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公开(公告)号:WO2023028889A1
公开(公告)日:2023-03-09
申请号:PCT/CN2021/115816
申请日:2021-08-31
Applicant: 长江存储科技有限责任公司
IPC: H01L27/11529 , H01L27/11573 , H01L27/11578 , H01L29/78
Abstract: 公开了一种半导体结构、制作方法、三维存储器,半导体结构的制作方法包括: 提供衬底; 进行离子掺杂; 分别形成至少一个第一凹槽和第二凹槽; 分别形成第一介质层和第二介质层,第一介质层的厚度大于第二介质层的厚度; 分别形成第一栅极和第二栅极,并在第一栅极和第二栅极的两侧分别形成源极和漏极。
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公开(公告)号:WO2023015464A1
公开(公告)日:2023-02-16
申请号:PCT/CN2021/111941
申请日:2021-08-11
Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
Inventor: CHEN, Liang , LIU, Wei
IPC: H01L27/11573
Abstract: In certain aspects, a semiconductor device includes a substrate, a first trench isolation in the substrate, a second trench isolation in the substrate and surrounding a portion of the substrate, and a first routing electrode layer extending through the first trench isolation. The portion of the substrate is an active region of a transistor.
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公开(公告)号:WO2023288211A1
公开(公告)日:2023-01-19
申请号:PCT/US2022/073627
申请日:2022-07-12
Applicant: MICRON TECHNOLOGY, INC.
Inventor: XU, Lifang , HILL, Richard J. , CHARY, Indra V. , HEINECK, Lars P.
IPC: H01L27/11526 , H01L27/11573 , H01L27/11548 , H01L27/11575
Abstract: Microelectronic devices include a tiered stack having vertically alternating insulative and conductive structures. A first series of stadiums is defined in the tiered stack within a first block of a dual-block structure. A second series of stadiums is defined in the tiered stack within a second block of the dual-block structure. The first and second series of stadiums are substantially symmetrically structured about a trench at a center of the dual-block structure. The trench extends a width of the first and second series of stadiums. The stadiums of the first and second series of stadiums have opposing staircase structures comprising steps at ends of the conductive structures of the tiered stack. Conductive source/drain contact structures are in the stack and extend substantially vertically from a source/drain region at a floor of the trench. Additional microelectronic devices are also disclosed, as are methods of fabrication and electronic systems.
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公开(公告)号:WO2023273302A1
公开(公告)日:2023-01-05
申请号:PCT/CN2022/071723
申请日:2022-01-13
Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
Inventor: LIU, Wei , CHEN, Liang , WANG, Yanhong , XIA, ZhiLiang , YANG, Yuancheng
IPC: H01L27/1157 , H01L27/11575 , H01L27/11578 , H01L25/0652 , H01L27/11529 , H01L27/11551 , H01L27/11573
Abstract: A three-dimensional 3D memory device includes a first semiconductor structure and a second semiconductor structure. The first semiconductor structure includes a first semiconductor layer and an array of NAND memory strings. The second semiconductor structure is under a second side of the first semiconductor layer. The second side of the first semiconductor layer is opposite to the first side of the first semiconductor layer. The second semiconductor structure includes a second semiconductor layer, a first peripheral circuit, and a second peripheral circuit. The first peripheral circuit includes a first transistor in contact with a first side of the second semiconductor layer. The second peripheral circuit includes a second transistor in contact with a second side of the second semiconductor layer. The second side of the second semiconductor layer is opposite to the first side of the second semiconductor layer.
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公开(公告)号:WO2023272625A1
公开(公告)日:2023-01-05
申请号:PCT/CN2021/103764
申请日:2021-06-30
Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
Inventor: CHEN, Liang , LIU, Wei , WANG, Yanhong , XIA, Zhiliang , ZHOU, Wenxi , ZHANG, Kun , YANG, Yuancheng , HUANG, Shi Qi
IPC: H01L27/1157 , H01L27/11573 , H01L27/11575
Abstract: A three-dimensional (3D) memory device includes a first semiconductor structure (102), a second semiconductor structure (104), a third semiconductor structure (106), a first bonding interface (103) between the first semiconductor structure (102) and the second semiconductor structure (104), and a second bonding interface (105) between the second semiconductor structure (104) and the third semiconductor structure (106). The first semiconductor structure (102) includes an array of NAND memory strings (208) and a first semiconductor layer (1002) in contact with sources of the array of NAND memory strings (208). The second semiconductor structure (104) includes a first peripheral circuit (1716, 1718) of the array of NAND memory strings (208) including a first transistor (1720, 1722), and a second semiconductor layer (1004) in contact with the first transistor (1720, 1722). A third semiconductor structure (106) includes a second peripheral circuit (1704, 1706) of the array of NAND memory strings (208) including a second transistor (1708, 1710), and a third semiconductor layer (1006) in contact with the second transistor (1708, 1710). The first peripheral circuit (1716, 1718) is between the first bonding interface (103) and the second semiconductor layer (1004). The third semiconductor layer (1006) is between the second peripheral circuit (1704, 1706) and the second bonding interface (105).
