一种Fe-Ni-P合金电镀液、Fe-Ni-P合金镀层的电沉积方法及合金镀层

    公开(公告)号:WO2022267384A1

    公开(公告)日:2022-12-29

    申请号:PCT/CN2021/137710

    申请日:2021-12-14

    摘要: 本申请公开了一种Fe-Ni-P合金电镀液、Fe-Ni-P合金镀层的电沉积方法及合金镀层,属于电子制造技术领域。该电镀液包括主盐、络合剂以及水,络合剂包括双络合剂,双络合剂包括柠檬酸和氨三乙酸,或柠檬酸和氨三乙酸盐,或柠檬酸盐和氨三乙酸,或柠檬酸盐和氨三乙酸盐;双络合剂中,氨三乙酸或氨三乙酸盐的浓度与柠檬酸或柠檬酸盐的浓度之比为0.5~5;其中,柠檬酸或柠檬酸盐的浓度为0.01~0.5mol/L,氨三乙酸或氨三乙酸盐的浓度为0.01~0.5mol/L。本申请通过在电镀液中加入柠檬酸(盐)和氨三乙酸(盐)作为双络合剂,能够增加镀液的电化学极化程度,使制备的Fe-Ni-P合金镀层的矫顽力较低,镀层表面光亮、组织细致,可应用于微电子领域以及半导体功能器件等领域。

    METHOD AND SYSTEM FOR DEPOSITING A ZINC-NICKEL ALLOY ON A SUBSTRATE

    公开(公告)号:WO2021123129A1

    公开(公告)日:2021-06-24

    申请号:PCT/EP2020/086976

    申请日:2020-12-18

    摘要: The present invention is directed to a method for depositing a zinc-nickel alloy on a substrate, the method comprising the steps: (a) providing the substrate, (b) providing an aqueous zinc-nickel deposition bath as a catholyte in a deposition compartment, wherein - the deposition compartment comprises at least one anode with an anolyte, and - the anolyte is separated from the catholyte by at least one membrane, and the catholyte comprises (i) nickel ions, (ii) at least one complexing agent for nickel ions, and (iii) zinc ions, (c) contacting the substrate with the catholyte in the deposition compartment such that the zinc-nickel alloy is electrolytically deposited onto the substrate and thereby obtaining a zinc-nickel coated substrate, wherein after step (c) the nickel ions in the catholyte have a lower concentration than before step (c), (d) rinsing the zinc-nickel coated substrate in a rinsing compartment comprising water, such that a rinsed zinc-nickel coated substrate and rinse water is obtained, wherein the rinse water comprises a portion of the at least one complexing agent for nickel ions and a portion of the nickel ions, characterized in that (i) at least a portion of the rinse water and/or at least a portion of the catholyte is treated in a first treatment compartment such that water is separated from the at least one complexing agent for nickel ions and the nickel ions, (ii) at least a portion of the at least one complexing agent separated from water is returned into the catholyte, and (iii) a nickel ion source is added to the catholyte, with the proviso that the nickel ion source does not comprise said at least one complexing agent for nickel ions or any other complexing agent for nickel ions.