公开(公告)号：WO2019070336A1

公开(公告)日：2019-04-11

申请号：PCT/US2018/045367

申请日：2018-08-06

Applicant: MOXTEK, INC.

Inventor： LI, Hua ,  WANG, Bin ,  BOWERS, Brian

IPC: G02B5/30

Abstract: A wire grid polarizer (WGP) (10, 30) can have low transmission of a primarily reflected/absorbed polarization (e.g. low Ts). The WGP can comprise an array of wires (16) on a substrate (17) and a stack of thin films (19) between the substrate and the array of wires. The stack of thin films can include a first layer (11) closest to the substrate, a second layer (12) over the first layer, and a third layer (13) over the second layer and closest to the array of wires. An index of refraction of the first layer can be greater than an index of refraction of the substrate, an index of refraction of the second layer can be greater than the index of refraction of the first layer, and an index of refraction of the third layer can be less than the index of refraction of the first layer.

公开(公告)号：WO2015183471A1

公开(公告)日：2015-12-03

申请号：PCT/US2015/028915

申请日：2015-05-01

Applicant: MOXTEK, INC. ,  HUANG, Austin ,  PROBST, Dean ,  WANG, Bin ,  LI, Hua

Inventor： HUANG, Austin ,  PROBST, Dean ,  WANG, Bin ,  LI, Hua

IPC: G02B5/30

CPC classification number: G02B27/149 ,  G02B5/04 ,  G02B5/3058 ,  G02B27/142 ,  G02B27/283 ,  G02B27/285

Abstract: Cube polarizers (10, 40, 80) designed for substantially equal optical path lengths of a reflected beam (R) and a transmitted beam (T). Cube polarizers designed to reduce wire grid polarizer curvature in order to minimize wavefront distortion of the reflected beam and the transmitted beam.

Abstract translation: 被设计用于反射光束（R）和透射光束（T）的基本相等的光程长度的立方体偏振器（10,40,80）。 设计的立方体偏振器旨在减少线栅偏振器的曲率，以最小化反射光束和透射光束的波前失真。

公开(公告)号：WO2015060941A1

公开(公告)日：2015-04-30

申请号：PCT/US2014/053161

申请日：2014-08-28

Applicant: MOXTEK, INC.

Inventor： WANG, Bin ,  WANGENSTEEN, Ted ,  PETROVA, Rumyana ,  BLACK, Mike ,  MARKS, Steven ,  PROBST, Dean

IPC: G02B27/28

CPC classification number: G02B5/3058

Abstract: Wire grid polarizers (10, 20, 30, 40, 50, 60, 70, 80, 90, 100, 110), and methods of making wire grid polarizers, including an array of parallel, elongated nano-structures (15) disposed over a surface of a substrate (11). Each of the nano-structures can include a first rib (14) disposed over a surface of a substrate and a pair of parallel, elongated wires (12), each laterally oriented with respect to one another, and disposed over the first rib. The wire grid polarizers can be durable with high transmission of one polarization of light, high contrast, and / or small pitch. The wire grid polarizers can also have high absorption or high reflection of an opposite polarization of light.

Abstract translation: 线栅偏振器（10,20,30,40,50,60,70,80,90,100,110）以及制造线栅偏振器的方法，包括平行的细长纳米结构（15）阵列，其布置在 衬底（11）的表面。 每个纳米结构可以包括设置在基板的表面上的第一肋（14）和一对平行的细长导线（12），每个横向相对于彼此定向并设置在第一肋上。 线栅偏振器可以耐用，具有一个极化的光，高对比度和/或小间距的高透射率。 线栅偏振器还可以具有相反的光偏振的高吸收或高反射。

公开(公告)号：WO2016069103A1

公开(公告)日：2016-05-06

申请号：PCT/US2015/047952

申请日：2015-09-01

Applicant: MOXTEK, INC.

Inventor： WANG, Bin

IPC: G02B27/10 ,  G02B27/28

CPC classification number: G02B27/283 ,  G02B5/1833 ,  G02B5/3083

Abstract: The invention is a dielectric polarizing beam splitter (10, 20a, 20b, 30, 40) including a grating-layer (13) disposed over a substantially planar surface of a substrate (11). The grating-layer can include an array of elongated, substantially-parallel alternating high-index regions (13H) and low-index regions (13L). An index of refraction (nL) of the low-index-regions can be less than an index of refraction (nH) of the high-index-regions.

Abstract translation: 本发明是一种介质偏振分束器（10,20a，20b，30,40），其包括设置在基板（11）的基本平坦的表面上的光栅层（13）。 光栅层可以包括细长的，基本上平行的交替的高折射率区域（13H）和低折射率区域（13L）的阵列。 低折射率区域的折射率（nL）可以小于高折射率区域的折射率（nH）。

公开(公告)号：WO2009002792A2

公开(公告)日：2008-12-31

申请号：PCT/US2008/067427

申请日：2008-06-19

Applicant: MOXTEK, INC. ,  WANG, Bin ,  GARDNER, Eric, W. ,  PERKINS, Raymond, T.

