发明公开
- 专利标题: Polymerizable photoacid generators
- 专利标题(中): 聚合光酸产生
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申请号: EP11195707.2申请日: 2011-12-23
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公开(公告)号: EP2472323A3公开(公告)日: 2013-01-16
- 发明人: Thackeray, James W. , Coley, Suzanne M. , Jain, Vipul , Ongayi, Owendi , Cameron, James F. , Labeaume, Paul J. , Madkour, Ahmad E.
- 申请人: Rohm and Haas Electronic Materials LLC , Dow Global Technologies LLC
- 申请人地址: 455 Forest Street Marlborough, MA 01752 US
- 专利权人: Rohm and Haas Electronic Materials LLC,Dow Global Technologies LLC
- 当前专利权人: Rohm and Haas Electronic Materials LLC,Dow Global Technologies LLC
- 当前专利权人地址: 455 Forest Street Marlborough, MA 01752 US
- 代理机构: Buckley, Guy Julian
- 优先权: US201061429009P 20101231
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/039 ; C07C309/06 ; C07C309/12 ; C07C309/17 ; C08F220/18 ; C08F220/24 ; C07C381/12 ; C07C309/42
摘要:
A compound has formula (I):
Q-O-(A)-Z - G + (I)
wherein Q is a halogenated or non-halogenated, C 2-30 olefin-containing group, A is a fluorine-substituted C 1-30 alkylene group, a fluorine-substituted C 3-30 cycloalkylene group, a fluorine-substituted C 6-30 arylene group, or a fluorine-substituted C 7-30 alkylene-arylene group, Z is an anionic group comprising sulfonate, sulfonamide, or sulfonamide, and G + has formula (II):
wherein X is S or I, each R 0 is halogenated or non-halogenated and is independently C 1-30 alkyl group; a polycyclic or monocyclic C 3-30 cycloalkyl group; a polycyclic or monocyclic C 4-30 aryl group; or a combination of these, wherein when X is S, one of the R 0 groups is optionally attached to one adjacent R 0 group by a single bond, and a is 2 or 3, wherein when X is I, a is 2, or when X is S, a is 3. A copolymer, a photoresist, a coated substrate and method of patterning are disclosed.
Q-O-(A)-Z - G + (I)
wherein Q is a halogenated or non-halogenated, C 2-30 olefin-containing group, A is a fluorine-substituted C 1-30 alkylene group, a fluorine-substituted C 3-30 cycloalkylene group, a fluorine-substituted C 6-30 arylene group, or a fluorine-substituted C 7-30 alkylene-arylene group, Z is an anionic group comprising sulfonate, sulfonamide, or sulfonamide, and G + has formula (II):
wherein X is S or I, each R 0 is halogenated or non-halogenated and is independently C 1-30 alkyl group; a polycyclic or monocyclic C 3-30 cycloalkyl group; a polycyclic or monocyclic C 4-30 aryl group; or a combination of these, wherein when X is S, one of the R 0 groups is optionally attached to one adjacent R 0 group by a single bond, and a is 2 or 3, wherein when X is I, a is 2, or when X is S, a is 3. A copolymer, a photoresist, a coated substrate and method of patterning are disclosed.
公开/授权文献
- EP2472323A2 Polymerizable photoacid generators 公开/授权日:2012-07-04
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