Abstract:
A system includes at least one piezoelectric transducer array having a plurality of piezoelectric transducer elements. The transducer array is configured to be placed on an area of skin. A phase control system is configured to generate a first electrical actuation signal for actuating the transducer elements to emit first ultrasonic signals, the first electrical actuation signal being phase shifted for each of the transducer elements. A multi-input multi-output (MIMO) control system is configured to generate a second electrical actuation signal for actuating the transducer elements to emit second ultrasonic signals, the second electrical actuation signal being different for each of the transducer elements. A switching device is configured to switchably connect the phase control system and the MIMO control system to the phased transducer array.
Abstract:
A system for detecting blood velocity within a blood vessel includes a piezoelectric transducer supported on a ceramic substrate. The ceramic substrate supports the piezoelectric transducer at a fixed angle of incidence that is greater than 0° and less than 90°. The ceramic substrate is formed of steatite ceramic and is configured to couple an ultrasonic signal emitted by the transducer to skin underlying the substrate.
Abstract:
A system for detecting artery location to measure blood velocity includes a first piezoelectric transducer array including a plurality of transducer elements, each of the transducer elements being supported on a first ceramic substrate, the first ceramic substrate having a planar lower surface configured to be placed on a surface of an area of skin of a user, the first ceramic substrate being configured to couple an ultrasonic signal emitted by the transducer elements to the skin. A phase control system is configured to supply each of the transducer elements with an electrical actuation signal, the electrical actuation signal being phase shifted for each of the transducer elements. The phase control system is configured to phase shift the electrical actuation signal supplied to the transducer elements such that an ultrasonic beam is formed and to steer the ultrasonic beam toward a blood vessel located beneath the area of skin.
Abstract:
A method of fabricating a MEMS device includes performing an atomic layer deposition (ALD) process to deposit a barrier layer such as Aluminum Oxide (AI2O3) having a thickness on a sacrificial layer deposited on a substrate. A portion of the barrier layer is removed to form an etched structure defined as a trench. An epi-polysilicon cap layer is epitaxially growth on the barrier layer and the entire etched structure. A portion of the epi-polysilicon cap layer has been removed to form a plurality of openings. The sacrificial layer is etched away leaving a cavity below the etched openings. A refill epi- polysilicon layer is epitaxially grown in the openings and seals the entire openings after a gap is formed between the cap layer and the substrate.
Abstract:
A system for detecting blood velocity within a blood vessel includes a transducer array including a plurality of transducers. Each of the transducers includes a carrier substrate; at least one spacer extending upwardly from substrate, a transducer element attached to spacer such that the piezoelectric transducer is spaced apart from the substrate, and setting electrodes positioned on the upper surface of the substrate under the piezoelectric transducer. A tilt control system is configured to apply a bias voltage to the setting electrodes which causes the transducer element to pivot about a pivot axis between a first tilted position and a second tilted position.
Abstract:
A micro gas chromatograph includes one or more separator columns formed within a device layer. The separator columns have small channel cross sections and long channel lengths with atomic-smooth channel sidewalls enabling a high channel packaging density, multiple channels positioned on top of each other, and channel segments that are thermally decoupled from the substrates. The micro gas-chromatograph also enables electrostatic and thermal actuators to be positioned in close proximity to the separator columns such that the material passing through the columns is one or more of locally heated, locally cooled, and electrically biased.
Abstract:
A method of fabricating a MEMS device includes an epi-polysilicon cap layer epitaxially growth on one of a substrate or a sacrificial layer deposited on the substrate. A portion of the epi-polysilicon cap layer has been removed to form a plurality of access openings. The sacrificial layer is etched away to form a cavity below the access openings. A barrier layer is deposited over the epi-polysilicon cap layer, inner walls of the cavity, and inner walls of the access openings using an atomic layer deposition (ALD) process. A refill epi-polysilicon layer is epitaxially grown in the access openings and seals the openings after the cavity is formed.