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公开(公告)号：WO2011111101A1
公开(公告)日：2011-09-15
申请号：PCT/JP2010/001715
申请日：2010-03-10
CPC classification number: G01B11/306 , G01B5/0009 , G01B7/345 , G05B19/19 , G05B2219/41007 , G05B2219/41264 , G05B2219/42336 , H01L21/67288
Abstract: 【課題】並列スライダ装置において、二つのスライダが相互に干渉することなくスムーズな動きをもって移動することを実現すること。 【解決手段】前側リニアサーボモータ（７２）のための前側サーボコントローラ（１１０）と後側リニアサーボモータ（８０）のための後側サーボコントローラ（１３０）とに互いに同一の位置指令を与える一方で、前側サーボコントローラ（１１０）と後側サーボコントローラ（１３０）とで制御ゲインを互いに相違させる。
Abstract translation: 公开了一种平行滑块装置的控制装置，控制方法和测量装置，其中在平行滑块装置中，两个滑块以平滑的运动移动而彼此不相互干扰。 用于后侧线性伺服电动机（72）的前侧伺服控制器（110）和用于后侧线性伺服电动机（80）的后侧伺服控制器（130）相互设置相同的位置指令，而 在前侧伺服控制器（110）和后侧伺服控制器（130）之间相互导致控制增益不同。
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公开(公告)号：WO1987005836A1
公开(公告)日：1987-10-08
申请号：PCT/GB1987000205
申请日：1987-03-25
Inventor： PROTOS PRECISION SYSTEMS LIMITED
IPC: B21B37/00
Abstract: A rotor module (2) for a shapemeter comprising a central arbor (7), at least one bearing (9) on the circumferential surface of the arbor (7), a ring (10) rotatable on the bearing (9), an outer cylinder (11) supported at three or more locations on the ring (10) to hold the cylinder (11) concentrically of the arbor (7) and means (16, 17) carried by the arbor to co-operate with the inner surface of the cylinder (11) to detect deflections thereof at positions in register with said means (16, 17) and between said locations in order to provide output signals representative of such deflections.
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公开(公告)号：WO2008063550A3
公开(公告)日：2008-07-31
申请号：PCT/US2007024045
申请日：2007-11-16
Applicant: CORNING INC , HOYSAN STEVEN F , STRINES BRIAN P
Inventor： HOYSAN STEVEN F , STRINES BRIAN P
Abstract: Systems, methods, apparatus and products relate to systematic calculation and execution of pin height adjustments within a bed of nails shape measurement gauge with respect to a measured subject, such as glass substrates, and in particular, to using a bed of nails gauge for measuring a gravity-free shape of a surface of an object, including glass substrates used to make liquid crystal display (LCD) glass sheets. One or more embodiments may include a plurality of pins operable to support the surface during measurement. Each pin comprises a load cell operable to transmit measurement signals, and a height adjuster operable to receive adjustment signals and execute pin height adjustments upon receiving adjustment signals. Execution of the pin height adjustments systematically positions the pins so that the surface exerts on each pin a measured force nearing a target force corresponding to the gravity-free shape.
Abstract translation: 系统，方法，装置和产品涉及相对于被测物体如玻璃基板的指甲形状测量计床的系统计算和执行针脚高度调节，并且特别地涉及使用钉子测量床测量 物体表面的无重力形状，包括用于制造液晶显示器（LCD）玻璃板的玻璃基板。 一个或多个实施例可以包括可操作以在测量期间支撑表面的多个销。 每个引脚包括可操作以传送测量信号的测力传感器和可接收调节信号并且在接收到调节信号时执行引脚高度调节的高度调节器。 销高度调整的执行系统地定位销，使得表面在每个销上施加接近与无重力形状对应的目标力的测量力。
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公开(公告)号：WO1996041999A1
公开(公告)日：1996-12-27
申请号：PCT/NL1996000240
申请日：1996-06-13
Applicant: TECHNISCHE UNIVERSITEIT DELFT , SPRONK, Josephus, Wilhelmus , BONSE, Marcus, Hans, Wilhelm
Inventor： TECHNISCHE UNIVERSITEIT DELFT
IPC: G01D05/241
CPC classification number: G01D5/2412 , G01B7/345 , G01D5/2417
Abstract: There is described a measuring system for detecting a positional variation of an object (V), comprising: a reference device (10) defining an X-direction; a first group (30) of at least three sensor members (31, 32, 33) for providing measuring signals indicative of a positional variation in a Z-direction relative to the reference device; a second group (40) of at least two sensor members (41, 42; 43, 44) for providing measuring signals indicative of a positional variation in a Y-direction relative to the reference device. The sensor members can be plane plate electrodes which, together with an electrically conductive surface of reference device, form a capacitive element whose capacity is influenced by distance and/or overlap of plate electrodes with reference member. The measuring system offers a possibility for improving reproducibility and accuracy, and is, as far as design is concerned, readily adaptable to an intended use.
