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    ELECTRON EXIT WINDOW FOIL FOR ELECTRON BEAM EMITTER
    1.
    发明申请
    ELECTRON EXIT WINDOW FOIL FOR ELECTRON BEAM EMITTER 审中-公开

    公开(公告)号：WO2022084123A1

    公开(公告)日：2022-04-28

    申请号：PCT/EP2021/078346

    申请日：2021-10-13

    Applicant: TETRA LAVAL HOLDINGS & FINANCE S.A.

    Inventor： OMRANE, Alaa

    IPC: H01J33/04 ,  H01J5/18 ,  B05D3/06 ,  B65B55/08

    Abstract: An electron exit window foil (106) for an electron beam emitter (100) having an electron beam generator (103) and operating in a corrosive environment (P1). The electron exit window foil (106) has a sandwich structure with an outer side arranged to face the corrosive environment (P1) and an inner side arranged to face the electron beam generator (103). The sandwich structure comprises, as seen from the outer side to the inner side, a protective layer, for protecting the sandwich structure from the corrosive environment (P1), a supporting layer made of Ti, for providing structural support for the sandwich structure, and a thermally conductive layer made of Al, for conveying heat from the sandwich structure.

    METHOD OF MANUFACTURING A WINDOW TRANSPARENT FOR ELECTRONS OF AN ELECTRON BEAM, IN PARTICULAR OF AN X-RAY SOURCE
    3.
    发明申请
    METHOD OF MANUFACTURING A WINDOW TRANSPARENT FOR ELECTRONS OF AN ELECTRON BEAM, IN PARTICULAR OF AN X-RAY SOURCE 审中-公开
    制造电子束电子窗口透明度的方法，特别是X射线源

    公开(公告)号：WO2005034167A3

    公开(公告)日：2006-02-23

    申请号：PCT/IB2004051996

    申请日：2004-10-06

    Applicant: KONINKL PHILIPS ELECTRONICS NV ,  PHILIPS INTELLECTUAL PROPERTY ,  FLISIKOWSKI PETER ,  MEYS JOACHIM ,  LESMEISTER WERNER ,  DAVID BERND R ,  BACHMANN PETER K

    Inventor： FLISIKOWSKI PETER ,  MEYS JOACHIM ,  LESMEISTER WERNER ,  DAVID BERND R ,  BACHMANN PETER K

    IPC: G11B20/12 ,  G11B20/18 ,  H01J5/18 ,  H01J9/00 ,  H01J9/24 ,  H01J33/04

    CPC classification number: H01J33/04 ,  G11B20/1883 ,  G11B2020/10944 ,  G11B2020/1288 ,  G11B2020/1896 ,  G11B2220/20 ,  G11B2220/2541 ,  H01J5/18 ,  H01J9/24 ,  H01J2235/082 ,  H01J2235/18

    Abstract: The present invention relates to a method of manufacturing a window transparent for electrons of an electron beam (E), in particular of an X-ray source. In order to enable a less costly and elaborate manufacture of such a window and in order to prevent unwanted sharp edges in a window area which may damage the window foil (2), a method is proposed comprising the steps of: -providing on a surface (11) of a carrier element (1) to which a window foil (2) shall be a fixed a receiving area (13, 16) for receiving a soldering material (3) used for fixing said window foil (2) to said carrier element (1), said carrier element (1) comprising a through hole (12) for the transmission of said electrons (E), -covering said surface (11) having said receiving area (13, 16) with a soldering material (3) such that substantially only said receiving area (13, 16) is filled with soldering material (3), -placing said window foil (2) on top of said surface (1) and -heating said soldering material (3) for fixing said window foil (2) to said surface (11).

    Abstract translation: 本发明涉及一种制造电子束（E），特别是X射线源的电子透明窗口的方法。 为了能够实现这种窗口的成本更低且更精细的制造，并且为了防止可能损坏窗帘（2）的窗口区域中的不希望的尖锐边缘，提出了一种方法，包括以下步骤：提供在表面上 （2）的固定接收区域（13,16），用于接收用于将所述窗户箔（2）固定到所述载体上的焊接材料（3）的载体元件（1） 元件（1），所述载体元件（1）包括用于传输所述电子（E）的通孔（12），用焊接材料（3）覆盖具有所述接收区域（13,16）的所述表面（11） ），使得基本上只有所述接收区域（13,16）填充有焊接材料（3），将所述窗口箔（2）放置在所述表面（1）的顶部上，并且加热所述焊接材料（3）以固定所述 （2）到所述表面（11）。

    ELECTRON BEAM DEVICE WITH SINGLE CRYSTAL WINDOW AND MATCHING ANODE
    5.
    发明申请
    ELECTRON BEAM DEVICE WITH SINGLE CRYSTAL WINDOW AND MATCHING ANODE 审中-公开
    具有单晶窗和匹配阳极的电子束装置

    公开(公告)号：WO1996021238A1

    公开(公告)日：1996-07-11

    申请号：PCT/US1996000272

    申请日：1996-01-03

    Applicant: AMERICAN INTERNATIONAL TECHNOLOGIES, INC.

    Inventor： AMERICAN INTERNATIONAL TECHNOLOGIES, INC. ,  WAKALOPULOS, George

    IPC: H01J33/04

    CPC classification number: B29C71/04 ,  B29C2035/0877 ,  B29L2007/008 ,  B29L2031/3462 ,  H01J5/18 ,  H01J33/00 ,  H01J33/04 ,  H01J37/06 ,  H01J2237/164

    Abstract: A vacuum tube electron beam device (15) includes a thin single crystal, electron permeable, gas impermeable membrane (20) for electron transmission. The single crystal membrane may include a small thickness due to high strength, and is highly transmissive to free the electrons due to the small thickness. The ordered crystalline structure of such membrane provides minimal obstructions to electron beams, and yet is highly impermeable to penetration by gas and liquid molecules. A doped silicon anode (19) can provide support for the membrane with matching thermal expansion characteristics, and a crystalline anode can be integral with the membrane. A double membrane embodiment confines the cooling fluid so that it passes close to both membranes.

    Abstract translation: 真空管电子束装置（15）包括用于电子传输的薄单晶，电子可透过的不透气膜（20）。 由于高强度，单晶膜可能包括小的厚度，并且由于厚度小而使电子释放具有高度的透射性。 这种膜的有序晶体结构为电子束提供了最小的障碍，并且对于气体和液体分子的渗透是高度不可渗透的。 掺杂硅阳极（19）可以为具有匹配的热膨胀特性的膜提供支撑，并且结晶阳极可以与膜成一体。 双层膜实施例限制了冷却流体，使得其接近两个膜。

    EMITTER EXIT WINDOW
    8.
    发明申请
    EMITTER EXIT WINDOW 审中-公开
    发动机出口窗口

    公开(公告)号：WO2011011278A1

    公开(公告)日：2011-01-27

    申请号：PCT/US2010/042260

    申请日：2010-07-16

    Applicant: ADVANCED ELECTRON BEAMS, INC. ,  WALTHER, Steven, R. ,  FRIEDMAN, Gerald, M. ,  BUFANO, Michael, L.

    Inventor： WALTHER, Steven, R. ,  FRIEDMAN, Gerald, M. ,  BUFANO, Michael, L.

    IPC: G21K5/00 ,  H01J5/18 ,  H01J33/04 ,  H01J37/301

    CPC classification number: G21K5/00 ,  H01J5/18 ,  H01J33/04 ,  H01J2237/164 ,  Y10T156/10

    Abstract: An exit window (15) can include an exit window foil (12), and a support grid (13) contacting and supporting the exit window foil. The support grid can have first and second grids (16, 18), each having respective first and second grid portions (16c, 18c) that are positioned in an alignment and thermally isolated from each other, The first and second grid portions can each have a series of apertures (16a, 18a) that are aligned for allowing the passage of a beam (14) therethrough to reach and pass through the exit window foil (12). The second grid portion (18c) can contact the exit window foil. The first grid portion (16c) can mask the second grid portion (18c) and the exit window foil (12) from heat caused by the beam striking the first grid portion (16e).

