Invention Grant
- Patent Title: Charged particle beam apparatus, specimen observation system and operation program
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Application No.: US15225942Application Date: 2016-08-02
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Publication No.: US10020163B2Publication Date: 2018-07-10
- Inventor: Yayoi Konishi , Mitsugu Sato , Masaki Takano , Shotaro Tamayama , Masako Nishimura , Shunya Watanabe , Mami Konomi
- Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Mattingly & Malur, PC
- Priority: JP2012-060530 20120316
- Main IPC: H01J37/22
- IPC: H01J37/22 ; H01J37/28 ; H01J37/26

Abstract:
For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation screen display observation target setting buttons for changing an observation condition for a specimen including a combination of parameter setting values of a charged particle beam apparatus. The processing unit has the operation screen display a radar chart including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons. The radar chart indicates at least items of high resolution, emphasis on surface structure and emphasis on material difference.
Public/Granted literature
- US20160343542A1 CHARGED PARTICLE BEAM APPARATUS, SPECIMEN OBSERVATION SYSTEM AND OPERATION PROGRAM Public/Granted day:2016-11-24
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