Abstract:
For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation screen display observation target setting buttons for changing an observation condition for a specimen including a combination of parameter setting values of a charged particle beam apparatus. The processing unit has the operation screen display a radar chart including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons. The radar chart indicates at least items of high resolution, emphasis on surface structure and emphasis on material difference.
Abstract:
For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation screen display observation target setting buttons for changing an observation condition for a specimen including a combination of parameter setting values of a charged particle beam apparatus. The processing unit has the operation screen display a radar chart including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons. The radar chart indicates at least items of high resolution, emphasis on surface structure and emphasis on material difference.
Abstract:
Disclosed is a method for enabling flexibility of the exoskeletons or joints of aquatic organisms immersed in an ion liquid water solution to be maintained without destroying their original forms by reducing the difference in osmotic pressure between the inside and outside of the aquatic organisms, preventing dehydration of biological samples. First, the aquatic organism is put into a low-concentration ionic liquid to increase continuously the concentration of the ionic liquid, enabling the water content of the aquatic organism to be substituted by a high-concentration ionic liquid in their original forms. The use of the increasing method that gentle increase in temperature of the ionic liquid by means of natural seasoning reduces the osmotic pressure difference between the inside and outside of the aquatic organism, increasing the concentration of the ionic liquid inside of the aquatic organism.
Abstract:
Disclosed is a method for enabling flexibility of the exoskeletons or joints of aquatic organisms immersed in an ion liquid water solution to be maintained without destroying their original forms by reducing the difference in osmotic pressure between the inside and outside of the aquatic organisms, preventing dehydration of biological samples. First, the aquatic organism is put into a low-concentration ionic liquid to increase continuously the concentration of the ionic liquid, enabling the water content of the aquatic organism to be substituted by a high-concentration ionic liquid in their original forms. The use of the increasing method that gentle increase in temperature of the ionic liquid by means of natural seasoning reduces the osmotic pressure difference between the inside and outside of the aquatic organism, increasing the concentration of the ionic liquid inside of the aquatic organism.
Abstract:
For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation screen display observation target setting buttons for changing an observation condition for a specimen including a combination of parameter setting values of a charged particle beam apparatus. The processing unit has the operation screen display a radar chart including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons. The radar chart indicates at least items of high resolution, emphasis on surface structure and emphasis on material difference.
Abstract:
Disclosed is a charged particle beam apparatus wherein a partitioning film capable of transmitting a charged particle beam is provided between a charged particle optical system and a sample, said charged particle beam apparatus eliminating a contact between the sample and the partitioning film even in the cases where the sample has recesses and protrusions. On the basis of detection signals or an image generated on the basis of the detection signals, a distance between a sample and a partitioning film is monitored, said detection signals being outputted from a detector that detects secondary charged particles discharged from the sample due to irradiation of a primary charged particle beam.