公开(公告)号：WO2016160795A1

公开(公告)日：2016-10-06

申请号：PCT/US2016/024696

申请日：2016-03-29

Applicant: MOXTEK, INC.

Inventor： LINFORD, Matt ,  DIWAN, Anubhav ,  LANE, Fred ,  NIELSON, Stew ,  WANGENSTEEN, Ted

IPC: G02B5/18 ,  G02B5/30 ,  G02B1/14

CPC classification number: G02B1/14 ,  C07F9/4006 ,  G02B5/3058

Abstract: A wire grid polarizer (WGP) (10) can have a phosphonate conformal-coating (13) to protect the WGP (10) from at least one of the following: corrosion, dust, and damage due to tensile forces in a liquid on the WGP. The conformal-coating (13) can include a chemical: where R 1 can include a hydrophobic group, Z can be a bond to the ribs (12), and R 5 can be any suitable chemical element or group. A method of applying a phosphonate conformal-coating (13) over a WGP (10) can include exposing the WGP (10) to (R 1 )iPO(R 4 )j(R 5 )k, where: i is 1 or 2, j is 1 or 2, k is 0 or 1, and i+j+k = 3; each R 1 can independently be a hydrophobic group; R 4 can be a phosphonate-reactive-group; each R6 can independently be an alkyl group, an aryl group, or combinations thereof; and each R 5 , if any, can independently be any suitable chemical element or group.

Abstract translation: 线栅偏振器（WGP）（10）可以具有膦酸盐保形涂层（13）以保护WGP（10）免受以下中的至少一种：腐蚀，灰尘和由于液体中的拉力造成的损坏 WGP。 共形涂层（13）可以包括化学品：其中R 1可以包括疏水基团，Z可以是与肋（12）的键合，并且R 5可以是任何合适的化学元素或基团。 在WGP（10）上施加膦酸酯保形涂层（13）的方法可以包括将WGP（10）暴露于（R1）iPO（R4）j（R5）k，其中：i为1或2，j为 1或2，k为0或1，i + j + k = 3; 每个R 1可以独立地是疏水基团; R4可以是膦酸酯反应性基团; 每个R 6可以独立地为烷基，芳基或其组合; 并且每个R 5（如果有的话）可以独立地是任何合适的化学元素或基团。

公开(公告)号：WO2018097873A1

公开(公告)日：2018-05-31

申请号：PCT/US2017/049660

申请日：2017-08-31

Applicant: MOXTEK, INC.

Inventor： NIELSON, R. Stewart ,  WILLIAMS, Bradley R. ,  FREE, Mathew ,  WANGENSTEEN, Ted

IPC: G02B5/30 ,  G02B1/113

Abstract: A wire grid polarizer (WGP) can be durable and have high performance. The WGP can comprise an array of wires 13 on a substrate 11. An overcoat layer 32 can be located at distal ends of the array of wires 13 and can span channels 15 between the wires 13. A conformal-coat layer 61 can coat sides 13s and distal ends 13d of the wires 13 between the wires 13 and the overcoat layer 32. The overcoat layer can comprise aluminum oxide. An antireflection layer 33 can be located over the overcoat layer 32.

公开(公告)号：WO2015060941A1

公开(公告)日：2015-04-30

申请号：PCT/US2014/053161

申请日：2014-08-28

Applicant: MOXTEK, INC.

Inventor： WANG, Bin ,  WANGENSTEEN, Ted ,  PETROVA, Rumyana ,  BLACK, Mike ,  MARKS, Steven ,  PROBST, Dean

IPC: G02B27/28

CPC classification number: G02B5/3058

Abstract: Wire grid polarizers (10, 20, 30, 40, 50, 60, 70, 80, 90, 100, 110), and methods of making wire grid polarizers, including an array of parallel, elongated nano-structures (15) disposed over a surface of a substrate (11). Each of the nano-structures can include a first rib (14) disposed over a surface of a substrate and a pair of parallel, elongated wires (12), each laterally oriented with respect to one another, and disposed over the first rib. The wire grid polarizers can be durable with high transmission of one polarization of light, high contrast, and / or small pitch. The wire grid polarizers can also have high absorption or high reflection of an opposite polarization of light.

