Abstract:
A filter apparatus and method having a test port member (220) in combination with a filter media (40). The test port member may be positioned adjacent the outer periphery of the outer peripheral frame (32) and may be attached to a truncated portion (44) of the filter media. One or more scrim layers (160) may be disposed across one or more sides of the test port member and/or the truncated portion of the filter media. A plug (150) may be inserted into a through port of the test port member.
Abstract:
The present invention relates to an air filter housing (1) for a clean room including means (4,5) for attachment of the filter housing to the ceiling of the clean room, said filter housing having a bottom wall (12) and a mouth and a flange (9) projecting out from the mouth of the filter housing perpendicular to the direction of an air flow through the filter housing, said means for attaching the filter housing to the ceiling including means (5) for adjusting the plane of the mouth of the filter housing in relation to the plane of the ceiling of the clean room. According to the invention the bottom wall (12) of the filter housing (1) has openings (13) for allowing access to said adjusting means (5) from the inside of the filter housing.
Abstract:
Systems and methods for achieving filtration are provided that utilize agglomerates or granules of nanoparticles. The agglomerates or granules of nanoparticles may be used as and/or incorporated into a HEPA filtration system to remove solid or liquid submicron-sized particles, e.g., MPPS, in an efficient and efficacious manner. The filtration systems and methods are provided that utilize agglomerates or granules in a size range of about 100- 500 microns. The agglomerates or granules of nanoparticles exhibit a hierarchical fractal structure. In the case of agglomerates of nanoparticles, porosities of 0.9 or greater are generally employed, and for granules of nanoparticles, porosities that are smaller than 0.9 may be employed. Filter media formed from the agglomerates or granules may be formed from materials such as carbon black and fumed silica, and may be employed in baffled or non-baffled filtration apparatus.
Abstract:
An airbone particle removal system includes a vacuum assembly to introduce a flow of air into a housing. A cyclone dust collector is positioned in the housing downstream of the vacuum assembly with respect to the flow of air through the housing. A plurality of filter bags is positioned in the housing downstream of the cyclone dust collector with respect to the flow of air through the housing. A plurality of high efficiency particulate air filters is positioned in the housing downstream of the filter bags with respect to the flow of air through the housing. In certain preferred embodiments, a liquid distribution system introduces a liquid agent into the system.
Abstract:
A filter module and method for facilitating rapid flow setting and/or cost-effective balancing of airflow through a plurality of filters is provided. In one embodiment, the filter module includes at least one port configured to provide a metric indicative of flow through the housing assembly. In various other embodiments, at least one port is utilized for sensing differential pressure across a flow restrictor, such as a damper assembly and/or a diffuser plate of the housing assembly, an orifice plate disposed in a collar or ductwork coupled to collar, and the like. In another aspect of the invention, a method for replacing an air filter is provided that includes the steps of replacing an air filter disposed in a filter housing assembly, and setting a damper position using a damper position indicator to return air flow through the filter to a predetermined rate.
Abstract:
Systems and methods for achieving filtration are provided that utilize agglomerates or granules of nanoparticles. The agglomerates or granules of nanoparticles may be used as and/or incorporated into a HEPA filtration system to remove solid or liquid submicron-sized particles, e.g., MPPS, in an efficient and efficacious manner. The filtration systems and methods are provided that utilize agglomerates or granules in a size range of about 100- 500 microns. The agglomerates or granules of nanoparticles exhibit a hierarchical fractal structure. In the case of agglomerates of nanoparticles, porosities of 0.9 or greater are generally employed, and for granules of nanoparticles, porosities that are smaller than 0.9 may be employed. Filter media formed from the agglomerates or granules may be formed from materials such as carbon black and fumed silica, and may be employed in baffled or non-baffled filtration apparatus.
Abstract:
A filter housing assembly (106) having a gas-tight seal and a method of replacing a filter are generally provided. In one embodiment, the filter housing assembly includes a housing (180) having an opening adapted to receive a filter (108) and an inlet. A seal member (302, 802) is coupled to the housing and is moveable between a first position and at least a second position, the second position sealing the inlet. The filter housing assembly may be configured to retain a roomside replaceable filter or have a filter permanently adhered within the opening.
Abstract:
A filter is made by the folding of a filter media to pleats after the application of strings of glue thereon and the glue serves as distance elements and fixing for the filter media. The glue contains an expandable filler, that when heated expands to a larger size that is then permanent. When the glue has set the filter is heated and the filler expands and expands the filter pleats.
Abstract:
A method and apparatus for preventing contamination of a substrate or a substrate surface, and particularly relates to prevention of contamination of raw materials, semi-finished products, base materials of products and substrate surface in the high-tech industry such as in the production of semiconductors and liquid crystals. A gas coming into contact with a base material or substrate is purified by dust removing means and adsorption and/or absorption means so that the concentration of fine particles in the gas is below class 1,000 and a non-methane hydrocarbon concentration is below 0.2 ppm. Thereafter, the base material or the substrate surface is exposed to this gas.