Invention Grant
- Patent Title: Plasma processing apparatus and high frequency generator
-
Application No.: US14386648Application Date: 2013-03-25
-
Publication No.: US10074524B2Publication Date: 2018-09-11
- Inventor: Kazushi Kaneko , Kazunori Funazaki , Hideo Kato
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JP2012-069735 20120326
- International Application: PCT/JP2013/058530 WO 20130325
- International Announcement: WO2013/146655 WO 20131003
- Main IPC: C23C14/00
- IPC: C23C14/00 ; H01J37/34 ; C23C16/511 ; H03B9/10 ; H01J37/32 ; H03L1/00 ; H03L5/02 ; H05H1/46

Abstract:
A plasma processing apparatus (11) is provided with: a processing container (12), in which processing is performed using plasma; a plasma generating mechanism (19), which has a high frequency oscillator that oscillates high frequency, includes a high frequency generator that generates high frequency by being disposed outside of the processing container (12), and which generates plasma in the processing container (12) using the high frequency generated by means of the high frequency generator; a determining mechanism, which determines the state of the high frequency oscillator; and a notifying mechanism, which performs notification of determination results obtained from the determining mechanism.
Public/Granted literature
- US20150047974A1 PLASMA PROCESSING APPARATUS AND HIGH FREQUENCY GENERATOR Public/Granted day:2015-02-19
Information query
IPC分类: