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发明公开
CN104701200A 一种在线实时检测外延片温度的装置 有权

一种在线实时检测外延片温度的装置
摘要：
本发明公开了一种在线实时检测外延片温度的装置，属于半导体检测技术领域。该装置包括黑体辐射值运算模块和温度运算模块，该装置通过引入镀膜窗口的反射率衰减因子和热辐射衰减因子，可以准确测量得到外延片的温度T。该装置能够消除反应腔窗口镀膜对在线实时温度检测值造成的影响、提高在线实时温度检测值准确度。
摘要（英）：

The invention discloses a device for detecting epitaxial wafer temperatures online in real time, and belongs to the technical field of semiconductor detection. The device comprises a black-body radiation value operation module and a temperature operation module, and can measure the temperatures T of epitaxial wafers accurately through introduction of reflectivity attenuation factors and thermal radiation attenuation factors of coated windows. By the device, influences of reaction chamber window coating on online real-time temperature detection values can be eliminated, and accuracy of the online real-time temperature detection values can be improved.

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