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1.发明申请CHARGED PARTICLE BEAM APPARATUS, SPECIMEN OBSERVATION SYSTEM AND OPERATION PROGRAM 有权充电颗粒光束装置，样本观测系统和操作程序公开(公告)号：US20150076348A1
公开(公告)日：2015-03-19
申请号：US14385256
申请日：2013-03-15
发明人： Yayoi Konishi , Mitsugu Sato , Masaki Takano , Shotaro Tamayama , Masako Nishimura , Shunya Watanabe , Mami Konomi
CPC分类号： H01J37/222 , H01J37/265 , H01J37/28 , H01J2237/2806
摘要： For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation screen display observation target setting buttons for changing an observation condition for a specimen including a combination of parameter setting values of a charged particle beam apparatus. The processing unit has the operation screen display a radar chart including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons. The radar chart indicates at least items of high resolution, emphasis on surface structure and emphasis on material difference.
摘要翻译： 为了使新手能够容易地识别由观察条件之间的差异引起的成像结果之间的差异，计算机具有操作画面显示观察目标设定按钮，用于改变包含带电粒子的参数设定值的组合的样本的观察条件 光束装置。 处理单元具有操作屏幕，显示包括每个观察目标设置按钮的观察条件的由三个或更多个不兼容项目指示的特征的雷达图。 雷达图至少表示高分辨率，强调表面结构和强调材料差异。
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2.发明申请OBSERVATION SPECIMEN FOR USE IN ELECTRON MICROSCOPY, ELECTRON MICROSCOPY, ELECTRON MICROSCOPE, AND DEVICE FOR PRODUCING OBSERVATION SPECIMEN 有权用于电子显微镜，电子显微镜，电子显微镜和用于生产观察样本的装置的观察样本公开(公告)号：US20140264018A1
公开(公告)日：2014-09-18
申请号：US14354917
申请日：2012-10-16
发明人： Takafumi Miwa , Yoichi Ose , Eiko Nakazawa , Mami Konomi , Shunya Watanabe , Yoshinobu Kimura , Natsuki Tsuno
CPC分类号： H01J37/261 , G01B15/02 , G01N23/00 , H01J37/026 , H01J37/28 , H01J2237/0044 , Y10T428/24331 , Y10T428/261
摘要： The electrical charging by a primary electronic is inhibited to produce a clear edge contrast from an observation specimen (i.e., a specimen to be observed), whereby the shape of the surface of a sample can be measured with high accuracy. An observation specimen in which a liquid medium comprising an ionic liquid is formed in a thin-film-like or a webbing-film-like form on a sample is used. An electron microscopy using the observation specimen comprises: a step of measuring the thickness of a liquid medium comprising an ionic liquid on a sample; a step of controlling the conditions for irradiation with a primary electron on the basis of the thickness of the liquid medium comprising the ionic liquid; and a step of irradiating the sample with the primary electron under the above-mentioned primary electron irradiation conditions to form an image of the shape of the sample.
摘要翻译： 一次电子的充电被抑制，从观察样本（即待观察的样本）产生清晰的边缘对比度，从而可以高精度地测量样品的表面形状。 使用其中在样品上以薄膜状或织带膜状形成包含离子液体的液体介质的观察样本。 使用观察样品的电子显微镜包括：测量在样品上包含离子液体的液体介质的厚度的步骤; 基于包含离子液体的液体介质的厚度控制用一次电子照射的条件的步骤; 以及在上述一次电子照射条件下用一次电子照射样品以形成样品形状的步骤。
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公开(公告)号：US10020163B2
公开(公告)日：2018-07-10
申请号：US15225942
申请日：2016-08-02
发明人： Yayoi Konishi , Mitsugu Sato , Masaki Takano , Shotaro Tamayama , Masako Nishimura , Shunya Watanabe , Mami Konomi
CPC分类号： H01J37/222 , H01J37/265 , H01J37/28 , H01J2237/2806
摘要： For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation screen display observation target setting buttons for changing an observation condition for a specimen including a combination of parameter setting values of a charged particle beam apparatus. The processing unit has the operation screen display a radar chart including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons. The radar chart indicates at least items of high resolution, emphasis on surface structure and emphasis on material difference.
