公开(公告)号：WO0104653A9

公开(公告)日：2002-05-02

申请号：PCT/US0018711

申请日：2000-07-06

Applicant: MFI TECHNOLOGIES CORP

Inventor： BRIDGES GREG E ,  THOMSON DOUGLAS J

IPC: G01R1/067 ,  G01R31/311 ,  G01R31/26

CPC classification number: G01R1/06705 ,  G01R31/311 ,  Y10S977/732 ,  Y10S977/873 ,  Y10S977/901 ,  Y10S977/953

Abstract: A sub-micron probe apparatus (101) to be added to an existing probe station (113). In one embodiment, the probe apparatus includes a course positioning unit to be optionally mounted or added to an existing probe station platform. A fine positioning unit is attached to an arm attached to the course positioning unit (103). A cantilever having a tip is attached to a support structure attached to the fine positioning unit. The course and fine positioning units are used to place the cantilever (105) and tip (107) over a surface of a device under test (DUT) (119). Motion of the cantilever is detected with a motion sensor (111). An image of the surface of the DUT may be obtained. In addition, an electrical signal carried in an electrical trace on or near the surface of the DUT can be detected. An electrical signal may also be supplied to the electrical trace on or near the surface of the DUT. The field of vision of an optical imager (115) used to image the DUT at the probe area is not obstructed by the probe apparatus.

Abstract translation: 将要添加到现有探测台（113）的亚微米探针装置（101）。 在一个实施例中，探针装置包括可选地安装或添加到现有探测台平台的路线定位单元。 精细定位单元附接到附接到路线定位单元（103）的臂。 具有尖端的悬臂连接到附接到精细定位单元的支撑结构。 过程和精细定位单元用于将悬臂（105）和尖端（107）放置在被测器件（DUT）（119）的表面上。 用运动传感器（111）检测悬臂的运动。 可以获得DUT的表面的图像。 此外，可以检测携带在DUT表面上或附近的电迹线中的电信号。 电信号也可以提供给DUT表面上或附近的电迹线。 用于在探测区域成像DUT的光学成像器（115）的视野不被探测装置阻挡。