Invention Grant
- Patent Title: Method, apparatus, and system for using a cover mask for enabling metal line jumping over MOL features in a standard cell
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Application No.: US15905621Application Date: 2018-02-26
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Publication No.: US10068806B2Publication Date: 2018-09-04
- Inventor: David C. Pritchard , Tuhin Guha Neogi , Scott Luning , David Doman
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Williams Morgan, P.C.
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L29/08 ; H01L29/66 ; H01L23/522 ; H01L23/528 ; H01L21/027 ; H01L21/768 ; H01L21/311 ; H01L21/321 ; H01L27/146

Abstract:
At least one method, apparatus and system disclosed involves providing an integrated circuit having metal feature flyover over an middle-of-line (MOL) feature. A first location for a non-contact intersection region between a first middle of line (MOL) interconnect feature and a metal feature in a functional cell is determined. A dielectric feature is formed over the first MOL interconnect feature at the first location. The metal feature is formed over the dielectric layer, the dielectric layer providing a predetermined amount of voltage isolation between the first MOL interconnect feature and the metal feature.
Public/Granted literature
Information query
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