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公开(公告)号：USD774046S1
公开(公告)日：2016-12-13
申请号：US29477571
申请日：2013-12-23
设计人： Yayoi Konishi , Masako Nishimura , Shunya Watanabe
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公开(公告)号：USD774045S1
公开(公告)日：2016-12-13
申请号：US29477566
申请日：2013-12-23
设计人： Yayoi Konishi , Naoko Ushio , Masako Nishimura , Mami Konomi , Shunya Watanabe
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6.发明授权Charged particle beam apparatus, specimen observation system and operation program 有权带电粒子束装置，样本观察系统和操作程序公开(公告)号：US09443694B2
公开(公告)日：2016-09-13
申请号：US14385256
申请日：2013-03-15
发明人： Yayoi Konishi , Mitsugu Sato , Masaki Takano , Shotaro Tamayama , Masako Nishimura , Shunya Watanabe , Mami Konomi
CPC分类号： H01J37/222 , H01J37/265 , H01J37/28 , H01J2237/2806
摘要： For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation screen display observation target setting buttons for changing an observation condition for a specimen including a combination of parameter setting values of a charged particle beam apparatus. The processing unit has the operation screen display a radar chart including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons. The radar chart indicates at least items of high resolution, emphasis on surface structure and emphasis on material difference.
摘要翻译： 为了使新手能够容易地识别由观察条件之间的差异引起的成像结果之间的差异，计算机具有操作画面显示观察目标设定按钮，用于改变包含带电粒子的参数设定值的组合的样本的观察条件 光束装置。 处理单元具有操作屏幕，显示包括每个观察目标设置按钮的观察条件的由三个或更多个不兼容项目指示的特征的雷达图。 雷达图至少表示高分辨率，强调表面结构和强调材料差异。
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7.发明授权Observation specimen for use in electron microscopy, electron microscopy, electron microscope, and device for producing observation specimen 有权用于电子显微镜，电子显微镜，电子显微镜和观察样品生产装置的观察标本公开(公告)号：US09202668B2
公开(公告)日：2015-12-01
申请号：US14354917
申请日：2012-10-16
发明人： Takafumi Miwa , Yoichi Ose , Eiko Nakazawa , Mami Konomi , Shunya Watanabe , Yoshinobu Kimura , Natsuki Tsuno
CPC分类号： H01J37/261 , G01B15/02 , G01N23/00 , H01J37/026 , H01J37/28 , H01J2237/0044 , Y10T428/24331 , Y10T428/261
摘要： The electrical charging by a primary electronic is inhibited to produce a clear edge contrast from an observation specimen (i.e., a specimen to be observed), whereby the shape of the surface of a sample can be measured with high accuracy. An observation specimen in which a liquid medium comprising an ionic liquid is formed in a thin-film-like or a webbing-film-like form on a sample is used. An electron microscopy using the observation specimen comprises: a step of measuring the thickness of a liquid medium comprising an ionic liquid on a sample; a step of controlling the conditions for irradiation with a primary electron on the basis of the thickness of the liquid medium comprising the ionic liquid; and a step of irradiating the sample with the primary electron under the above-mentioned primary electron irradiation conditions to form an image of the shape of the sample.
摘要翻译： 一次电子的充电被抑制，从观察样本（即待观察的样本）产生清晰的边缘对比度，从而可以高精度地测量样品的表面形状。 使用其中在样品上以薄膜状或织带膜状形成包含离子液体的液体介质的观察样本。 使用观察样品的电子显微镜包括：测量在样品上包含离子液体的液体介质的厚度的步骤; 基于包含离子液体的液体介质的厚度控制用一次电子照射的条件的步骤; 以及在上述一次电子照射条件下用一次电子照射样品以形成样品形状的步骤。
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