公开(公告)号：WO0214821A3

公开(公告)日：2002-08-15

申请号：PCT/US0124836

申请日：2001-08-08

Applicant: MKS INSTR INC

Inventor： LUCAS PAUL D ,  DENNER JOHN ,  GRUDZIEN CHRIS P ,  LISCHER JEFF ,  WEIGHT KRISTEN

IPC: G01L9/12 ,  G01L9/00 ,  G01L19/04

CPC classification number: G01L9/0072 ,  G01L19/04

Abstract: A pressure transducer assembly includes a first body, a diaphragm, and an electrode. The diaphragm is mounted between the first and second bodies. The first body and the diaphragm form a first chamber. The second body and the diaphragm form a second chamber. The electrode is disposed in the first chamber. A portion of the diaphragm flexes in a first direction in response to pressure in the first chamber being greater than pressure in the second chamber. A portion of the diaphragm flexes in a second direction, opposite the first direction, in response to pressure in the second chamber being greater than pressure in the first chamber. A capacitance between the electrode and the diaphragm is representative of a difference between the pressures in the first and second chambers. In some embodiments, the electrode is suspended from a hub and spoke mounting. In some embodiments the electrode is entirely metallic. In other embodiments, the electrode includes a ceramic disk with a conductive film formed on the disk and the disk is coupled to the housing with a ceramic rod. In some embodiments, the transducer also has a low thermal coefficient of expansion member connected to the housing for reducing warping in response to temperature changes. In additional embodiments, the disk includes a groove that reduces the effects of temperature variations on a ceramic electrode.

Abstract translation: 压力传感器组件包括第一主体，隔膜和电极。 隔膜安装在第一和第二主体之间。 第一体和隔膜形成第一腔室。 第二体和隔膜形成第二腔。 电极设置在第一室中。 响应于第一室中的压力大于第二室中的压力，隔膜的一部分沿第一方向弯曲。 响应于第二室中的压力大于第一室中的压力，隔膜的一部分在与第一方向相反的第二方向上弯曲。 电极和隔膜之间的电容代表第一和第二腔室中的压力差。 在一些实施例中，电极从毂和轮辐安装悬挂。 在一些实施例中，电极是完全金属的。 在其他实施例中，电极包括具有形成在盘上的导电膜的陶瓷盘，并且盘通过陶瓷棒联接到壳体。 在一些实施例中，换能器还具有连接到壳体的低热膨胀系数，用于响应温度变化减少翘曲。 在另外的实施例中，盘包括减小温度变化对陶瓷电极的影响的凹槽。

公开(公告)号：WO2006076745B1

公开(公告)日：2006-09-08

申请号：PCT/US2006002757

申请日：2006-01-13

Applicant: MKS INSTR INC ,  GRUDZIEN CHRIS P

Inventor： GRUDZIEN CHRIS P

IPC: G01L9/12 ,  G01L9/06

CPC classification number: G01L19/0609 ,  G01L9/0075

Abstract: The disclosed pressure sensor includes a body, a diaphragm, and a flow defining structure. The body defines an interior volume. The diaphragm divides the interior volume into a first portion and a second portion. At least a first part of the diaphragm moves in a first direction when a pressure in the first portion increases relative to a pressure in the second portion. The first part of the diaphragm moves in a second direction when the pressure in the first portion decreases relative to the pressure in the second portion. The first part of the diaphragm and at least a first part of the body are characterized by a capacitance. The capacitance changes in response to movement of the first part of diaphragm relative to the first part of the body. The flow defining structure provides a fluid flow path from the first portion of the interior volume to a position outside of the internal volume. At least part of the fluid flow path extends from a first location to a second location. The at least part of the fluid flow path is characterized by a total length and a straight line distance. The total length is the shortest distance through the path from the first location to the second location. The straight line distance is the shortest distance between the first location and the second location. The total length is at least two times greater than the straight line distance.

Abstract translation: 所公开的压力传感器包括主体，隔膜和流动限定结构。 身体定义一个内部体积。 隔膜将内部容积分成第一部分和第二部分。 当第一部分中的压力相对于第二部分中的压力增加时，隔膜的至少第一部分沿第一方向移动。 当第一部分中的压力相对于第二部分中的压力减小时，隔膜的第一部分在第二方向上移动。 隔膜的第一部分和身体的至少第一部分的特征在于电容。 电容响应于隔膜的第一部分相对于身体的第一部分的运动而改变。 流动限定结构提供从内部容积的第一部分到内部容积外部的位置的流体流动路径。 流体流路的至少一部分从第一位置延伸到第二位置。 流体流路的至少一部分的特征在于总长度和直线距离。 总长度是从第一位置到第二位置的路径的最短距离。 直线距离是第一位置和第二位置之间的最短距离。 总长度至少比直线距离大两倍。

公开(公告)号：WO2006041719A3

公开(公告)日：2006-06-29

申请号：PCT/US2005035167

申请日：2005-10-03

Applicant: MKS INSTR INC ,  GRUDZIEN CHRIS P

Inventor： GRUDZIEN CHRIS P

IPC: G01L9/00

CPC classification number: G01L9/0075

Abstract: The axial distance between opposing conductors of a capacitance pressure transducer can depend, in part, upon the thickness of a seal that is disposed between a housing and a diaphragm of the capacitance pressure transducer. The present invention utilizes spacer elements and sealing beads to form a seal that is disposed between the housing and the diaphragm of a capacitance pressure transducer. The sealing beads have a melting temperature that is lower than the melting temperature of the spacer elements. The sealing beads are melted so that they flow around and surround the unmelted spacer elements. Upon solidifying, the sealing beads and the spacer elements thus form the seal. The thickness of the seal can be established accurately and uniformly by controlling the height of the spacer elements. By utilizing a seal that has an accurate and uniform thickness, the opposing conductors of the capacitance pressure transducer can be accurately positioned and oriented in relationship to each other during the manufacturing process.

Abstract translation: 电容压力传感器的相对导体之间的轴向距离可以部分地取决于设置在电容压力传感器的外壳和隔膜之间的密封件的厚度。 本发明利用间隔元件和密封珠形成密封件，该密封件设置在壳体和电容式压力传感器的隔膜之间。 密封珠的熔融温度低于间隔元件的熔融温度。 密封珠被熔化，使得它们流动并围绕未熔化的间隔元件。 在固化时，密封珠和间隔元件因此形成密封。 可以通过控制间隔元件的高度来精确而均匀地确定密封的厚度。 通过利用具有精确和均匀厚度的密封件，可以在制造过程中将电容压力传感器的相对导体彼此精确地定位和定向。