公开(公告)号：WO2014102792A1

公开(公告)日：2014-07-03

申请号：PCT/IL2013/051075

申请日：2013-12-26

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： SHAFIR, Dror ,  BARAK, Gilad ,  WOLFING, Shay

IPC: G01B9/00 ,  G01B11/25 ,  G02B21/00 ,  G01N21/00 ,  G01J3/42 ,  G01J3/447 ,  G01J4/00 ,  G01J3/45

CPC classification number: G01B11/02 ,  G01B2210/56 ,  G01N21/4738 ,  G01N21/956 ,  G01N2201/06113 ,  G01N2201/12 ,  G02B21/365

Abstract: Method and system for measuring one or more parameters of a patterned structure, using light source producing an input beam of at least partially coherent light in spatial and temporal domains, a detection system comprising a position sensitive detector for receiving light and generating measured data indicative thereof, an optical system configured for focusing the input light beam onto a diffraction limited spot on a sample's surface, collecting an output light returned from the illuminated spot, and imaging the collected output light onto a light sensitive surface of the position sensitive detector, where an image being indicative of coherent summation of output light portions propagating from the structure in different directions.

Abstract translation: 用于测量图案化结构的一个或多个参数的方法和系统，其使用在空间和时间域中产生至少部分相干光的输入光束的光源，包括用于接收光并产生指示其的测量数据的位置敏感检测器的检测系统 ，配置成将输入光束聚焦到样品表面上的衍射限制光斑上的光学系统，收集从照明光点返回的输出光，并将收集的输出光成像到位置敏感检测器的光敏表面上，其中 图像表示从不同方向从结构传播的输出光部分的相干相加。