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    METHOD AND APPARATUS FOR PURIFICATION OF ARGON
    3.
    发明申请
    METHOD AND APPARATUS FOR PURIFICATION OF ARGON 审中-公开
    ARGON净化方法与装置

    公开(公告)号：WO99011437A1

    公开(公告)日：1999-03-11

    申请号：PCT/JP1998/003977

    申请日：1998-09-04

    IPC分类号： B01D53/04 ,  B01D53/047 ,  C01B23/00 ,  F25J3/02 ,  B25J3/02

    CPC分类号： F25J3/08 ,  B01D53/04 ,  B01D53/0462 ,  B01D53/047 ,  B01D53/261 ,  B01D2253/104 ,  B01D2253/108 ,  B01D2256/18 ,  B01D2257/504 ,  B01D2257/80 ,  B01D2259/40001 ,  B01D2259/40052 ,  B01D2259/40056 ,  C01B23/0094 ,  C01B2210/0004 ,  C01B2210/0006 ,  C01B2210/0014 ,  F25J3/0285 ,  F25J2200/02 ,  F25J2200/74 ,  F25J2205/40 ,  F25J2205/82 ,  F25J2210/04 ,  F25J2215/58 ,  F25J2245/58 ,  F25J2270/12 ,  F25J2290/42 ,  Y02C10/08 ,  Y02P20/152

    摘要： A method for the purification of argon through simple steps with low energy consumption. Oxygen is added to argon gas containing nitrogen, carbon monoxide, oxygen, and methane as impurities, and carbon monoxide is oxidized carbon dioxide in a carbon monoxide oxidation column (31) in the presence of a catalyst. Hydrogen is added to the argon gas, and oxygen is reacted with hydrogen in a deoxo column (33) in the presence of a catalyst to conduct conversion to water. The carbon dioxide and water are removed from the argon gas in a carbon removal/drying unit (50) using an adsorbent. The resultant argon gas is cooled in a main heat exchanger (60) or the like for liquefaction. The formed liquid is then introduced into a rectifying column (70), where rectification is conducted by using the reflux composed mainly of argon. Nitrogen-enriched argon gas is separated from a head (76) of the rectifying column, while methane-enriched liquid argon is separated from a bottom (77), and high-purity argon gas is recovered from a gas phase in a middle stage.

    摘要翻译： 一种通过简单的步骤纯化氩气的方法，能耗低。 将氧气加入到含有氮气，一氧化碳，氧气和甲烷的氩气中作为杂质，一氧化碳是在一氧化碳氧化塔（31）中在催化剂存在下被氧化的二氧化碳。 在氩气中加入氢气，在催化剂存在下，氧气与脱氧塔（33）中的氢气反应，导致水转化。 使用吸附剂在碳去除/干燥单元（50）中从氩气中除去二氧化碳和水。 所得氩气在主热交换器（60）等中冷却以进行液化。 然后将形成的液体引入精馏塔（70），其中通过使用主要由氩组成的回流来进行精馏。 从精馏塔的头部（76）分离出富氮氩气，同时从底部（77）分离出富甲液体的氩气，在中间阶段从气相回收高纯度的氩气。

    METHOD OF AND APPARATUS FOR MANUFACTURING VARIOUS KINDS OF GASES TO BE SUPPLIED TO SEMICONDUCTOR MANUFACTURING FACTORIES
    10.
    发明申请
    METHOD OF AND APPARATUS FOR MANUFACTURING VARIOUS KINDS OF GASES TO BE SUPPLIED TO SEMICONDUCTOR MANUFACTURING FACTORIES 审中-公开
    用于制造供应给半导体制造厂的各种气体的方法和装置

    公开(公告)号：WO1994024501A1

    公开(公告)日：1994-10-27

    申请号：PCT/JP1994000676

    申请日：1994-04-22

    申请人： NIPPON SANSO CORPORATION ,  HATA, Yuichi ,  SASAKI, Jun ,  KAWAMURA, Mamoru ,  NAKAMURA, Maki ,  TAKI, Kazuya ,  OKADA, Shuichi

