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公开(公告)号：US09963776B2
公开(公告)日：2018-05-08
申请号：US14376860
申请日：2013-02-01
IPC分类号： C23C14/22 , H01J37/317
CPC分类号： C23C14/221 , H01J37/3178 , H01J2237/31732 , H01J2237/31735
摘要： An object of the present invention is to provide: a wiring method in which wiring is performed in a vacuum chamber of a charged particle device without using gas deposition or the like; and a charged particle device.In order to achieve the above-described object, the present invention proposes: a wiring method in which a wiring line composed of an ionic liquid is formed by dropping an ionic liquid on a sample or preparing an ionic liquid on a sample table, on which a sample is placed in advance, and irradiating a wiring track between a wiring start point and a wiring end point with a charged particle beam; and a charged particle device. According to this configuration, wiring can be performed in a vacuum chamber of a charged particle device without using a gas deposition method or the like.
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公开(公告)号：US09558912B2
公开(公告)日：2017-01-31
申请号：US14890936
申请日：2014-04-28
发明人： Asako Kaneko , Hisayuki Takasu , Hirobumi Mutou , Toru Iwaya , Mami Konomi
IPC分类号： H01J37/20 , H01J37/305 , H01J37/302 , G01K1/14 , G01N1/32 , H01J37/30
CPC分类号： H01J37/20 , G01K1/14 , G01N1/32 , H01J37/30 , H01J37/3002 , H01J37/3023 , H01J37/3053 , H01J2237/002 , H01J2237/026 , H01J2237/08 , H01J2237/2001 , H01J2237/2007 , H01J2237/20271 , H01J2237/20285 , H01J2237/317
摘要： The present invention aims at providing an ion milling apparatus for emitting an ion beam to a sample to process the sample and capable of controlling the temperature of the sample with high accuracy regardless of deformation or the like of the sample being irradiated with the ion beam, and proposes an ion milling apparatus including at least one of a shield holding member for supporting a shield for shielding the sample from the ion beam while exposing a part of the sample to the ion beam; a shifting mechanism for shifting a surface of the sample stand in contact with the sample following deformation of the sample during irradiation with the ion beam, the shifting mechanism having a temperature control mechanism for controlling temperature of at least one of the shield holding member and the sample stand; and a sample holding member disposed between the shield and the sample, the sample holding member deforming following deformation of the sample during irradiation with the ion beam, for example.
摘要翻译： 本发明的目的在于提供一种离子铣削装置，用于将离子束发射到样品以处理样品并且能够高精度地控制样品的温度，而不管样品被离子束照射的变形等， 并提出了一种离子铣削装置，其包括屏蔽保持构件中的至少一个，用于支撑用于将样品从离子束屏蔽的屏蔽，同时将一部分样品暴露于离子束; 移动机构，用于使样品台的表面在与离子束照射期间发生变形之后与试样接触而移动，所述移动机构具有温度控制机构，用于控制至少一个屏蔽保持部件和 样品台 以及设置在所述屏蔽体和所述试样之间的样品保持部件，所述样品保持部件例如在用所述离子束照射时，随着所述样品的变形而发生变形。
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公开(公告)号：US10020163B2
公开(公告)日：2018-07-10
申请号：US15225942
申请日：2016-08-02
发明人： Yayoi Konishi , Mitsugu Sato , Masaki Takano , Shotaro Tamayama , Masako Nishimura , Shunya Watanabe , Mami Konomi
CPC分类号： H01J37/222 , H01J37/265 , H01J37/28 , H01J2237/2806
摘要： For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation screen display observation target setting buttons for changing an observation condition for a specimen including a combination of parameter setting values of a charged particle beam apparatus. The processing unit has the operation screen display a radar chart including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons. The radar chart indicates at least items of high resolution, emphasis on surface structure and emphasis on material difference.
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公开(公告)号：USD774045S1
公开(公告)日：2016-12-13
申请号：US29477566
申请日：2013-12-23
设计人： Yayoi Konishi , Naoko Ushio , Masako Nishimura , Mami Konomi , Shunya Watanabe
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公开(公告)号：US20150299842A1
公开(公告)日：2015-10-22
申请号：US14376860
申请日：2013-02-01
IPC分类号： C23C14/22
CPC分类号： C23C14/221 , H01J37/3178 , H01J2237/31732 , H01J2237/31735
摘要： An object of the present invention is to provide: a wiring method in which wiring is performed in a vacuum chamber of a charged particle device without using gas deposition or the like; and a charged particle device.In order to achieve the above-described object, the present invention proposes: a wiring method in which a wiring line composed of an ionic liquid is formed by dropping an ionic liquid on a sample or preparing an ionic liquid on a sample table, on which a sample is placed in advance, and irradiating a wiring track between a wiring start point and a wiring end point with a charged particle beam; and a charged particle device. According to this configuration, wiring can be performed in a vacuum chamber of a charged particle device without using a gas deposition method or the like.
