公开(公告)号：WO2017158345A1

公开(公告)日：2017-09-21

申请号：PCT/GB2017/050696

申请日：2017-03-14

Applicant: XAAR TECHNOLOGY LIMITED

Inventor： MARDILOVICH, Peter ,  KO, Song-Won ,  TROLIER-MCKINSTRY, Susan ,  BORMAN, Trent

IPC: H01L41/187 ,  H01L41/318 ,  H01L41/08

CPC classification number: H01L41/318 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1642 ,  B41J2002/14266 ,  B41J2202/03 ,  H01L41/0477 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/29

Abstract: A piezoelectric thin film element comprising a first electrode, a second electrode and one or more piezoelectric thin films there between wherein the first electrode is a platinum metal electrode having an average grain size greater than 50 nm and wherein a piezoelectric thin film adjacent the platinum metal electrode comprises a laminate having a plurality of piezoelectric thin film layers wherein a piezoelectric thin film layer contacting the platinum metal electrode comprises lead zirconate titanate (PZT) of composition at or about PbZr x Ti 1 - x O 3 where 0

Abstract translation: 一种压电薄膜元件，包括第一电极，第二电极和位于其间的一个或多个压电薄膜，其中第一电极是平均晶粒尺寸大于50nm的铂金属电极，并且其中 邻近铂金属电极的压电薄膜包括具有多个压电薄膜层的层压体，其中与铂金属电极接触的压电薄膜层包括在PbZr x或Pb zr或其附近的组成的锆钛酸铅（PZT） sub> 1 _{0 3 3其中0 < x≤0.60并且具有大于或等于90％的假立方{100}取向的程度。}

公开(公告)号：WO2017158344A1

公开(公告)日：2017-09-21

申请号：PCT/GB2017/050695

申请日：2017-03-14

Applicant: XAAR TECHNOLOGY LIMITED

Inventor： MARDILOVICH, Peter ,  KO, Song-Won ,  TROLIER-MCKINSTRY, Susan ,  BORMAN, Trent ,  ZHU, Wanlin

IPC: H01L41/187 ,  H01L41/318

Abstract: A method for the manufacture of a piezoelectric thin film element comprising a first electrode,a second electrode and one or more piezoelectric thin films there between which method comprises forming a piezoelectric thin film comprising PZT by a chemical solution deposition using three solutions wherein the forming of the PZT thin film comprises forming a bulk PZT thin film layer from the three solutions, wherein each solution has a Zr/Ti content which is different from that of any other solution and at least one solution has an excess lead content greater than that of any other solution, such that the bulk PZT thin film layer has a substantially uniform lead content and Zr/(Zr+Ti) ratio in its thickness direction.

Abstract translation: 一种用于制造压电薄膜元件的方法，所述压电薄膜元件包括第一电极，第二电极和一个或多个压电薄膜，在所述压电薄膜元件之间包括通过化学溶液形成包含PZT的压电薄膜 使用三种溶液进行沉积，其中形成PZT薄膜包括由三种溶液形成块体PZT薄膜层，其中每种溶液具有不同于任何其他溶液的Zr / Ti含量，并且至少一种溶液具有 过量的铅含量大于任何其它溶液的铅含量，使得体PZT薄膜层在其厚度方向上具有基本均匀的铅含量和Zr /（Zr + Ti）比率。