Inventor： WANG, Bin ,  GARDNER, Eric, W. ,  PERKINS, Raymond, T.

IPC: G02B27/28 ,  G02B5/30

CPC classification number: G02B5/3058

Abstract: A reflection repressed wire-grid polarizer (10a-e) for polarizing incident visible or infrared light (12) and selectively repressing a reflected polarization includes at least three layers (18a-d) disposed on a substrate (14). A polarizing wire-grid layer (18a) has an array of parallel metal wires (22) with a period less than half the wavelength of the incident light. A reflection-repressing layer or grid (18c) includes an inorganic and non-dielectric material which is optically absorptive of visible or infrared light, A dielectric layer or grid (18b, 18d) includes an inorganic and dielectric material.

Abstract translation: 用于偏振入射的可见光或红外光（12）并选择性地抑制反射偏振的反射抑制线栅偏振器（10a-e）包括设置在基板（14）上的至少三层（18a-d）。 极化线栅层（18a）具有平行金属线（22）的阵列，其周期小于入射光的波长的一半。 反射抑制层或栅格（18c）包括光学吸收可见光或红外光的无机和非介电材料。电介质层或栅格（18b，18d）包括无机和电介质材料。

公开(公告)号：WO2016126484A1

公开(公告)日：2016-08-11

申请号：PCT/US2016/015121

申请日：2016-01-27

Applicant: MOXTEK, INC

Inventor： WANGENSTEEN, Ted ,  WANG, Bin ,  GEORGE, Matt ,  MILLS, Paul Steven ,  FARHANG, Arash

IPC: G02B5/30

CPC classification number: G02B5/3058 ,  G02B27/0012

Abstract: An embedded, inverse wire-grid polarizer (WGP) includes ribs (13) located over a surface of a transparent substrate (11), gaps (16) between the ribs, and a fill-layer (15) substantially filling the gaps. The fill-layer has a relatively high index of refraction, such as greater than 1.4. At a wavelength of light incident upon the WGP, E11 transmission can be greater than El. transmission. E11 is a polarization of light with an electric field oscillation parallel to a length L of the ribs, and El. is a polarization of light with an electric field oscillation perpendicular to a length L of the ribs. This embedded, inverse WGP is especially useful for polarizing, with high WGP performance, small wavelength (high-energy) regions of the electromagnetic spectrum (e.g. UV) which are difficult to polarize with conventional WGPs (El. transmission > E11 transmission).

Abstract translation: 嵌入的反向线栅偏振器（WGP）包括位于透明基板（11）的表面上方的肋（13），肋之间的间隙（16）和基本上填充间隙的填充层（15）。 填充层具有相对较高的折射率，例如大于1.4。 在入射到WGP的光波长下，E11传输可能大于El。 传输。 E11是具有与肋的长度L平行的电场振荡的光的偏振光，El。 是具有与肋的长度L垂直的电场振荡的光的偏振光。 这种嵌入的反相WGP对于具有高WGP性能，难以用常规WGP（E1传输> E11传输）极化的电磁频谱的小波长（高能量）区域）的偏振特别有用。

公开(公告)号：WO2015060943A1

公开(公告)日：2015-04-30

申请号：PCT/US2014/053216

申请日：2014-08-28

Applicant: MOXTEK, INC.

Inventor： WANG, Bin ,  WANGENSTEEN, Ted ,  PETROVA, Rumyana ,  BLACK, Mike ,  MARKS, Steven ,  PROBST, Dean

IPC: G02B27/28

CPC classification number: G02B5/3058

Abstract: A wire grid polarizer (10, 20, 30, 90) comprising an array of parallel, elongated nano-structures (15) disposed over a surface of a substrate (11). Each of the nano-structures can include a pair of parallel, elongated wires (16), or top ribs (12), each oriented laterally with respect to one another. There can be a first gap (G 1 ) disposed between the pair of wires (or top ribs). Each of the nano-structures can be separated from an adjacent nano-structure by a second gap (G 2 ) disposed between adjacent nanostructures, and thus between adjacent pairs of wires. A first gap width (W 1 ) of the first gap can be different than a second gap width (W 2 ) of the second gap. Also included are methods of making wire grid polarizers.