摘要翻译： 本发明的目的是提供一种布线方法，其中，在不使用气体沉积等的情况下，在带电粒子装置的真空室中进行布线; 和带电粒子装置。 为了实现上述目的，本发明提出：一种布线方法，其中通过将离子液体滴落在样品上或在样品台上制备离子液体形成由离子液体组成的布线，在该布线方法上， 预先放置样品，并用带电粒子束照射布线起点和布线终点之间的布线轨迹; 和带电粒子装置。 根据该结构，可以在不使用气相沉积法等的带电粒子装置的真空室中进行配线。
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公开(公告)号：US20180216223A1
公开(公告)日：2018-08-02
申请号：US15939689
申请日：2018-03-29
IPC分类号： C23C14/22 , H01J37/317
CPC分类号： C23C14/221 , H01J37/3178 , H01J2237/31732 , H01J2237/31735
摘要： An object of the present invention is to provide: a wiring method in which wiring is performed in a vacuum chamber of a charged particle device without using gas deposition or the like; and a charged particle device.In order to achieve the above-described object, the present invention proposes: a wiring method in which a wiring line composed of an ionic liquid is formed by dropping an ionic liquid on a sample or preparing an ionic liquid on a sample table, on which a sample is placed in advance, and irradiating a wiring track between a wiring start point and a wiring end point with a charged particle beam; and a charged particle device. According to this configuration, wiring can be performed in a vacuum chamber of a charged particle device without using a gas deposition method or the like.
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7.发明授权Charged particle beam device, sample stage unit, and sample observation method 有权带电粒子束装置，样品台单元和样品观察方法公开(公告)号：US09472375B2
公开(公告)日：2016-10-18
申请号：US14443293
申请日：2013-11-21
CPC分类号： H01J37/20 , H01J37/16 , H01J37/224 , H01J37/28 , H01J2237/2002 , H01J2237/2003 , H01J2237/2004 , H01J2237/2608 , H01J2237/28
摘要： A charged particle beam device provided with: a charged particle optical lens column generating a primary charged particle beam; a housing which has its inside evacuated by a vacuum pump; a first diaphragm that forms a part of the housing and able to keep an airtight state of the interior space of the housing; and a second diaphragm disposed between the first diaphragm and the sample, wherein a primary charged particle beam generated by the charged particle optical lens column is transmitted by or passes through the first diaphragm and the second diaphragm, and then is irradiated, on the sample that is in contact with the second diaphragm.
摘要翻译： 一种带电粒子束装置，具有：产生初级带电粒子束的带电粒子光学透镜柱; 其内部通过真空泵抽真空的壳体; 第一隔膜，其形成所述壳体的一部分并且能够保持所述壳体的内部空间的气密状态; 以及设置在第一膜片和样品之间的第二膜片，其中由带电粒子光学透镜柱产生的初级带电粒子束通过第一膜片和第二膜片透过或通过第一膜片和第二膜片，然后照射在样品上， 与第二隔膜接触。
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公开(公告)号：US20150228448A1
公开(公告)日：2015-08-13
申请号：US14422531
申请日：2013-07-01
发明人： Yusuke Ominami , Mami Konomi , Shinsuke Kawanishi , Sukehiro Ito
CPC分类号： H01J37/18 , H01J37/04 , H01J37/09 , H01J37/16 , H01J37/20 , H01J37/228 , H01J37/261 , H01J37/28 , H01J2237/045 , H01J2237/164 , H01J2237/1825 , H01J2237/2602 , H01J2237/2605
摘要： Ordinary charged particle beam apparatuses have each been an apparatus manufactured for dedicated use in making observations in a gas atmosphere at atmospheric pressure or at a pressure substantially equal thereto. There have existed no devices capable of simply making observations using an ordinary high-vacuum charged particle microscope in a gas atmosphere at atmospheric pressure or at a pressure approximately equal thereto. Furthermore, ordinary techniques have been incapable of observing the same spot of the sample in such an atmosphere using a charged particle beam and light simultaneously. This invention thus provides an apparatus including: a charged particle optical tube that irradiates a sample with a primary charged particle beam; a vacuum pump that evacuates the inside of the charged particle optical tube; a diaphragm arranged to separate a space in which the sample is placed from the charged particle optical tube, the diaphragm being detachable and allowing the primary charged particle beam to permeate or pass therethrough; and an optical microscope positioned on the opposite side of the charged particle optical tube across the diaphragm and the sample, the optical microscope having an optical axis thereof aligned with at least part of an extension of the optical axis of the charged particle optical tube.
