PROBE HEAD STRUCTURE FOR PROBE TEST CARDS
    1.
    发明申请
    PROBE HEAD STRUCTURE FOR PROBE TEST CARDS 审中-公开
    用于探针测试卡的探头头结构

    公开(公告)号:WO2010105131A1

    公开(公告)日:2010-09-16

    申请号:PCT/US2010/027098

    申请日:2010-03-12

    CPC classification number: G01R1/0675 G01R1/07357

    Abstract: A probe head assembly for testing a device under test includes a plurality of test probes and a probe head structure. The probe head structure includes a guide plate and a template and supports a plurality of test probes that each includes a tip portion with a tip end for making electrical contact with a device under test, a curved compliant body portion and a tail portion with a tail end for making electrical contact with the space transformer. Embodiments of the invention include offsetting the position of the tail portions of the test probes with respect to the tip portions of the test probes so that the tip portions of the test probes are biased within the apertures of the guide plate, using hard stop features to help maintain the position of the test probes with respect to the guide plate and probe ramp features to improve scrubbing behavior.

    Abstract translation: 用于测试待测器件的探头组件包括多个测试探头和探头头结构。 探针头结构包括引导板和模板,并且支撑多个测试探针,每个测试探针包括尖端部分,该尖端部分具有用于与被测器件电接触的尖端,弯曲的柔顺体部分和具有尾部的尾部 结束与空间变压器的电气接触。 本发明的实施例包括相对于测试探针的末端部分抵消测试探针的尾部的位置,使得测试探针的末端部分被偏压在导板的孔内,使用硬停止特征 有助于保持测试探针相对于导板和探针斜坡特征的位置,以改善擦洗行为。

    導電性接触子および導電性接触子の製造方法
    2.
    发明申请
    導電性接触子および導電性接触子の製造方法 审中-公开
    导电接触器和制造导电接触器的方法

    公开(公告)号:WO2007029791A1

    公开(公告)日:2007-03-15

    申请号:PCT/JP2006/317789

    申请日:2006-09-07

    Abstract:  外力が加わったときに撓む方向を容易に制御することができ、より高精度で信頼性の高い電気特性検査を実現することが可能な導電性接触子および導電性接触子の製造方法を提供する。この目的のため、複数の接続端子を備えた回路構造に対して、前記複数の接続端子のいずれかと物理的に接触することによって電気的な接続を確立する導電性接触子の本体部の長手方向に垂直な断面の形状が異方性を持たせる。この本体部の長手方向の中心付近を含む領域であって前記本体部の両端部を含まない領域の表面を被覆する絶縁層を形成してもよい。

    Abstract translation: 一种导电接点,通过在施加外力时容易地控制偏转方向和导电接触制造方法,以高精度和高可靠性实现电特性检查。 触点用于通过与电路结构的连接端子之一的物理接触来建立电连接。 垂直于导体接触体的纵向方向的横截面相对于电路结构具有各向异性的形状。 可以形成覆盖包括主体的纵向中心部分并且不包括主体的端部的区域的绝缘层。

    TESTING HEAD WITH VERTICAL PROBES, PARTICULARLY FOR HIGH FREQUENCY APPLICATIONS
    3.
    发明申请
    TESTING HEAD WITH VERTICAL PROBES, PARTICULARLY FOR HIGH FREQUENCY APPLICATIONS 审中-公开
    测试头与垂直探头,特别是高频应用

    公开(公告)号:WO2016146476A1

    公开(公告)日:2016-09-22

    申请号:PCT/EP2016/055141

    申请日:2016-03-10

    Abstract: It is described a testing head (20) with vertical contact probes for the functionality testing of a device under test (26), the testing head comprising a plurality of vertical contact probes (21), each vertical contact probe (21) having a rod-like body (22) having a preset length extending between a first and a second end (24, 25), the second end being a contact tip (25) adapted to abut onto a contact pad (26A) of the device under test (26), the body (22) of each of the vertical contact probes (21) having a length less than 5000 μπι, and comprises at least one opening (28) extending all over its length and defining a plurality of arms (22a, 22b, 22c), parallel to each other, separated by the at least one opening (28) and connected to the end portions (24, 25) of the vertical contact probe (21), the testing head (20) also comprising at least one auxiliary guide (30), arranged along the body (22) in parallel to a plane defined by the device under test (26) and provided with suitable guide holes (30A) and one vertical contact probe (21) sliding through each of them, the auxiliary guide (30) being adapted to define a gap (31 A) including one end of the at least one opening (28) being a critical portion (28A) of the body (22) of the vertical contact probe (21), namely a zone more prone to breakings in the body (22), the critical portion (28 A) undergoing low or even no bending stresses in the gap (31A) with respect to the rest of the body (22).