Abstract translation: 一种线栅偏振器（10,20,30,90），包括设置在衬底（11）的表面上的平行的，细长的纳米结构（15）的阵列。 每个纳米结构可以包括一对平行的细长线（16）或顶部肋（12），每个横向相对于彼此定向。 可以在一对导线（或顶部肋）之间设置第一间隙（G1）。 每个纳米结构可以通过设置在相邻纳米结构之间的第二间隙（G2）和相邻的导线对之间与相邻的纳米结构分离。 第一间隙的第一间隙宽度（W1）可以不同于第二间隙的第二间隙宽度（W2）。 还包括制造线栅偏振器的方法。

公开(公告)号：WO2009002791A1

公开(公告)日：2008-12-31

申请号：PCT/US2008/067423

申请日：2008-06-19

Applicant: MOXTEK, INC. ,  PERKINS, Raymond, T. ,  DAVIS, Mark, A. ,  WANG, Bin ,  GARDNER, Eric, W.

Inventor： PERKINS, Raymond, T. ,  DAVIS, Mark, A. ,  WANG, Bin ,  GARDNER, Eric, W.

IPC: G02B5/30 ,  G02B27/28

CPC classification number: G02B5/3058

Abstract: A selectively absorptive, mulitlayer wire-grid polarizer (10a-e) for polarizing incident light (12) includes a stack of thin film layers (18) disposed over a substrate (14), including a wire-grid array of elongated metal elements (26) having a period less than half the wavelength of the light. One of the layers can include a thin film layer with a refractive index greater than a refractive index of the substrate. One of the thin film layers (30a-c) can include a dielectric array of non-metal elements. One of the layers (34a-b) includes a material that is optically absorptive to the incident light.

Abstract translation: 用于偏振入射光（12）的选择性吸收多层线栅偏振器（10a-e）包括设置在衬底（14）上方的薄层（18）堆叠，包括细长金属元件的线栅阵列（ 26），其周期小于光的波长的一半。 层中的一个可以包括折射率大于衬底的折射率的薄膜层。 薄膜层（30a-c）中的一个可以包括非金属元素的介电体阵列。 层（34a-b）中的一个包括对入射光进行光学吸收的材料。

公开(公告)号：WO2009002573A1

公开(公告)日：2008-12-31

申请号：PCT/US2008/055685

申请日：2008-03-03

Applicant: MOXTEK, INC. ,  GARDNER, Eric ,  WANG, Bin ,  DAVIS, Mark ,  DREDGE, John, D., Jr.

Inventor： GARDNER, Eric ,  WANG, Bin ,  DAVIS, Mark ,  DREDGE, John, D., Jr.

IPC: G02B5/30 ,  G02B5/18

CPC classification number: G02B5/3075 ,  G02B5/3058 ,  G02B5/3091

Abstract: An inorganic, dielectric grid polarizer device (10, 10b, 10c, I0d, 10e, 10f) includes a stack (14, 14b, 14c, 14d, 14e, 14f of film layers ( 18a, 18b) disposed over a substrate (22). Each film layer is formed of a material that is both inorganic and dielectric. Adjacent film layers each have different refractive indices. At least one of the film layers is discontinuous to form a form-birefringent layer (26) with an array of parallel ribs (30) having a period less than 400 nm. Another layer, different than the form-birefringent layer, is formed of an optically absorptive material for the ultra-violet spectrum.

Abstract translation: 无机介电栅极偏振器装置（10,10b，10c，110d，10e，10f）包括设置在衬底（22）上方的膜层（18a，18b）的叠层（14,14b，14c，14d，14e，14f） 每个膜层由无机和电介质的材料形成，相邻的膜层各自具有不同的折射率，至少一个膜层是不连续的，以形成具有平行肋阵列的形式双折射层（26） （30）具有小于400nm的周期，与形成双折射层不同的另一层由用于紫外光谱的光学吸收材料形成。

公开(公告)号：WO2018097894A1

公开(公告)日：2018-05-31

申请号：PCT/US2017/053953

申请日：2017-09-28

Applicant: MOXTEK, INC.

Inventor： NIELSON, R., Stewart ,  OGDEN, Shaun ,  FREE, Matt ,  WANG, Bin ,  LI, Hua ,  BOWERS, Brian

IPC: G02B5/30 ,  G02B5/18

CPC classification number: G02B5/3058 ,  G02B1/14 ,  G02B5/045 ,  G02B5/3075 ,  G02B27/283

Abstract: A wire grid polarizer (WGP) (10, 30, 40, 50) can have improved performance due to a high aspect ratio (e.g. > 3, > 5, > 10, > 15, > 20, or > 30), where aspect ratio equals T/W, T is a sum of a thickness of wires of the first array (11) plus a thickness of wires of the second array (12) (i.e. T=Th11+Th12), and W is a maximum width of wires of the first array (11) and/or of the second array (12). Such high aspect ratio can be achieved with two arrays of wires (11 and 12), each capped by a thin film (01 and 02).