Abstract:
A microelectromechanical system (MEMS) switch with liquid dielectric and a method of fabrication thereof are provided. In the context of the MEMS switch, a MEMS switch is provided including a cantilevered source switch, a first actuation gate disposed parallel to the cantilevered source switch, a first drain disposed parallel to a movable end of the cantilevered source switch, and a liquid dielectric disposed within a housing of the microelectromechanical system switch.
Abstract:
An electrical contact (1) comprising a substrate (2) at least on one side provided with a noble metal contact layer (3). The contact layer (3) comprises a solid lubricant zone (4) close to an upper surface of the contact layer, with solid lubricant particles (5) embedded in the noble metal in the solid lubricant zone (4). A method of manufacturing such a contact comprising mechanically embedding solid lubricant particles into the contact layer (3), thereby forming a solid lubricant zone (4), or plating a solid lubricant zone (4).