TERMINATION STRUCTURES WITH REDUCED DYNAMIC OUTPUT CAPACITANCE LOSS

    公开(公告)号:WO2022140756A1

    公开(公告)日:2022-06-30

    申请号:PCT/US2021/073024

    申请日:2021-12-20

    Abstract: In a general aspect, a semiconductor device (100, 400, 700, 900) can include a substrate (110, 410, 710, 910) of a first conductivity type, an active region (120, 420, 720, 920) disposed in the substrate, and a termination region (T) disposed in the substrate adjacent to the active region. The termination region can include a junction termination extension (130, 420, 730, 930) of a second conductivity type, where the second conductivity type is opposite the first conductivity type. The junction termination extension can have a first depletion stopper region (132, 432, 732, 932) disposed in an upper portion of the junction termination extension, a second depletion stopper region (134, 434, 734, 934) disposed in a lower portion of the junction termination extension, and a high carrier mobility region (136, 436, 736, 936) disposed between the first depletion stopper region and the second depletion stopper region.

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