Abstract:
A probe head assembly for testing a device under test includes a plurality of test probes and a probe head structure. The probe head structure includes a guide plate and a template and supports a plurality of test probes that each includes a tip portion with a tip end for making electrical contact with a device under test, a curved compliant body portion and a tail portion with a tail end for making electrical contact with the space transformer. Embodiments of the invention include offsetting the position of the tail portions of the test probes with respect to the tip portions of the test probes so that the tip portions of the test probes are biased within the apertures of the guide plate, using hard stop features to help maintain the position of the test probes with respect to the guide plate and probe ramp features to improve scrubbing behavior.
Abstract:
It is described a testing head (20) with vertical contact probes for the functionality testing of a device under test (26), the testing head comprising a plurality of vertical contact probes (21), each vertical contact probe (21) having a rod-like body (22) having a preset length extending between a first and a second end (24, 25), the second end being a contact tip (25) adapted to abut onto a contact pad (26A) of the device under test (26), the body (22) of each of the vertical contact probes (21) having a length less than 5000 μπι, and comprises at least one opening (28) extending all over its length and defining a plurality of arms (22a, 22b, 22c), parallel to each other, separated by the at least one opening (28) and connected to the end portions (24, 25) of the vertical contact probe (21), the testing head (20) also comprising at least one auxiliary guide (30), arranged along the body (22) in parallel to a plane defined by the device under test (26) and provided with suitable guide holes (30A) and one vertical contact probe (21) sliding through each of them, the auxiliary guide (30) being adapted to define a gap (31 A) including one end of the at least one opening (28) being a critical portion (28A) of the body (22) of the vertical contact probe (21), namely a zone more prone to breakings in the body (22), the critical portion (28 A) undergoing low or even no bending stresses in the gap (31A) with respect to the rest of the body (22).
Abstract:
The elongated body of an electrically conductive contact probe can be disposed in a guide hole and can include a patterned region for engaging and riding on a contact region of an inner sidewall of the guide hole as the elongated body moves in the guide hole in response to a force on a tip of the probe. As the patterned region rides the contact region, the tip moves in a lateral pattern that is a function of the surface(s) of the patterned region.
Abstract:
Embodiments of the present invention improve probes and probe assemblies. In one embodiment, the present invention includes a probe test head comprising a plurality of novel probes inserted in an array of holes in upper and lower dies of the assembly. The novel assembly includes a novel alignment layer for easy repair and maintenance of the probes.
Abstract:
The mechanical behavior of wires subjected to axial loading and experiencing bending deformation is used to ensure effective control of the contact pressure in mechanical and/or heat removing devices, and similar structures and systems, An apparatus for taking advantage of the characteristics of wires in packaging of a device, such as a semiconductor device, is disclosed, as well as a test device for identifying the accurate contact pressure required in same. Methods for the prediction of such a behavior for pre-buckling, buckling, and post-buckling conditions in wires, carbon nanotubes (CNTs), and similar wire-grid-array (WGA) structures, for example are also disclosed.
Abstract:
Methods and systems are provided for forming multiple electrical connections using a single probe suitable for semiconductor wafer probing and the parametric measurement of micro-devices. A conventional single-beam physical wafer probe structure can support two closely spaced and electrically independent probe contacts (21, 40) if an insulating sheath (25) overlaid by a conducting outside coaxial sheath (40) is used to provide a second independent probe contact (27, 28).
Abstract:
Methods and systems are provided for forming multiple electrical connections using a single probe suitable for semiconductor wafer probing and the parametric measurement of micro-devices. A conventional single-beam physical wafer probe structure can support two closely spaced and electrically independent probe contacts if an insulating sheath overlaid by a conducting outside coaxial sheath is used to provide a second independent probe contact.
Abstract:
Columns comprising a plurality of vertically aligned carbon nanotubes can be configured as electromechanical contact structures or probes. The columns can be grown on a sacrificial substrate and transferred to a product substrate, or the columns can be grown on the product substrate. The columns can be treated to enhance mechanical properties such as stiffness, electrical properties such as electrical conductivity, and/or physical contact characteristics. The columns can be mechanically tuned to have predetermined spring properties. The columns can be used as electromechanical probes, for example, to contact and test electronic devices such as semiconductor dies, and the columns can make unique marks on terminals of the electronic devices.