公开(公告)号：WO2005036034A2

公开(公告)日：2005-04-21

申请号：PCT/US2004025888

申请日：2004-08-10

Applicant: MKS INSTR INC ,  LUCAS PAUL D ,  CARBONE ANTHONY J

Inventor： LUCAS PAUL D ,  CARBONE ANTHONY J

IPC: F16K3/06 ,  F16K

CPC classification number: F16K3/06

Abstract: A valve assembly including a housing having a flow channel and an annular surface surrounding the flow channel, a slide plate movable to a closed position, and a seal ring positioned between the annular surface and the slide plate. The seal ring includes a first and second sides, a first surface extending between the first and the second sides and facing towards the annular surface of the housing, and a second surface axially spaced from the first surface and extending between the first and the second sides and facing towards the slide plate. The second surface includes a continuous annular sealing portion for contacting the slide plate when the seal ring is biased against the slide plate so that a fluid-tight seal can be formed between the continuous annular sealing portion and the slide plate, and at least one passageway positioned between the annular sealing portion and the second side.

Abstract translation: 一种阀组件，包括具有流动通道和围绕流动通道的环形表面的壳体，可移动到关闭位置的滑动板以及定位在环形表面和滑动板之间的密封环。 密封环包括第一侧和第二侧，在第一侧和第二侧之间延伸并且面向壳体的环形表面的第一表面以及与第一表面轴向间隔开并且在第一侧和第二侧之间延伸的第二表面 并朝向滑板。 第二表面包括连续的环形密封部分，用于当密封环偏置在滑板上时与滑板接触，从而在连续的环形密封部分和滑板之间形成流体密封，并且至少一个通道 位于环形密封部分和第二侧之间。

公开(公告)号：WO2004061341A8

公开(公告)日：2005-11-03

申请号：PCT/US0338003

申请日：2003-11-26

Applicant: MKS INSTR INC

Inventor： LUCAS PAUL D

IPC: F16K1/24 ,  F16K51/02 ,  F16K1/16

CPC classification number: F16K51/02 ,  F16K3/10

Abstract: A valve assembly including a housing having an opening defined by a valve seat, a valve body movable within the housing between a completely opened position disengaged from the valve seat and a completely closed position engaging the valve seat, and a sleeve movable longitudinally along, and rotatably about, a longitudinal axis. The sleeve is connected to the valve body so that the valve body can rotate and move longitudinally with the sleeve. One of the housing and the sleeve includes a cam surface, and the other of the housing and the sleeve includes a cam follower received by the cam surface. A rotatable shaft is in threaded engagement with the sleeve so that rotation of the shaft causes at least one of rotation and longitudinal movement of the sleeve against the cam follower.

Abstract translation: 一种阀组件，包括具有由阀座限定的开口的壳体，可在壳体内可从阀座脱离的完全打开位置与接合阀座的完全关闭位置之间移动的阀体以及沿着阀座纵向移动的套筒以及 可旋转地围绕纵向轴线。 套管连接到阀体，使得阀体可以与套筒一起旋转并纵向移动。 壳体和套筒中的一个包括凸轮表面，并且壳体和套筒中的另一个包括由凸轮表面接收的凸轮从动件。 旋转轴与套筒螺纹接合，使得轴的旋转引起套筒相对于凸轮从动件的旋转和纵向运动中的至少一个。

公开(公告)号：WO2004061341A3

公开(公告)日：2004-12-29

申请号：PCT/US0338003

申请日：2003-11-26

Applicant: MKS INSTR INC

Inventor： LUCAS PAUL D

IPC: F16K1/24 ,  F16K51/02 ,  F16K1/16

CPC classification number: F16K51/02 ,  F16K3/10

Abstract: A valve assembly including a housing having an opening defined by a valve seat, a valve body movable within the housing between a completely opened position disengaged from the valve seat and a completely closed position engaging the valve seat, and a sleeve movable longitudinally along, and rotatably about, a longitudinal axis. The sleeve is connected to the valve body so that the valve body can rotate and move longitudinally with the sleeve. One of the housing and the sleeve includes a cam surface, and the other of the housing and the sleeve includes a cam follower received by the cam surface. A rotatable shaft is in threaded engagement with the sleeve so that rotation of the shaft causes at least one of rotation and longitudinal movement of the sleeve against the cam follower.