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公开(公告)号:WO2023272591A1
公开(公告)日:2023-01-05
申请号:PCT/CN2021/103603
申请日:2021-06-30
Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
Inventor: SHI, Yanwei , WANG, Yanhong , GAN, Cheng , CHEN, Liang , LIU, Wei , XIA, Zhiliang , ZHOU, Wenxi , ZHANG, Kun , YANG, Yuancheng
IPC: H01L27/11573 , H01L27/11529 , H01L27/11578
Abstract: In certain aspects, a memory device includes an array of memory cells and a plurality of peripheral circuits coupled to the array of memory cells. The peripheral circuits include a first peripheral circuit including a recess gate transistor. The peripheral circuits also include a second peripheral circuit including a flat gate transistor.
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公开(公告)号:WO2022231717A1
公开(公告)日:2022-11-03
申请号:PCT/US2022/020454
申请日:2022-03-15
Applicant: SANDISK TECHNOLOGIES LLC
Inventor: TOBIOKA, Akihiro , SHIMIZU, Satoshi , CUI, Zhixin
IPC: H01L27/1157 , H01L27/11573 , H01L27/11575 , H01L27/11582
Abstract: A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers, where the electrically conductive layers include word-line-level electrically conductive layers and drain-select-level electrically conductive layers located above the word-line-level electrically conductive layers, memory opening fill structures vertically extending through the alternating stack, and drain-select-level contact via structures. A first one of the drain-select level contact structures directly contacts at least a first two of the drain-select-level electrically conductive layers that are vertically spaced apart from each other. A second one of the drain-select level contact structures directly contacts at least a second two of the drain-select-level electrically conductive layers that are vertically spaced apart from each other and which are located below the at least the first two of the drain-select-level electrically conductive layers.
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公开(公告)号:WO2022212035A1
公开(公告)日:2022-10-06
申请号:PCT/US2022/020361
申请日:2022-03-15
Applicant: MICRON TECHNOLOGY, INC.
Inventor: GREENLEE, Jordan D. , KLEIN, Rita J. , MCTEER, Everett Allen , HOPKINS, John
IPC: H01L27/11568 , H01L27/11573 , H01L27/11575 , H01L27/11582 , H01L21/76805 , H01L21/76895 , H01L23/53257 , H01L23/535 , H01L27/11556
Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a first dielectric material; a second dielectric material separated from the first dielectric material; a memory cell string including a pillar extending through the first and second dielectric materials, the pillar including a portion between the first and second dielectric materials; and a tungsten material located between the first and second dielectric materials and separated from the portion of the pillar and the first and second dielectric materials by an additional dielectric material. The additional dielectric material has a dielectric constant greater than a dielectric constant of silicon dioxide. The additional dielectric material contacts the portion of the pillar and the tungsten material.
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公开(公告)号:WO2022168158A1
公开(公告)日:2022-08-11
申请号:PCT/JP2021/003725
申请日:2021-02-02
Applicant: ユニサンティス エレクトロニクス シンガポール プライベート リミテッド , 作井 康司 , 原田 望
Inventor: 作井 康司 SAKUI Koji , 原田 望 HARADA Nozomu
IPC: G11C16/04 , G11C11/401 , H01L21/8242 , H01L27/10 , H01L27/108 , H01L27/11573
Abstract: プレート線PLと、ワード線WL0~WL2と、ソース線SLと、ビット線BL0~BL3と、に印加する電圧を制御して、チャネル半導体層の内部に、インパクトイオン化現象、またはゲート誘起ドレインリーク電流により形成した正孔群を保持するデータ書込み動作と、前記プレート線PLと、前記ワード線WL0~WL2と、前記ソース線SLと、前記ビット線BL0~BL3と、に印加する電圧を制御して、前記正孔群を前記チャネル半導体層の内部から除去するデータ消去動作と、を行う、メモリセルが複数個行列状に配列するブロックがあり、前記ブロック内の選択する第1のワード線が接続する前記メモリセルの記憶データを前記ビット線BL0~BL3に読み出す際に、前記第1のワード線を第1の電圧に、前記第1のワード線に隣接する第2のワード線を第2の電圧に印加する、半導体素子を用いたメモリ装置である。
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公开(公告)号:WO2022120631A1
公开(公告)日:2022-06-16
申请号:PCT/CN2020/134864
申请日:2020-12-09
Inventor: WANG, Yongqing , HU, Siping
IPC: H01L27/1157 , H01L27/11573
Abstract: Three-dimensional (3D) NAND memory devices and methods are provided. In one aspect, a fabrication method includes providing a substrate, forming memory cells over the substrate, depositing a first dielectric layer to cover the memory cells, forming at least one contact pad over the substrate, depositing a second dielectric layer over the at least one contact pad, forming first connecting pads over the second dielectric layer, bonding the first connecting pads with second connecting pads of a peripheral structure, and exposing the at least one contact pad from a back side of the substrate.
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