    Abstract translation: 描述了具有用于被测设备(26)的功能测试的垂直接触探针的测试头(20),测试头包括多个垂直接触探针(21),每个垂直接触探针(21)具有杆 (22),其具有在第一和第二端(24,25)之间延伸的预设长度,所述第二端是适于抵靠被测器件的接触焊盘(26A)的接触尖端(25) 每个垂直接触探针(21)的主体(22)具有小于5000μπI的长度,并且包括至少一个在其整个长度上延伸并限定多个臂(22a,22b)的开口(28) ,22c),彼此平行,由所述至少一个开口(28)隔开并连接到所述垂直接触探针(21)的端部部分(24,25),所述测试头(20)还包括至少一个 辅助引导件(30),其沿着主体(22)平行于由被测试设备(26)限定的平面布置并且具有合适的g 所述辅助引导件(30)适于限定包括所述至少一个开口(28)的一端的间隙(31A),所述间隙(30A)是关键的(30A)和一个垂直接触探针(21) 垂直接触探针(21)的主体(22)的部分(28A),即在主体(22)中更容易断裂的区域,临界部分(28A)在间隙中经历低甚至没有弯曲应力 (31A)相对于身体的其余部分(22)。

    PROBES WITH PROGRAMMABLE MOTION
    4.
    发明申请
    PROBES WITH PROGRAMMABLE MOTION 审中-公开
    探索可编程运动

    公开(公告)号:WO2013103681A1

    公开(公告)日:2013-07-11

    申请号:PCT/US2013/020093

    申请日:2013-01-03

    CPC classification number: G01R1/06705 G01R1/0675 G01R1/07314 G01R1/07357

    Abstract: The elongated body of an electrically conductive contact probe can be disposed in a guide hole and can include a patterned region for engaging and riding on a contact region of an inner sidewall of the guide hole as the elongated body moves in the guide hole in response to a force on a tip of the probe. As the patterned region rides the contact region, the tip moves in a lateral pattern that is a function of the surface(s) of the patterned region.

    Abstract translation: 导电接触探针的细长体可以设置在引导孔中,并且可以包括图案化区域,用于当细长体在引导孔中移动时接合和骑在引导孔的内侧壁的接触区域上,以响应于 探针尖端的力。 当图案区域绕着接触区域时,尖端以横向图案移动,该横向图案是图案化区域的表面的函数。

    MICRO PROBE ASSEMBLY
    5.
    发明申请
    MICRO PROBE ASSEMBLY 审中-公开
    微型探头组件

    公开(公告)号:WO2008121937A1

    公开(公告)日:2008-10-09

    申请号:PCT/US2008/058853

    申请日:2008-03-31

    Applicant: DSL Labs, Inc.

    CPC classification number: G01R1/07357 G01R1/06738 G01R1/0675

    Abstract: Embodiments of the present invention improve probes and probe assemblies. In one embodiment, the present invention includes a probe test head comprising a plurality of novel probes inserted in an array of holes in upper and lower dies of the assembly. The novel assembly includes a novel alignment layer for easy repair and maintenance of the probes.

    Abstract translation: 本发明的实施例改进了探针和探针组件。 在一个实施例中,本发明包括探针测试头,其包括插入组件的上模具和下模具中的孔阵列中的多个新型探针。 该新型组件包括用于容易地修复和维护探针的新型取向层。

    AN APPARATUS AND TEST DEVICE FOR THE APPLICATION AND MEASUREMENT OF PRESCRIBED, PREDICTED AND CONTROLLED CONTACT PRESSURE ON WIRES
    6.
    发明申请
    AN APPARATUS AND TEST DEVICE FOR THE APPLICATION AND MEASUREMENT OF PRESCRIBED, PREDICTED AND CONTROLLED CONTACT PRESSURE ON WIRES 审中-公开
    用于在线上应用和测量预定,预测和控制的接触压力的装置和测试装置

    公开(公告)号:WO2007022431A2

    公开(公告)日:2007-02-22

    申请号:PCT/US2006032378

    申请日:2006-08-17

    Inventor: SUHIR EPHRAIM

    Abstract: The mechanical behavior of wires subjected to axial loading and experiencing bending deformation is used to ensure effective control of the contact pressure in mechanical and/or heat removing devices, and similar structures and systems, An apparatus for taking advantage of the characteristics of wires in packaging of a device, such as a semiconductor device, is disclosed, as well as a test device for identifying the accurate contact pressure required in same. Methods for the prediction of such a behavior for pre-buckling, buckling, and post-buckling conditions in wires, carbon nanotubes (CNTs), and similar wire-grid-array (WGA) structures, for example are also disclosed.