公开(公告)号：WO2004074720A3

公开(公告)日：2005-03-10

申请号：PCT/US0341268

申请日：2003-12-24

Applicant: MKS INSTR INC

Inventor： LUCAS PAUL D

IPC: F16K3/06 ,  F16K3/10 ,  F16K51/02 ,  F16K25/00

CPC classification number: F16K3/06 ,  F16K3/10 ,  F16K51/02

Abstract: A valve assembly including a housing having a flow channel, a slide plate movable between a closed position and an opened position, and a seal ring surrounding the flow channel and engaging the slide plate in the closed position and disengaging the slide plate in the opened position. The seal ring has a plurality of bores aligned, respectively, with holes formed in an adjacent surface of the housing. Each bore includes an undercut defining a lip. A plurality of fasteners are arranged in the holes of the annular surface of the housing and extend into the corresponding bores of the seal ring. Side walls of the fasteners include slots, which catch on the lips of the bores of the seal ring when the fasteners are inserted into the bores of the seal ring, and the seal ring is rotated.

Abstract translation: 一种阀组件，包括具有流动通道的壳体，在关闭位置和打开位置之间可移动的滑动板，以及环绕流动通道并且将滑动板接合在关闭位置的密封环，并将滑板与打开位置分离 。 密封环具有分别与形成在壳体的相邻表面中的孔对准的多个孔。 每个孔包括限定唇缘的底切。 多个紧固件布置在壳体的环形表面的孔中并延伸到密封环的相应的孔中。 紧固件的侧壁包括槽，当紧固件插入到密封环的孔中时，其卡紧在密封环的孔的唇缘上，并且密封环被旋转。

公开(公告)号：WO0214821A3

公开(公告)日：2002-08-15

申请号：PCT/US0124836

申请日：2001-08-08

Applicant: MKS INSTR INC

Inventor： LUCAS PAUL D ,  DENNER JOHN ,  GRUDZIEN CHRIS P ,  LISCHER JEFF ,  WEIGHT KRISTEN

IPC: G01L9/12 ,  G01L9/00 ,  G01L19/04

CPC classification number: G01L9/0072 ,  G01L19/04

Abstract: A pressure transducer assembly includes a first body, a diaphragm, and an electrode. The diaphragm is mounted between the first and second bodies. The first body and the diaphragm form a first chamber. The second body and the diaphragm form a second chamber. The electrode is disposed in the first chamber. A portion of the diaphragm flexes in a first direction in response to pressure in the first chamber being greater than pressure in the second chamber. A portion of the diaphragm flexes in a second direction, opposite the first direction, in response to pressure in the second chamber being greater than pressure in the first chamber. A capacitance between the electrode and the diaphragm is representative of a difference between the pressures in the first and second chambers. In some embodiments, the electrode is suspended from a hub and spoke mounting. In some embodiments the electrode is entirely metallic. In other embodiments, the electrode includes a ceramic disk with a conductive film formed on the disk and the disk is coupled to the housing with a ceramic rod. In some embodiments, the transducer also has a low thermal coefficient of expansion member connected to the housing for reducing warping in response to temperature changes. In additional embodiments, the disk includes a groove that reduces the effects of temperature variations on a ceramic electrode.

Abstract translation: 压力传感器组件包括第一主体，隔膜和电极。 隔膜安装在第一和第二主体之间。 第一体和隔膜形成第一腔室。 第二体和隔膜形成第二腔。 电极设置在第一室中。 响应于第一室中的压力大于第二室中的压力，隔膜的一部分沿第一方向弯曲。 响应于第二室中的压力大于第一室中的压力，隔膜的一部分在与第一方向相反的第二方向上弯曲。 电极和隔膜之间的电容代表第一和第二腔室中的压力差。 在一些实施例中，电极从毂和轮辐安装悬挂。 在一些实施例中，电极是完全金属的。 在其他实施例中，电极包括具有形成在盘上的导电膜的陶瓷盘，并且盘通过陶瓷棒联接到壳体。 在一些实施例中，换能器还具有连接到壳体的低热膨胀系数，用于响应温度变化减少翘曲。 在另外的实施例中，盘包括减小温度变化对陶瓷电极的影响的凹槽。