COMBINED MIMO ARRAY AND PHASED ARRAY FOR BLOOD VELOCITY DETECTION
    1.
    发明申请
    COMBINED MIMO ARRAY AND PHASED ARRAY FOR BLOOD VELOCITY DETECTION 审中-公开
    组合MIMO阵列和相控阵检测血流速度

    公开(公告)号:WO2018059956A1

    公开(公告)日:2018-04-05

    申请号:PCT/EP2017/073157

    申请日:2017-09-14

    Abstract: A system includes at least one piezoelectric transducer array having a plurality of piezoelectric transducer elements. The transducer array is configured to be placed on an area of skin. A phase control system is configured to generate a first electrical actuation signal for actuating the transducer elements to emit first ultrasonic signals, the first electrical actuation signal being phase shifted for each of the transducer elements. A multi-input multi-output (MIMO) control system is configured to generate a second electrical actuation signal for actuating the transducer elements to emit second ultrasonic signals, the second electrical actuation signal being different for each of the transducer elements. A switching device is configured to switchably connect the phase control system and the MIMO control system to the phased transducer array.

    Abstract translation: 系统包括具有多个压电换能器元件的至少一个压电换能器阵列。 换能器阵列被配置为放置在皮肤区域上。 相位控制系统被配置为生成用于致动换能器元件以发射第一超声信号的第一电致动信号,第一电致动信号针对每个换能器元件被相移。 多输入多输出(MIMO)控制系统被配置为产生用于致动换能器元件以发射第二超声信号的第二电致动信号,第二电致动信号对于换能器元件中的每一个而不同。 开关装置被配置为可切换地将相位控制系统和MIMO控制系统连接到相控换能器阵列。

    PHASED ARRAY FOR DETECTING ARTERY LOCATION TO MEASURE BLOOD VELOCITY
    3.
    发明申请
    PHASED ARRAY FOR DETECTING ARTERY LOCATION TO MEASURE BLOOD VELOCITY 审中-公开
    相控阵检测动脉位置以测量血流速度

    公开(公告)号:WO2018059947A1

    公开(公告)日:2018-04-05

    申请号:PCT/EP2017/073104

    申请日:2017-09-14

    Abstract: A system for detecting artery location to measure blood velocity includes a first piezoelectric transducer array including a plurality of transducer elements, each of the transducer elements being supported on a first ceramic substrate, the first ceramic substrate having a planar lower surface configured to be placed on a surface of an area of skin of a user, the first ceramic substrate being configured to couple an ultrasonic signal emitted by the transducer elements to the skin. A phase control system is configured to supply each of the transducer elements with an electrical actuation signal, the electrical actuation signal being phase shifted for each of the transducer elements. The phase control system is configured to phase shift the electrical actuation signal supplied to the transducer elements such that an ultrasonic beam is formed and to steer the ultrasonic beam toward a blood vessel located beneath the area of skin.

    Abstract translation: 用于检测动脉位置以测量血流速度的系统包括:第一压电换能器阵列,其包括多个换能器元件,每个换能器元件被支撑在第一陶瓷衬底上,第一陶瓷衬底具有 所述第一陶瓷基板被构造成放置在用户的皮肤区域的表面上,所述第一陶瓷基板被配置为将由所述换能器元件发射的超声波信号耦合到所述皮肤。 相位控制系统被配置为向每个换能器元件供应电致动信号,电致动信号针对每个换能器元件被相移。 相位控制系统被配置为对提供给换能器元件的电致动信号进行相移,以形成超声波束并且将超声波束引向位于皮肤区域下方的血管。

    SYSTEM AND METHOD FOR MAINTAINING A SMOOTHED SURFACE ON A MEMS DEVICE
    4.
    发明申请
    SYSTEM AND METHOD FOR MAINTAINING A SMOOTHED SURFACE ON A MEMS DEVICE 审中-公开
    用于维持MEMS器件上的光滑表面的系统和方法

    公开(公告)号:WO2017114881A1

    公开(公告)日:2017-07-06

    申请号:PCT/EP2016/082803

    申请日:2016-12-29

    CPC classification number: B81C1/00333 B81C2203/0136 B81C2203/0145

    Abstract: A method of fabricating a MEMS device includes performing an atomic layer deposition (ALD) process to deposit a barrier layer such as Aluminum Oxide (AI2O3) having a thickness on a sacrificial layer deposited on a substrate. A portion of the barrier layer is removed to form an etched structure defined as a trench. An epi-polysilicon cap layer is epitaxially growth on the barrier layer and the entire etched structure. A portion of the epi-polysilicon cap layer has been removed to form a plurality of openings. The sacrificial layer is etched away leaving a cavity below the etched openings. A refill epi- polysilicon layer is epitaxially grown in the openings and seals the entire openings after a gap is formed between the cap layer and the substrate.

