公开(公告)号：WO2023274548A1

公开(公告)日：2023-01-05

申请号：PCT/EP2021/068244

申请日：2021-07-01

Applicant: MAX-PLANCK-GESELLSCHAFT ZUR FÖRDERUNG DER WISSENSCHAFTEN E.V.

Inventor： BOSCHKER, Johannes ,  BRAUN, Wolfgang ,  MANNHART, Jochen

IPC: H01L39/24 ,  G06N10/00 ,  C23C14/02 ,  C23C14/083 ,  C23C14/085 ,  C23C14/087 ,  C23C14/18 ,  C23C14/28 ,  C23C14/5813 ,  C23C14/5853

Abstract: The invention relates to a method of producing a solid-state component, in particular for a quantum component, preferably for a qubit, comprising one or more thin films, the one or more thin films comprising a first material and each said film having a thickness selected between a monolayer and 100 nm and is deposited onto a substrate surface of a substrate, wherein the production process is carried out in a reaction chamber sealed with respect to the ambient atmosphere. Further, the invention relates to a solid-state component, in particular for a quantum component, preferably for a qubit, comprising one or more thin films, one of the one or more thin films comprises a first material with a thickness between a monolayer and 100 nm and is deposited onto a substrate surface of a substrate. In addition, the invention relates to a quantum component comprising such a solid- state component according to the present invention and to an apparatus for producing such a solid-state component according to the present invention.

公开(公告)号：WO2023274547A1

公开(公告)日：2023-01-05

申请号：PCT/EP2021/068243

申请日：2021-07-01

Applicant: MAX-PLANCK-GESELLSCHAFT ZUR FÖRDERUNG DER WISSENSCHAFTEN E.V.

Inventor： SMINK, Alexander Everardus Maria ,  BRAUN, Wolfgang ,  BOSCHKER, Johannes ,  MAJER, Lena Nadine

IPC: C30B33/02 ,  C30B29/16 ,  H01L21/02 ,  H01L21/302 ,  H01L21/324 ,  H01L21/02005 ,  H01L21/3247

Abstract: The invention relates to a method of preparing a surface of a bulk substrate as an epitaxial template, to an epitaxial template and to a device comprising such an epitaxial template.