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发明公开
CN110808201A 具有嵌入式加热器的面板 审中-公开

具有嵌入式加热器的面板
摘要：
公开了一种用于处理腔室的面板。所述面板具有主体，所述主体具有多个孔隙，所述多个孔隙穿过所述主体形成。挠曲件形成在所述主体中，部分地包围所述多个孔隙。切口在与所述挠曲件的公共半径上穿过所述主体形成。一个或多个孔口从所述切口的径向内表面延伸到所述主体的外表面。加热器设置在所述挠曲件与所述多个孔隙之间。所述挠曲件和所述切口是限制来自所述加热器的热传递从其经过的热扼流器。
摘要（英）：

A faceplate for a processing chamber is disclosed. The faceplate has a body with a plurality of apertures formed therethrough. A flexure is formed in the body partially circumscribing the plurality ofapertures. A cutout is formed through the body on a common radius with the flexure. One or more bores extend from a radially inner surface of the cutout to an outer surface of the body. A heater is disposed between flexure and the plurality of apertures. The flexure and the cutout are thermal chokes which limit heat transfer thereacross from the heater.

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