    Abstract translation: 出口窗口（15）可以包括出口窗口薄片（12）和与出口窗口箔片接触和支撑的支撑格栅（13）。 支撑格栅可以具有第一和第二格栅（16,18），每个格栅具有彼此对准且热隔离的相应的第一和第二格栅部分（16c，18c）。第一格栅部分和第二格栅部分可以各自具有 对准的一系列孔口（16a，18a），用于允许梁（14）通过其穿过并穿过出口窗口薄片（12）。 第二格栅部分（18c）可以与出口窗口箔接触。 第一格栅部分（16c）可以遮挡第二格栅部分（18c）和出射窗口箔片（12）免受由光束撞击到第一格栅部分（16e）所引起的热。

    LOW STRESS, ULTRA-THIN, UNIFORM MEMBRANE, METHODS OF FABRICATING SAME AND INCORPORATION INTO DETECTION DEVICES
    10.
    发明申请
    LOW STRESS, ULTRA-THIN, UNIFORM MEMBRANE, METHODS OF FABRICATING SAME AND INCORPORATION INTO DETECTION DEVICES 审中-公开
    低应力，超薄，均匀膜，制造方法和纳入检测设备

    公开(公告)号：WO2007008216A8

    公开(公告)日：2007-03-22

    申请号：PCT/US2005026795

    申请日：2005-07-29

    Applicant: CALIFORNIA INST OF TECHN ,  GRUNTHANER FRANK J ,  WHITE VICTOR E

    Inventor： GRUNTHANER FRANK J ,  WHITE VICTOR E

    IPC: H01J5/18 ,  H01J33/04 ,  H01J35/18 ,  H01J47/00

    CPC classification number: B01D67/0062 ,  B01D69/122

    Abstract: The present disclosure is directed, in part, to a method for fabricating a low-stress, ultra-thin membrane as well as the low-stress, ultra-thin membrane formed by this method. The method includes: layering a first layer on a semiconductor substrate; etching a hole in the first layer; layering a second layer on the membrane of the first layer and over the hole; and etching the substrate beginning from the bottom surface thereof, such that at least a portion of the substrate aligned with the hole in the first layer is removed. The first and second layers are made of substantially the same material, which will usually be silicon nitride, however, it is contemplated that other dielectric materials could be used, but it is preferred that the second layer has an amorphous structure. It is preferred that the second layer be formed with a slightly bubble-shape to help deflect stresses on the second layer. Generally, low pressure chemical vapor deposition will be used to create at least the first and second layers. As a result of this basic method, the second layer has an ultra-thin thickness. Among other devices, the ultra-thin membrane is useful in a device for detecting physical characteristics of a sample bombarded with electrons. In such a device, the ultra-thin, low-stress membrane is positioned adjacent a electron detector. The device may further include an evacuated chamber at least partially bounded by the ultra-thin low-stress membrane.

    Abstract translation: 本公开部分地涉及制造低应力超薄膜的方法以及通过该方法形成的低应力超薄膜。 该方法包括：在半导体衬底上分层第一层; 在第一层中蚀刻一个孔; 在第一层的膜上并在孔上层积第二层; 以及从其底部表面开始蚀刻衬底，使得去除与第一层中的孔对准的衬底的至少一部分。 第一层和第二层由基本上相同的材料制成，其通常是氮化硅，然而，可以设想可以使用其他电介质材料，但优选的是第二层具有非晶结构。 优选的是，第二层形成为略微气泡形状以帮助偏转第二层上的应力。 通常，将使用低压化学气相沉积来产生至少第一和第二层。 作为这种基本方法的结果，第二层具有超薄的厚度。 在其他装置中，超薄膜在​​用于检测被电子轰击的样品的物理特性的装置中是有用的。 在这样的装置中，超薄的低应力膜位于电子检测器附近。 该装置可以进一步包括至少部分地由超薄低应力膜限制的真空室。

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