Abstract translation: 描述了一种用于检测物体（V）的位置变化的测量系统，包括：限定X方向的参考装置（10）; 至少三个传感器构件（31,32,33）的第一组（30），用于提供指示相对于参考装置的Z方向的位置变化的测量信号; 用于提供指示相对于参考装置的Y方向的位置变化的测量信号的至少两个传感器构件（41,42; 43,44）的第二组（40）。 传感器构件可以是平板电极，其与参考装置的导电表面一起形成电容元件，其容量受到具有参考构件的板电极的距离和/或重叠的影响。 测量系统提供了提高再现性和精度的可能性，并且就设计而言，易于适应预期用途。
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公开(公告)号：WO1995004914A1
公开(公告)日：1995-02-16
申请号：PCT/US1994008801
申请日：1994-08-04
Applicant: DATA MEASUREMENT CORPORATION , PATEL, Bipin
Inventor： DATA MEASUREMENT CORPORATION
IPC: G01B05/06
Abstract: A method and system for measuring the profile of a strip of material (16) produced in a reversing mill (10) in which a direction of travel of the strip (16) is reversible includes a single thickness gauge (18) that measures the thickness of the strip (16) and generates the thickness signals, and a moving device (27) coupled to the gauge (18). The moving device (27) controllably moves the gauge (18) transversely to the strip so that the gauge (18) measures the thickness of the strip in one pass of the strip through the gauge. The moving device (27) maintains the gauge in a stationary position in another pass of the strip (16) through the gauge (18) such that the gauge measures the thickness of the strip (16) at different points along the longitudinal lines of the strip (16). The measurements of the thickness of the strip (16) at the different points are processed in a processing device (25) and interpreted into profile data.
Abstract translation: 一种用于测量在反向磨机（10）中产生的材料条（16）的轮廓的方法和系统，其中条带（16）的行进方向是可逆的，包括单个厚度计（18），其测量厚度 并且产生厚度信号，以及耦合到量规（18）的移动装置（27）。 移动装置（27）可控制地将量规（18）横向地移动到条带上，使得量规（18）在条带的一次通过量规时测量条带的厚度。 移动装置（27）将计量器保持在固定位置，在条带（16）的另一遍中通过量规（18），使得该计量器在沿着纵向线的不同点测量条带（16）的厚度 条（16）。 在不同点处的条带（16）的厚度的测量在处理设备（25）中被处理并被解释为简档数据。
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Patent Agency Ranking
公开(公告)号：WO1991002231A1
公开(公告)日：1991-02-21
申请号：PCT/JP1990000959
申请日：1990-07-27
Applicant: KABUSHIKI KAISHA KOBESEIKOSHO , UESUGI, Kenichi , SASAKI, Toshiyuki
Inventor： KABUSHIKI KAISHA KOBESEIKOSHO
IPC: G01L05/04
Abstract: This invention relates to a roll which detects a push force at each part of a roll material located in a widthwise direction and detects the shape of the roll material by executing calculation processing. In a shape detecting roll of the type wherein a plurality of discs (2) each incorporating a pressure sensor (1) in its outer peripheral portion are disposed continuously and concentrically in the axial direction and gaps (11) for preventing mutual interference between the outer peripheral portions of adjacent discs (2) are defined between the side surfaces of the outer peripheral portions of the adjacent discs (2), the side surface of each disc outer peripheral portion which defines the gap (11) is activated by reverse electrolysis and then a corrosion-resistant plating is applied thereto. The plating film adheres strongly to the disc surface and the side surface of the outer peripheral portion of the disc will not corrode and can secure high detection accuracy for an extended period of time.
Abstract translation: 本发明涉及一种辊，其检测位于宽度方向上的卷材的各部分处的推力，并且通过执行计算处理来检测卷材的形状。 在这种类型的形状检测辊中，其中在其外周部分中并入有压力传感器（1）的多个盘（2）在轴向连续地同心地设置，并且用于防止外部 相邻盘（2）的周边部分限定在相邻盘（2）的外周部分的侧表面之间，限定间隙（11）的每个盘外周部分的侧表面通过反向电解而被激活，然后 对其施加耐腐蚀电镀。 电镀膜牢固地附着到盘表面，并且盘的外周部分的侧表面不会腐蚀，并且可以在长时间内确保高检测精度。
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公开(公告)号：WO1989007748A1
公开(公告)日：1989-08-24
申请号：PCT/JP1989000156
申请日：1989-02-16
Applicant: BANDO CHEMICAL INDUSTRIES, LTD.
Inventor： BANDO CHEMICAL INDUSTRIES, LTD. , YAHATA, Toshiyuki
IPC: G01B07/34
CPC classification number: G01B7/345
Abstract: This invention relates to an apparatus for inspecting the quality of a ridge of an elastic body, such as a toner scraping blade of a copier and a wiper of a vehicle, in which the quality of the ridge of an edge part has a direct influence upon the function of the product. The inspection apparatus according to the present invention is provided with a table (1) on which an elastic body (B) to be inspected is fixed, a contact needle (4) supported via a piezo-electric acceleration detector (5) so that the contact needle (4) can contact a ridge (C) of an edge part of the elastic body (B), and a transfer unit (2) adapted to move the elastic body (B) together with the table (1) relative to the contact needle (4). The elastic body (B) is moved relative to the contact needle (4) brought into contact with the ridge (C) of the elastic body (B), so that the variation of the contact pressure of the contact needle (4) is converted into voltage signals through the detector (5). A converted voltage signal level is compared with a present reference voltage signal level, and is binary-coded depending upon whether the absolute value of the actual voltage signal level is larger than the reference voltage signal level. It can be decided on the basis of the binary-coded signals whether the ridge (C) of the edge part of the elastic body (B) has any defect.
