号的样本集成到受控的时间量，使得样本的幅度位于模数转换器或其它信号处理装置的期望的输入窗口内。 然后根据信号处理装置的输出与其积分时间的组合来确定样本的值。 这用于通过测量其红外辐射发射的水平来确定物体表面的温度而不与表面接触的系统。 该系统的特定应用是在处理室内测量半导体晶片的温度，同时在其上形成集成电路。 测量系统配置在具有安装冷却单元的额外高度的金属散热器结构的单个印刷电路板上。 执行信号积分的光检测器和电路芯片安装在冷却单元内并在均匀的温度下操作。 可变时间积分和冷却技术的结合大大提高了测量系统的信噪比。 这允许通过测量波长稍微小于1微米的物体辐射，使得表面温度测量值降低到约250℃，这些条件提供通常太弱而不能精确测量的信号水平。

公开(公告)号：WO1987002769A1

公开(公告)日：1987-05-07

申请号：PCT/US1986002218

申请日：1986-10-23

Applicant: LUXTRON CORPORATION

Inventor： LUXTRON CORPORATION ,  SUN, Mei, H. ,  WICKERSHEIM, Kenneth, A. ,  HEINEMANN, Stanley, G.

IPC: G01K01/18

CPC classification number: G01K11/3213 ,  G01D5/268 ,  G01N21/431

Abstract: Several types of optical sensors capable of measuring temperature, pressure, force, acceleration, radiation and electrical fields, fluid level, vapor pressure, etc., along with an electro-optical system for detecting the optical signal developed by the sensor. One probe utilizes a convex shaped structure (85) consisting of an elastomeric material (97) attached to an end of an optical fiber (87), the elastomeric material (97) being coated with a luminescent material (95), a combination capable of measuring both temperature and pressure. This probe is also specifically adapted for measuring surface temperature by making a good physical contact with the surface (99) being measured. Another such probe utilizes a non-elastomeric material (137) for the purpose of detecting both temperature and either index of refraction or vapor pressure changes. Improvements in other existing sensors (201) of physical parameters besides temperature are described wherein temperature is simultaneously measured for correcting such physical parameter measurements that are affected by temperature variations.

Abstract translation: 能够测量温度，压力，力，加速度，辐射和电场，液位，蒸汽压力等的几种类型的光学传感器，以及用于检测由传感器开发的光信号的电光系统。 一个探针使用由连接到光纤（87）的端部的弹性材料（97）组成的凸形结构（85），弹性体材料（97）涂覆有发光材料（95），能够 测量温度和压力。 该探针还特别适于通过与被测量的表面（99）进行良好的物理接触来测量表面温度。 另一种这样的探针利用非弹性体材料（137）来检测温度和折射率或蒸汽压力变化。 描述了除了温度之外的其它现有传感器（201）物理参数的改进，其中同时测量温度以校正受温度变化影响的这种物理参数测量。

公开(公告)号：WO2007087277A2

公开(公告)日：2007-08-02

申请号：PCT/US2007/001715

申请日：2007-01-19

Applicant: LUXTRON CORPORATION ,  HOANG, Anh ,  STAPLETON, Terry

Inventor： HOANG, Anh ,  STAPLETON, Terry

IPC: G01J5/00 ,  G01K11/00

CPC classification number: G01K11/3213 ,  G01J1/58 ,  G01J5/0037 ,  G01J5/029 ,  G01J5/041 ,  G01J5/042 ,  G01J5/045 ,  G01J5/046 ,  G01J5/048 ,  G01J5/08 ,  G01J5/0821 ,  G01J5/0896 ,  G01R31/027

Abstract: A probe for use within a high voltage and high current electrical device is disclosed. The probe comprises an optical fiber, a substrate having a slot, and a photoluminescent material. The fiber has a first and second end and is configured to convey an activation light from the first to second end. A portion of the fiber is within the slot such that the slot receives the second end of the fiber. Emission of the photoluminescent material, as a function of temperature, is known. The photoluminescent material is disposed within at least a portion of the slot that faces the second end of the fiber so that they are in optical communication with each other. A change in intensity of a luminescent light emitted back into the fiber by the photoluminescent material when the activation light is conveyed by the fiber onto the photoluminescent material provides an indication of the integrity of the electrical device.

Abstract translation: 公开了一种用于高电压大电流电气设备内的探头。 探针包括光纤，具有槽的衬底和光致发光材料。 光纤具有第一端和第二端，并被配置为将激发光从第一端传送至第二端。 光纤的一部分位于槽内，使得槽接纳光纤的第二端。 作为温度的函数的光致发光材料的发射是已知的。 光致发光材料设置在面向光纤的第二端的槽的至少一部分内，使得它们彼此光通信。 当激发光被光纤传送到光致发光材料上时，由光致发光材料发回到光纤中的荧光的强度变化提供了电子器件的完整性的指示。