公开(公告)号：WO1996005978A1

公开(公告)日：1996-02-29

申请号：PCT/GB1995001977

申请日：1995-08-18

Applicant: AUTOMOTIVE PRODUCTS PLC ,  HARRIES, David, Anthony

Inventor： AUTOMOTIVE PRODUCTS PLC

IPC: B60K41/28

CPC classification number: G05D16/2013 ,  B60W10/02 ,  B60W10/18 ,  B60W10/20 ,  B60W30/18 ,  B60W2510/0208 ,  B60W2510/0638 ,  B60W2520/10 ,  B62D5/07 ,  F16H61/0021 ,  G05D16/206 ,  G05D16/2066 ,  Y10T137/264 ,  Y10T137/2665 ,  Y10T137/2695 ,  Y10T137/2698 ,  Y10T137/7761 ,  Y10T137/7762

Abstract: A vehicle fluid pressure supply system in which a fluid pressure supply pump (10) is connected via solenoid-operated flow control valve (15) with a plurality of separate fluid pressure operated circuits (A, B, C) each operating separate functions of the vehicle. Detectors (25, 26, 27, 30 to 35) are provided for detecting the current operative state and the fluid pressure supply status of each circuit, and an electrical control unit (28) means which receives signals from the detectors operates the control valve to direct available pump flow to the appropriate circuit to maintain each circuit at least at a minimum pressure level required to operate the associated function.

Abstract translation: 一种车辆液压供给系统，其中流体压力供给泵（10）通过电磁操作流量控制阀（15）与多个单独的流体压力操作电路（A，B，C）相连， 车辆。 检测器（25,26,27,30〜35）用于检测每个电路的当前操作状态和流体压力供应状态，并且从控制器接收信号的电气控制单元（28）装置操作控制阀 直接可用的泵流到适当的电路，以将每个电路至少保持在操作相关功能所需的最小压力水平。

公开(公告)号：WO2007114900A2

公开(公告)日：2007-10-11

申请号：PCT/US2007008131

申请日：2007-04-03

Applicant: BOC GROUP INC ,  EDWARDS DAVID PAUL

Inventor： EDWARDS DAVID PAUL

IPC: A61M29/00 ,  A61B1/00 ,  A61B1/04 ,  A61M5/178

CPC classification number: B01F3/088 ,  B01F15/0408 ,  B01F2215/0036 ,  B01F2215/0096 ,  C23F1/00 ,  H01L21/30 ,  Y10T137/0324 ,  Y10T137/2698

Abstract: A method and apparatus for recycling a process fluid from a drain of a semiconductor process tool. The process fluid may be an acidic cobalt solution or an electroless cobalt solution used in a semiconductor process step to prevent electromigration in copper interconnects. The used process fluid is collected from the tool drain and recycled back to the tool inlet if a condition of the fluid is within a predetermined range. Otherwise, the used process fluid is drained from the system. The system may also operate in a bleed and feed mode where a portion of the used process fluid is periodically drained from the system.

Abstract translation: 一种从半导体加工工具的排水回收工艺流体的方法和设备。 工艺流体可以是在半导体工艺步骤中使用的酸性钴溶液或非电解钴溶液，以防止铜互连中的电迁移。 如果流体的条件在预定范围内，则使用的工艺流体从工具排出口收集并循环回工具入口。 否则，使用的过程流体从系统中排出。 系统还可以以排气和进料模式操作，其中一部分所用过程流体周期性地从系统排出。

公开(公告)号：WO2009139826A2

公开(公告)日：2009-11-19

申请号：PCT/US2009002671

申请日：2009-04-30

Applicant: FSI INT INC ,  CHRISTENSON KURT K

Inventor： CHRISTENSON KURT K

IPC: G05D7/06

CPC classification number: H01L21/67011 ,  H01L21/68 ,  Y10T137/0324 ,  Y10T137/2564 ,  Y10T137/265 ,  Y10T137/2698 ,  Y10T137/86389 ,  Y10T137/86397 ,  Y10T137/86493

Abstract: A system for processing one or more substrates according to the present invention includes a diversion valve that can deliver two or more process fluids to a dispensing device through a common line/pipe. The present invention also includes related methods.

Abstract translation: 根据本发明的用于处理一个或多个基板的系统包括分流阀，其可以通过公共管线/管将两个或更多个处理流体输送到分配装置。 本发明还包括相关方法。

公开(公告)号：WO1996018569A1

公开(公告)日：1996-06-20

申请号：PCT/US1995016237

申请日：1995-12-15

Applicant: THE COCA-COLA COMPANY

Inventor： THE COCA-COLA COMPANY ,  ZIESEL, Lawrence, B.

IPC: B67D01/00

CPC classification number: B67D1/12 ,  B67D1/0057 ,  Y10T137/2693 ,  Y10T137/2698

Abstract: A water boost for a postmix beverage dispensing system in which the water pump (18) for the carbonator (20) is used to also pump water into the water boost tank (24) by means of a three-way solenoid valve (22) and a control circuit.

Abstract translation: 用于后混合饮料分配系统的增压器，其中用于碳酸化器（20）的水泵（18）也用于通过三通电磁阀（22）将水泵送到增压罐（24）中，并且 一个控制电路。