APPARATUS FOR ACQUIRING IMAGES OF ELEMENTS TO BE INSPECTED AND METHOD OF INSPECTIONS OF SUCH ELEMENTS
    1.
    发明申请
    APPARATUS FOR ACQUIRING IMAGES OF ELEMENTS TO BE INSPECTED AND METHOD OF INSPECTIONS OF SUCH ELEMENTS 审中-公开
    用于获取要检查的元素的图像的装置和这些元素的检查方法

    公开(公告)号:WO2015121803A1

    公开(公告)日:2015-08-20

    申请号:PCT/IB2015/051020

    申请日:2015-02-11

    Abstract: There is described an apparatus for obtaining images of an element (50) to be inspected, comprising first acquisition means (1 1 ) and second screening means (22) which can be activated according to a first activation mode, and deactivated according to a first deactivation mode; second acquisition means (21 ) and first screening means (12) which can be activated according to a second activation mode, and deactivated according to a second deactivation mode; the first acquisition means (1 1 ), the first screening means (12), the second acquisition means (21 ) and the second screening means (22) aligned along a common optical axis (100); wherein said first activation and deactivation mode and said second activation and deactivation mode occur in a predetermined sequence in order to obtain images of the first side (51 ) and of the second side (52) of the element (50), wherein said first screening means (12) and said second screening means (22) include an optical device (17), respectively, in turn containing a plate-like body (13) provided with colorless and light-diffusing impurities, said impurities adapted to modify the optical path of an input light beam which crosses said plate-like body (13), said plate-like body (13) also operatively coupled to at least one LED (120, 121, 122, 123).

    Abstract translation: 描述了一种用于获得要检查的元件(50)的图像的装置,包括可以根据第一激活模式被激活的第一获取装置(11)和第二屏蔽装置(22),并且根据第一 停用模式; 第二获取装置(21)和第一屏蔽装置(12),其可以根据第二激活模式被激活,并且根据第二去激活模式被去激活; 第一采集装置(11),第一屏蔽装置(12),第二采集装置(21)和第二屏蔽装置(22)沿共同的光轴(100)排列; 其中所述第一激活和去激活模式以及所述第二激活和去激活模式以预定顺序发生,以便获得元件(50)的第一侧(51)和第二侧(52)的图像,其中所述第一屏蔽 装置(12)和所述第二屏蔽装置(22)分别包括一个光学装置(17),它们又分别包含一个具有无色和光漫射杂质的板状体(13),所述杂质适于改变光路 穿过所述板状体(13)的输入光束,所述板状体(13)还可操作地耦合到至少一个LED(120,121,122,123)。

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