Abstract translation: 线栅偏振器（10,20,30,40,50,60,70,80,90,100,110）以及制造线栅偏振器的方法，包括平行的细长纳米结构（15）阵列，其布置在 衬底（11）的表面。 每个纳米结构可以包括设置在基板的表面上的第一肋（14）和一对平行的细长导线（12），每个横向相对于彼此定向并设置在第一肋上。 线栅偏振器可以耐用，具有一个极化的光，高对比度和/或小间距的高透射率。 线栅偏振器还可以具有相反的光偏振的高吸收或高反射。

公开(公告)号：WO2018097878A1

公开(公告)日：2018-05-31

申请号：PCT/US2017/052471

申请日：2017-09-20

Applicant: MOXTEK, INC.

Inventor： NIELSON, R. Stewart ,  OGDEN, Shaun ,  FREE, Mathew ,  WILLIAMS, Bradley R. ,  LANE, Fred ,  WANGENSTEEN, Ted ,  GEORGE, Matthew C.

IPC: G02B5/30 ,  G02B5/18

Abstract: A wire grid polarizer (WGP) (10, 20, 30, 40, 50, 60, 70, 80, 90, 100, 110, 120, 130, 140) can include a heat-dissipation layer (16). The heat-dissipation layer can enable the WGP to be able to endure high temperatures. The heat- dissipation layer can be located a) over an array of wires (12) and farther from a transparent substrate (11) than the array of wires; or b) between the array of wires and the transparent substrate. The heat-dissipation layer can be a continuous layer. The heat-dissipation layer can have a high electrical resistivity and a high coefficient of thermal conductivity.

公开(公告)号：WO2016160803A1

公开(公告)日：2016-10-06

申请号：PCT/US2016/024713

申请日：2016-03-29

Applicant: MOXTEK, INC.

Inventor： WANGENSTEEN, Ted ,  NIELSON, Stew ,  LANE, Fred ,  LINFORD, Matt ,  DIWAN, Anubhav

IPC: G02B5/30 ,  G02B5/26

CPC classification number: G02B1/14 ,  B05D1/60 ,  B05D5/08 ,  B05D2350/63 ,  C09D5/084 ,  C23C16/308 ,  C23C16/325 ,  C23C16/345 ,  C23C16/401 ,  C23C16/403 ,  C23C16/405 ,  C23C16/45555 ,  G02B1/04 ,  G02B5/3058

Abstract: A wire grid polarizer (WGP) (10) can have a conformal-coating (13) to protect the WGP (10) from oxidation and/or corrosion. The conformal-coating (13) can include a barrier layer with at least one: of aluminum oxide, silicon oxide, silicon nitride, silicon oxynitride, silicon carbide, hafnium oxide, and zirconium oxide. A method of making a WGP (10) can include applying the barrier layer over ribs (12) of a WGP (10) by vapor deposition.

Abstract translation: 线栅偏振器（WGP）（10）可以具有保形涂层（13）以保护WGP（10）不被氧化和/或腐蚀。 共形涂层（13）可以包括具有至少一种氧化铝，氧化硅，氮化硅，氮氧化硅，碳化硅，氧化铪和氧化锆中的至少一种的阻挡层。 制造WGP（10）的方法可以包括通过气相沉积将阻挡层施加在WGP（10）的肋（12）上。

公开(公告)号：WO2016160784A1

公开(公告)日：2016-10-06

申请号：PCT/US2016/024676

申请日：2016-03-29

Applicant: MOXTEK, INC.

Inventor： NIELSON, Stew ,  WANGENSTEEN, Ted ,  LANE, Fred ,  LINFORD, Matt ,  DIWAN, Anubhav

IPC: G02B5/18 ,  G02B5/30

CPC classification number: G02B5/3058

Abstract: Wire grid polarizer (WGP) (10) performance can be improved by use of certain water-soluble materials. Such water-soluble materials can be protected by a conformal coating (13), which can be applied by an anhydrous method, such as vapor deposition for example.

