Invention Grant
- Patent Title: Nanosheet capacitor
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Application No.: US15477351Application Date: 2017-04-03
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Publication No.: US10032858B2Publication Date: 2018-07-24
- Inventor: Zhenxing Bi , Kangguo Cheng , Dongbing Shao , Zheng Xu
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L49/02
Abstract:
A capacitive device includes a first electrode comprising a nanosheet stack and a second electrode comprising a nanosheet stack, the second electrode arranged substantially parallel to the first electrode. A first conductive contact is arranged on a basal end of the first electrode, and a second conductive contact is arranged on a basal end of the second electrode.
Public/Granted literature
- US20180083093A1 NANOSHEET CAPACITOR Public/Granted day:2018-03-22
Information query
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