Abstract translation: 本发明涉及一种用于检查弹性体的脊的质量的装置，例如，复印机的调色剂刮刀和车辆的刮水器，其中边缘部分的脊的质量对其直接影响 产品的功能。 根据本发明的检查装置具有固定有待检查的弹性体（B）的台（1），经由压电加速度检测器（5）支撑的接触针（4），使得 接触针（4）可以接触弹性体（B）的边缘部分的脊（C）和适于使弹性体（B）与台（1）相对于相对于弹性体（B）移动的转移单元（2） 接触针（4）。 弹性体（B）相对于与弹性体（B）的脊（C）接触的接触针（4）移动，从而转换接触针（4）的接触压力的变化 通过检测器（5）转换为电压信号。 将转换的电压信号电平与当前参考电压信号电平进行比较，并且根据实际电压信号电平的绝对值是否大于参考电压信号电平进行二进制编码。 可以基于二进制编码信号来确定弹性体（B）的边缘部分的脊（C）是否具有任何缺陷。
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公开(公告)号：WO98044549A1
公开(公告)日：1998-10-08
申请号：PCT/US1998/006531
申请日：1998-04-02
IPC: C30B33/00 , G01B7/34 , H01L21/302 , H01L21/3065 , H01L21/66 , G01B7/06
CPC classification number: C30B33/00 , C30B29/06 , G01B7/08 , G01B7/345 , H01L21/3065 , H01L22/12 , H01L22/20
Abstract: Process for the preparation of an epitaxial wafer having a total thickness variation and/or site total indicated reading of less than 1.0 mu m. The distance between the front and back surfaces of the epitaxial wafer at discrete positions on the front surface is measured to generate thickness profile data. Additional stock is removed from the front surface of the epitaxial wafer in a stock removal step to reduce the thickness of the epitaxial wafer to the target thickness, Tt, with the amount of stock being removed at each of said discrete positions being determined after taking into account the thickness profile data and Tt.
Abstract translation: 具有总厚度变化和/或部位总数的外延晶片的制备方法指示读数小于1.0μm。 测量在前表面上离散位置处的外延晶片的前表面和后表面之间的距离，以产生厚度分布数据。 在外推晶片的前表面从原料去除步骤中除去附加原料，以将外延晶片的厚度减小到目标厚度Tt，其中在每个所述离散位置上去除的原料量在进入 记录厚度剖面数据和Tt。
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9.发明申请A DEVICE AND METHOD FOR MEASUREMENTS ON A SURFACE OF A BAR OR OTHER OBJECT OF FERROMAGNETIC MATERIAL 审中-公开用于测量棒状物或其他物质的非线性材料的装置和方法
公开(公告)号：WO1995024610A1
公开(公告)日：1995-09-14
申请号：PCT/NL1995000092
申请日：1995-03-13
Applicant: QUALITECH B.V. , ENGELS, Mathijs, Maria, Johannes
Inventor： QUALITECH B.V.
IPC: G01B07/34
Abstract: The present invention provides an apparatus for measuring the straightness, the deviation from the straightness or bending of the surface of a ferromagnetic bar, such as a (part of a) railroad rail, comprising: a first end part, a second end part at a distance from the first end part, wherein the first and the second end parts are placed over the rail for measuring, a magnetic sensor that can be moved between the first and the second end part, and compensation means to compensate for remanent magnetic in the ferromagnetic material of the bar.
Abstract translation: 本发明提供了一种用于测量直线度，与铁磁棒的表面（例如铁路轨道的一部分）的平直度或弯曲的偏差的装置，包括：第一端部，第二端部 距离第一端部的距离，其中第一和第二端部被放置在用于测量的轨道上方，可以在第一和第二端部之间移动的磁性传感器以及用于补偿铁磁体中的剩余磁性的补偿装置 酒吧的材质。
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公开(公告)号：WO1994027114A1
公开(公告)日：1994-11-24
申请号：PCT/FR1994000546
申请日：1994-05-09
Applicant: EXA INGENIERIE , DELASTRE, Jean-Louis
Inventor： EXA INGENIERIE
IPC: G01B07/28
CPC classification number: G01B7/345
Abstract: Device for measuring the straightness of a conductive object (12), comprising a plurality of contactless distance sensors (22) aligned in the axis of a straight-edge (20) to be placed on the object. Means (24-1) are provided for transmitting the measurements supplied by each sensor.
Abstract translation: 用于测量导电物体（12）的平直度的装置，包括在直边缘（20）的轴线上排列以放置在物体上的多个非接触式距离传感器（22）。 提供装置（24-1）用于传送由每个传感器提供的测量值。
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