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    CHARGED PARTICLE BEAM APPARATUS, SPECIMEN OBSERVATION SYSTEM AND OPERATION PROGRAM
    2.
    发明申请
    CHARGED PARTICLE BEAM APPARATUS, SPECIMEN OBSERVATION SYSTEM AND OPERATION PROGRAM 有权
    充电颗粒光束装置，样本观测系统和操作程序

    公开(公告)号：US20150076348A1

    公开(公告)日：2015-03-19

    申请号：US14385256

    申请日：2013-03-15

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Yayoi Konishi ,  Mitsugu Sato ,  Masaki Takano ,  Shotaro Tamayama ,  Masako Nishimura ,  Shunya Watanabe ,  Mami Konomi

    IPC: H01J37/22 ,  H01J37/28

    CPC classification number: H01J37/222 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2806

    Abstract: For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation screen display observation target setting buttons for changing an observation condition for a specimen including a combination of parameter setting values of a charged particle beam apparatus. The processing unit has the operation screen display a radar chart including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons. The radar chart indicates at least items of high resolution, emphasis on surface structure and emphasis on material difference.

    Abstract translation: 为了使新手能够容易地识别由观察条件之间的差异引起的成像结果之间的差异，计算机具有操作画面显示观察目标设定按钮，用于改变包含带电粒子的参数设定值的组合的样本的观察条件 光束装置。 处理单元具有操作屏幕，显示包括每个观察目标设置按钮的观察条件的由三个或更多个不兼容项目指示的特征的雷达图。 雷达图至少表示高分辨率，强调表面结构和强调材料差异。

    Charged particle beam apparatus, specimen observation system and operation program
    6.
    发明授权
    Charged particle beam apparatus, specimen observation system and operation program 有权
    带电粒子束装置，样本观察系统和操作程序

    公开(公告)号：US09443694B2

    公开(公告)日：2016-09-13

    申请号：US14385256

    申请日：2013-03-15

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Yayoi Konishi ,  Mitsugu Sato ,  Masaki Takano ,  Shotaro Tamayama ,  Masako Nishimura ,  Shunya Watanabe ,  Mami Konomi

    IPC: H01J37/28 ,  H01J37/26 ,  H01J37/22

    CPC classification number: H01J37/222 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2806

    Abstract: For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation screen display observation target setting buttons for changing an observation condition for a specimen including a combination of parameter setting values of a charged particle beam apparatus. The processing unit has the operation screen display a radar chart including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons. The radar chart indicates at least items of high resolution, emphasis on surface structure and emphasis on material difference.

    Abstract translation: 为了使新手能够容易地识别由观察条件之间的差异引起的成像结果之间的差异，计算机具有操作画面显示观察目标设定按钮，用于改变包含带电粒子的参数设定值的组合的样本的观察条件 光束装置。 处理单元具有操作屏幕，显示包括每个观察目标设置按钮的观察条件的由三个或更多个不兼容项目指示的特征的雷达图。 雷达图至少表示高分辨率，强调表面结构和强调材料差异。

    Charged particle beam apparatus and program
    7.
    发明授权
    Charged particle beam apparatus and program 有权
    带电粒子束装置和程序

    公开(公告)号：US09412557B2

    公开(公告)日：2016-08-09

    申请号：US14647323

    申请日：2013-11-20

    Applicant: Hitachi High-Technologies Corporation

    Inventor： Mitsugu Yamashita ,  Tohru Ando ,  Yayoi Konishi ,  Shoutarou Tamayama ,  Naoko Ushio ,  Masaki Takano

    IPC: H01J37/00 ,  H01J37/26 ,  H01J37/20 ,  H01J37/147 ,  G06F3/048 ,  H01J37/22 ,  H01J37/28 ,  H01J37/304

    CPC classification number: H01J37/265 ,  G06F3/048 ,  H01J37/147 ,  H01J37/20 ,  H01J37/22 ,  H01J37/28 ,  H01J37/304 ,  H01J2237/202 ,  H01J2237/248 ,  H01J2237/2801

    Abstract: The movement distance of a second adjustment slider 204 is made shorter than that of a first adjustment slider 205 if the first adjustment slider 205 is positioned in a displayed range, except at both ends thereof, of a set value adjustment axis 203 in a first set value adjustment axis display part 202. The first adjustment slider 205 is kept unmoved while the second adjustment slider 204 alone is moved in the direction of one of both ends of the displayed range if the first adjustment slider 205 is positioned at least at the one of both ends of the displayed range of the set value adjustment axis 203 in the first set value adjustment axis display part 202, if the second adjustment slider 204 is also positioned in the displayed range except at the both ends thereof, and if the first adjustment slider 205 is to be selectively operated by a cursor 220. This structure allows coarse and fine adjustments of set values for operation control to be carried out easily and accurately.

    Abstract translation: 如果第一调整滑块205位于第二组中的设定值调节轴203的两端的除两端的显示范围内，则第二调节滑块204的移动距离比第一调节滑块205的移动距离短 值调节轴显示部202.如果第一调节滑动器205至少位于显示范围的两端中的一个方向上，则第一调节滑动器205单独地沿着显示范围的两端之一的方向移动，而保持不动， 如果第二调整滑块204也位于除两端的显示范围之外，则设定值调整轴203的显示范围的两端，如果第一调整滑块204的两端， 205通过光标220选择性地操作。这种结构允许粗略和精细地调整用于操作控制的设定值以容易且准确地进行。

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