    Abstract translation: 制造MEMS器件的方法包括执行原子层沉积(ALD)工艺以在沉积在衬底上的牺牲层上沉积具有厚度的阻挡层,例如氧化铝(Al 2 O 3)。 去除阻挡层的一部分以形成被定义为沟槽的蚀刻结构。 外延多晶硅帽层在阻挡层和整个蚀刻结构上外延生长。 外延多晶硅帽层的一部分已被去除以形成多个开口。 牺牲层被蚀刻掉,在蚀刻开口下方留下空腔。 再填充外延多晶硅层在开口中外延生长并且在覆盖层和衬底之间形成间隙之后密封整个开口。

    MICRO-MECHANICAL ADJUSTMENT SYSTEM FOR PIEZOELECTRIC TRANSDUCERS
    5.
    发明申请
    MICRO-MECHANICAL ADJUSTMENT SYSTEM FOR PIEZOELECTRIC TRANSDUCERS 审中-公开
    用于压电传感器的微机械调整系统

    公开(公告)号:WO2018059959A1

    公开(公告)日:2018-04-05

    申请号:PCT/EP2017/073175

    申请日:2017-09-14

    Abstract: A system for detecting blood velocity within a blood vessel includes a transducer array including a plurality of transducers. Each of the transducers includes a carrier substrate; at least one spacer extending upwardly from substrate, a transducer element attached to spacer such that the piezoelectric transducer is spaced apart from the substrate, and setting electrodes positioned on the upper surface of the substrate under the piezoelectric transducer. A tilt control system is configured to apply a bias voltage to the setting electrodes which causes the transducer element to pivot about a pivot axis between a first tilted position and a second tilted position.

    Abstract translation: 用于检测血管内血流速度的系统包括具有多个换能器的换能器阵列。 每个换能器包括载体衬底; 从衬底向上延伸的至少一个间隔件,附接到间隔件的换能器元件,使得压电换能器与衬底间隔开,并且设置位于压电换能器下方的衬底的上表面上的电极。 倾斜控制系统被配置成向设置电极施加偏置电压,这使得换能器元件围绕枢转轴线在第一倾斜位置和第二倾斜位置之间枢转。

    SYSTEM AND METHOD FOR MAINTAINING A SMOOTHED AND ANTI-STICTION SURFACE ON A MEMS DEVICE
    7.
    发明申请
    SYSTEM AND METHOD FOR MAINTAINING A SMOOTHED AND ANTI-STICTION SURFACE ON A MEMS DEVICE 审中-公开
    用于维持MEMS器件上的平滑表面和抗粘着表面的系统和方法

    公开(公告)号:WO2017114886A1

    公开(公告)日:2017-07-06

    申请号:PCT/EP2016/082813

    申请日:2016-12-29

    Abstract: A method of fabricating a MEMS device includes an epi-polysilicon cap layer epitaxially growth on one of a substrate or a sacrificial layer deposited on the substrate. A portion of the epi-polysilicon cap layer has been removed to form a plurality of access openings. The sacrificial layer is etched away to form a cavity below the access openings. A barrier layer is deposited over the epi-polysilicon cap layer, inner walls of the cavity, and inner walls of the access openings using an atomic layer deposition (ALD) process. A refill epi-polysilicon layer is epitaxially grown in the access openings and seals the openings after the cavity is formed.

    Abstract translation: 制造MEMS器件的方法包括外延生长在沉积在衬底上的衬底或牺牲层之一上的外延多晶硅帽层。 外延多晶硅盖层的一部分已被移除以形成多个进入开口。 牺牲层被蚀刻掉以在入口下方形成空腔。 使用原子层沉积(ALD)工艺将阻挡层沉积在外延多晶硅帽层,空腔的内壁和通路开口的内壁上。 再填充外延多晶硅层在通路开口中外延生长并且在空腔形成之后密封开口。

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