    发明人： NIPPON SANSO CORPORATION

    IPC分类号： F25J03/04

    CPC分类号： F25J3/04163 ,  C01B13/0288 ,  C01B21/0494 ,  C01B2210/0004 ,  C01B2210/0006 ,  C01B2210/0009 ,  C01B2210/0014 ,  C01B2210/005 ,  C01B2210/0053 ,  C01B2210/007 ,  F25J3/04084 ,  F25J3/04157 ,  F25J3/04169 ,  F25J3/0426 ,  F25J3/04284 ,  F25J3/044 ,  F25J3/04478 ,  F25J3/04496 ,  F25J3/04533 ,  F25J3/04612 ,  F25J3/04781 ,  F25J3/04836 ,  F25J3/04969 ,  F25J2200/72 ,  F25J2205/82 ,  F25J2210/42 ,  F25J2215/40 ,  F25J2215/42 ,  F25J2215/44 ,  F25J2235/04 ,  F25J2250/20 ,  F25J2250/42 ,  F25J2270/90 ,  F25J2290/62 ,  Y02C10/08 ,  Y02P20/152

    摘要： A method of and an apparatus for manufacturing high-purity air and various kinds of gases obtained by using air as a raw material which are used for semiconductor manufacturing industries, which method and apparatus are capable of providing as products high-purity air, high-purity nitrogen and oxygen-enriched air at once. Raw air is compressed to 3-10 Kg/cm G and introduced into a catalyst tower (8), and the carbon monoxide, hydrocarbons and hydrogen in the raw air are converted into carbon dioxide and water. The catalyst-reacted temperature-increased air is cooled and then introduced into adsorption towers (12a, 12b) in which carbon dioxide, water and other impurities are adsorption-removed. A part of the refined air obtained is drawn out as high-purity product air, and the remaining part thereof is introduced into a primary heat exchanger (18) and cooled substantially to a liquefication temperature. The resultant air is introduced into a simple rectification tower (19) and subjected to liquefication rectification, and high-purity nitrogen is drawn out from the top portion of the tower (19) and extracted as a product through the primary heat exchanger (18). Meanwhile, oxygen-enriched liquefied air is drawn out from the bottom portion of the simple rectification tower (19), introduced into a condensation evaporator (24), gasified, drawn out therefrom, introduced into the primary heat exchanger (18), and subjected to a temperature increasing operation. After the temperature of the gas has reached to an intermediate level, the gas is drawn out and introduced into an expansion turbine (35), in which the gas is expanded and cooled to generate cold. After the cold has recovered, it is extracted as refined oxygen-enriched air.

    摘要翻译： 一种用于制造高纯度空气和通过使用用作半导体制造工业的空气作为原料而获得的各种气体的方法和装置，该方法和装置能够提供高纯度空气， 纯氮和富氧空气一次。 将原料空气压缩至3-10Kg / cm 2 G并引入催化塔（8）中，将原始空气中的一氧化碳，烃和氢气转化为二氧化碳和水。 将催化剂反应的温度升高的空气冷却，然后引入其中除去二氧化碳，水和其它杂质的吸附塔（12a，12b）中。 所获得的精制空气的一部分作为高纯度产品空气抽出，其余部分被引入主热交换器（18），并基本上冷却至液化温度。 将所得的空气引入简单的精馏塔（19）中并进行液化精馏，并从塔（19）的顶部抽出高纯氮并通过主热交换器（18）作为产物提取， 。 同时，将富氧液化空气从简单精馏塔（19）的底部抽出，引入冷凝蒸发器（24），气化，从其中抽出，引入主热交换器（18），并进行 到升温操作。 在气体的温度达到中间水平之后，将气体引出并引入膨胀涡轮机（35），在该膨胀涡轮机（35）中，气体膨胀并冷却以产生冷气。 冷回收后，将其作为精炼的富氧空气提取。