公开(公告)号：WO2017123407A1

公开(公告)日：2017-07-20

申请号：PCT/US2016/068577

申请日：2016-12-23

Applicant: ZIPTRONIX, INC.

Inventor： UZOH, Cyprian Emeka ,  ENQUIST, Paul M. ,  FOUNTAIN, Jr., Gaius Gillman

IPC: H01L21/683 ,  H01L21/687

CPC classification number: H01L25/50 ,  H01L21/6836 ,  H01L21/78 ,  H01L22/14 ,  H01L25/105 ,  H01L2221/68327

Abstract: Systems and methods for efficient transfer of elements are disclosed. A film which supports a plurality of diced integrated device dies can be provided. The plurality of diced integrated device dies can be disposed adjacent one another along a surface of the film. The film can be positioned adjacent the support structure such that the surface of the film faces a support surface of the support structure. The film can be selectively positioned laterally relative to the support structure such that a selected first die is aligned with a first location of the support structure. A force can be applied in a direction nonparallel to the surface of the film to cause the selected first die to be directly transferred from the film to the support structure.

Abstract translation: 公开了用于有效传递元素的系统和方法。 可以提供支撑多个切块集成装置模具的膜。 多个切割后的集成器件管芯可以沿着膜的表面彼此相邻布置。 可以将膜定位在支撑结构附近，使得膜的表面面对支撑结构的支撑表面。 该膜可以选择性地相对于支撑结构横向定位，使得选定的第一模具与支撑结构的第一位置对齐。 可以在不平行于膜表面的方向上施加力，以使所选择的第一模具直接从膜转移到支撑结构。