FEEDBACK CORRECTION IN SUB-RESONANT TAPPING MODE OF AN ATOMIC FORCE MICROSCOPE

    公开(公告)号:WO2018140926A1

    公开(公告)日:2018-08-02

    申请号:PCT/US2018/015897

    申请日:2018-01-30

    CPC classification number: G01Q10/065 G01Q60/34

    Abstract: A method of carrying out sub-resonant tapping in an atomic force microscope includes causing a probe that is disposed above a sample to be translated in a direction parallel to a horizontal plane defined by the sample and to oscillate in a vertical direction that is perpendicular to the horizontal plane about an equilibrium line that is separated from the horizontal plane by a vertical offset. As a result, the probe repeatedly taps a surface of the sample. Each tap begins with a first contact of the probe on the surface followed by a progressive increase in force exerted by the sample on the probe until a peak force is attained. The vertical offset is controlled by relying at least in part on a feature other than the peak force as a basis for controlling the vertical offset.

    FEEDBACK CORRECTION IN SUB-RESONANT TAPPING MODE OF AN ATOMIC FORCE MICROSCOPE

    公开(公告)号:WO2018140926A9

    公开(公告)日:2018-08-02

    申请号:PCT/US2018/015897

    申请日:2018-01-30

    Abstract: A method of carrying out sub-resonant tapping in an atomic force microscope includes causing a probe that is disposed above a sample to be translated in a direction parallel to a horizontal plane defined by the sample and to oscillate in a vertical direction that is perpendicular to the horizontal plane about an equilibrium line that is separated from the horizontal plane by a vertical offset. As a result, the probe repeatedly taps a surface of the sample. Each tap begins with a first contact of the probe on the surface followed by a progressive increase in force exerted by the sample on the probe until a peak force is attained. The vertical offset is controlled by relying at least in part on a feature other than the peak force as a basis for controlling the vertical offset.

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