Patent search ap:("MAX-PLANCK-GESELLSCHAFT ZUR FÖRDERUNG DER WISSENSCHAFTEN E.V.") AND inv:"MAJER Page Lena Nadine"

1.

发明申请
METHOD OF PREPARING A SURFACE OF A SINGLE CRYSTAL WAFER AS AN EPITAXIAL TEMPLATE, EPITAXIAL TEMPLATE AND DEVICE 审中-公开

公开(公告)号：WO2023274547A1

公开(公告)日：2023-01-05

申请号：PCT/EP2021/068243

申请日：2021-07-01

Applicant: MAX-PLANCK-GESELLSCHAFT ZUR FÖRDERUNG DER WISSENSCHAFTEN E.V.

Inventor： SMINK, Alexander Everardus Maria , BRAUN, Wolfgang , BOSCHKER, Johannes , MAJER, Lena Nadine

IPC: C30B33/02 , C30B29/16 , H01L21/02 , H01L21/302 , H01L21/324 , H01L21/02005 , H01L21/3247

Abstract: The invention relates to a method of preparing a surface of a bulk substrate as an epitaxial template, to an epitaxial template and to a device comprising such an epitaxial template.

Patent Agency Ranking