摘要翻译： 普通带电粒子束装置各自是制造用于在大气压或基本上等于其的压力下在气体气氛中进行观察的专用制造装置。 在大气压或大致相等的压力下，不存在使用普通的高真空带电粒子显微镜简单地进行观察的装置。 此外，普通技术已经不能使用带电粒子束和光同时在这样的大气中观察样品的相同点。 因此，本发明提供了一种装置，包括：带有电荷的粒子束照射样品的带电粒子光管; 抽真空带电粒子光管内部的真空泵; 隔膜，布置成将带有样品的空间与带电粒子光管分离，隔膜可拆卸并允许初级带电粒子束渗透或通过; 以及光学显微镜，其位于带电粒子光管的横跨隔膜和样品的相反侧，光学显微镜的光轴与带电粒子光管的光轴的延伸部分的至少一部分对准。
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9.发明申请CHARGED PARTICLE BEAM APPARATUS, SPECIMEN OBSERVATION SYSTEM AND OPERATION PROGRAM 有权充电颗粒光束装置，样本观测系统和操作程序公开(公告)号：US20150076348A1
公开(公告)日：2015-03-19
申请号：US14385256
申请日：2013-03-15
发明人： Yayoi Konishi , Mitsugu Sato , Masaki Takano , Shotaro Tamayama , Masako Nishimura , Shunya Watanabe , Mami Konomi
CPC分类号： H01J37/222 , H01J37/265 , H01J37/28 , H01J2237/2806
摘要： For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation screen display observation target setting buttons for changing an observation condition for a specimen including a combination of parameter setting values of a charged particle beam apparatus. The processing unit has the operation screen display a radar chart including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons. The radar chart indicates at least items of high resolution, emphasis on surface structure and emphasis on material difference.
摘要翻译： 为了使新手能够容易地识别由观察条件之间的差异引起的成像结果之间的差异，计算机具有操作画面显示观察目标设定按钮，用于改变包含带电粒子的参数设定值的组合的样本的观察条件 光束装置。 处理单元具有操作屏幕，显示包括每个观察目标设置按钮的观察条件的由三个或更多个不兼容项目指示的特征的雷达图。 雷达图至少表示高分辨率，强调表面结构和强调材料差异。
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10.发明申请OBSERVATION SPECIMEN FOR USE IN ELECTRON MICROSCOPY, ELECTRON MICROSCOPY, ELECTRON MICROSCOPE, AND DEVICE FOR PRODUCING OBSERVATION SPECIMEN 有权用于电子显微镜，电子显微镜，电子显微镜和用于生产观察样本的装置的观察样本公开(公告)号：US20140264018A1
公开(公告)日：2014-09-18
申请号：US14354917
申请日：2012-10-16
发明人： Takafumi Miwa , Yoichi Ose , Eiko Nakazawa , Mami Konomi , Shunya Watanabe , Yoshinobu Kimura , Natsuki Tsuno
CPC分类号： H01J37/261 , G01B15/02 , G01N23/00 , H01J37/026 , H01J37/28 , H01J2237/0044 , Y10T428/24331 , Y10T428/261
摘要： The electrical charging by a primary electronic is inhibited to produce a clear edge contrast from an observation specimen (i.e., a specimen to be observed), whereby the shape of the surface of a sample can be measured with high accuracy. An observation specimen in which a liquid medium comprising an ionic liquid is formed in a thin-film-like or a webbing-film-like form on a sample is used. An electron microscopy using the observation specimen comprises: a step of measuring the thickness of a liquid medium comprising an ionic liquid on a sample; a step of controlling the conditions for irradiation with a primary electron on the basis of the thickness of the liquid medium comprising the ionic liquid; and a step of irradiating the sample with the primary electron under the above-mentioned primary electron irradiation conditions to form an image of the shape of the sample.
摘要翻译： 一次电子的充电被抑制，从观察样本（即待观察的样本）产生清晰的边缘对比度，从而可以高精度地测量样品的表面形状。 使用其中在样品上以薄膜状或织带膜状形成包含离子液体的液体介质的观察样本。 使用观察样品的电子显微镜包括：测量在样品上包含离子液体的液体介质的厚度的步骤; 基于包含离子液体的液体介质的厚度控制用一次电子照射的条件的步骤; 以及在上述一次电子照射条件下用一次电子照射样品以形成样品形状的步骤。
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