Abstract translation: 线栅偏振器（WGP）（10）性能可以通过使用某些水溶性材料来改善。 这种水溶性材料可以通过保形涂层（13）来保护，其可以通过无水方法例如气相沉积来施加。

公开(公告)号：WO2016126484A1

公开(公告)日：2016-08-11

申请号：PCT/US2016/015121

申请日：2016-01-27

Applicant: MOXTEK, INC

Inventor： WANGENSTEEN, Ted ,  WANG, Bin ,  GEORGE, Matt ,  MILLS, Paul Steven ,  FARHANG, Arash

IPC: G02B5/30

CPC classification number: G02B5/3058 ,  G02B27/0012

Abstract: An embedded, inverse wire-grid polarizer (WGP) includes ribs (13) located over a surface of a transparent substrate (11), gaps (16) between the ribs, and a fill-layer (15) substantially filling the gaps. The fill-layer has a relatively high index of refraction, such as greater than 1.4. At a wavelength of light incident upon the WGP, E11 transmission can be greater than El. transmission. E11 is a polarization of light with an electric field oscillation parallel to a length L of the ribs, and El. is a polarization of light with an electric field oscillation perpendicular to a length L of the ribs. This embedded, inverse WGP is especially useful for polarizing, with high WGP performance, small wavelength (high-energy) regions of the electromagnetic spectrum (e.g. UV) which are difficult to polarize with conventional WGPs (El. transmission > E11 transmission).

Abstract translation: 嵌入的反向线栅偏振器（WGP）包括位于透明基板（11）的表面上方的肋（13），肋之间的间隙（16）和基本上填充间隙的填充层（15）。 填充层具有相对较高的折射率，例如大于1.4。 在入射到WGP的光波长下，E11传输可能大于El。 传输。 E11是具有与肋的长度L平行的电场振荡的光的偏振光，El。 是具有与肋的长度L垂直的电场振荡的光的偏振光。 这种嵌入的反相WGP对于具有高WGP性能，难以用常规WGP（E1传输> E11传输）极化的电磁频谱的小波长（高能量）区域）的偏振特别有用。

公开(公告)号：WO2015060943A1

公开(公告)日：2015-04-30

申请号：PCT/US2014/053216

申请日：2014-08-28

Applicant: MOXTEK, INC.

Inventor： WANG, Bin ,  WANGENSTEEN, Ted ,  PETROVA, Rumyana ,  BLACK, Mike ,  MARKS, Steven ,  PROBST, Dean

IPC: G02B27/28

CPC classification number: G02B5/3058

Abstract: A wire grid polarizer (10, 20, 30, 90) comprising an array of parallel, elongated nano-structures (15) disposed over a surface of a substrate (11). Each of the nano-structures can include a pair of parallel, elongated wires (16), or top ribs (12), each oriented laterally with respect to one another. There can be a first gap (G 1 ) disposed between the pair of wires (or top ribs). Each of the nano-structures can be separated from an adjacent nano-structure by a second gap (G 2 ) disposed between adjacent nanostructures, and thus between adjacent pairs of wires. A first gap width (W 1 ) of the first gap can be different than a second gap width (W 2 ) of the second gap. Also included are methods of making wire grid polarizers.

Abstract translation: 一种线栅偏振器（10,20,30,90），包括设置在衬底（11）的表面上的平行的，细长的纳米结构（15）的阵列。 每个纳米结构可以包括一对平行的细长线（16）或顶部肋（12），每个横向相对于彼此定向。 可以在一对导线（或顶部肋）之间设置第一间隙（G1）。 每个纳米结构可以通过设置在相邻纳米结构之间的第二间隙（G2）和相邻的导线对之间与相邻的纳米结构分离。 第一间隙的第一间隙宽度（W1）可以不同于第二间隙的第二间隙宽度（W2）。 还包括制造线栅偏振器的方法。