    Abstract translation: 使用经受轴向载荷和经历弯曲变形的电线的机械性能来确保机械和/或除热装置以及类似结构和系统中接触压力的有效控制。一种利用包装中电线特性的装置 公开了诸如半导体器件的器件,以及用于识别其中所需的精确接触压力的测试装置。 还公开了用于预测电线,碳纳米管(CNT)和类似的线栅阵列(WGA)结构中的预屈曲,屈曲和后屈曲条件的这种行为的方法。

    MULTI-SIGNAL SINGLE BEAM PROBE
    7.
    发明申请
    MULTI-SIGNAL SINGLE BEAM PROBE 审中-公开
    多信号单波束探测

    公开(公告)号:WO2005072438A3

    公开(公告)日:2006-11-09

    申请号:PCT/US2005003095

    申请日:2005-01-27

    Inventor: CHOU ARLEN

    Abstract: Methods and systems are provided for forming multiple electrical connections using a single probe suitable for semiconductor wafer probing and the parametric measurement of micro-devices. A conventional single-beam physical wafer probe structure can support two closely spaced and electrically independent probe contacts (21, 40) if an insulating sheath (25) overlaid by a conducting outside coaxial sheath (40) is used to provide a second independent probe contact (27, 28).

    Abstract translation: 提供了用于使用适合于半导体晶片探测的单个探针和微器件的参数测量来形成多个电连接的方法和系统。 如果用导电的外部同轴鞘(40)覆盖的绝缘护套(25)用于提供第二独立的探针接触件,传统的单光束物理晶片探测器结构可以支撑两个紧密间隔且电独立的探针接触件(21,40) (27,28)。

    MULTI-SIGNAL SINGLE BEAM PROBE
    8.
    发明申请
    MULTI-SIGNAL SINGLE BEAM PROBE 审中-公开
    多信号单波束探测

    公开(公告)号:WO2005072438A2

    公开(公告)日:2005-08-11

    申请号:PCT/US2005/003095

    申请日:2005-01-27

    Inventor: CHOU, Arlen

    Abstract: Methods and systems are provided for forming multiple electrical connections using a single probe suitable for semiconductor wafer probing and the parametric measurement of micro-devices. A conventional single-beam physical wafer probe structure can support two closely spaced and electrically independent probe contacts if an insulating sheath overlaid by a conducting outside coaxial sheath is used to provide a second independent probe contact.

    Abstract translation: 提供了用于使用适合于半导体晶片探测的单个探针和微器件的参数测量来形成多个电连接的方法和系统。 如果使用由导电的外部同轴护套覆盖的绝缘护套来提供第二独立的探针接触,传统的单束物理晶片探针结构可以支撑两个紧密间隔且电独立的探针接触。

    MAKING AND USING CARBON NANOTUBE PROBES
    10.
    发明申请
    MAKING AND USING CARBON NANOTUBE PROBES 审中-公开
    制造和使用碳纳米管探针

    公开(公告)号:WO2008048938A3

    公开(公告)日:2008-09-12

    申请号:PCT/US2007081423

    申请日:2007-10-15

    Abstract: Columns comprising a plurality of vertically aligned carbon nanotubes can be configured as electromechanical contact structures or probes. The columns can be grown on a sacrificial substrate and transferred to a product substrate, or the columns can be grown on the product substrate. The columns can be treated to enhance mechanical properties such as stiffness, electrical properties such as electrical conductivity, and/or physical contact characteristics. The columns can be mechanically tuned to have predetermined spring properties. The columns can be used as electromechanical probes, for example, to contact and test electronic devices such as semiconductor dies, and the columns can make unique marks on terminals of the electronic devices.

    Abstract translation: 包括多个垂直排列的碳纳米管的柱可以被配置为机电接触结构或探针。 柱可以在牺牲衬底上生长并转移到产物基底,或者可以在产物基底上生长柱。 可以处理柱以增强诸如刚度,电性能如导电性和/或物理接触特性的机械性能。 柱可以被机械调节以具有预定的弹簧性质。 这些列可以用作机电探针,例如用于接触和测试诸如半导体管芯的电子器件,并且这些列可以在电子器件的端子上形成独特的标记。

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