Invention Grant
- Patent Title: Cut first self-aligned litho-etch patterning
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Application No.: US15633152Application Date: 2017-06-26
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Publication No.: US10109486B2Publication Date: 2018-10-23
- Inventor: Kuan-Wei Huang , Chia-Ying Lee , Ming-Chung Liang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L21/033 ; H01L21/768 ; H01L21/461

Abstract:
The present disclosure relates to an integrated chip formed by a self-aligned litho-etch process. In some embodiments, the integrated chip has a first plurality of shapes of an integrated chip layer arranged along a first direction at a first pitch. The first plurality of shapes include a first two shapes separated by a first end-to-end space along a second direction perpendicular to the first direction. A second plurality of shapes of the integrated chip layer are arranged along the first direction at a second pitch. The second plurality of shapes include a second two shapes separated by a second end-to-end space along the second direction. A ratio of the first end-to-end space to the second end-to-end space is approximately equal to 2.5:1.
Public/Granted literature
- US20170294311A1 CUT FIRST SELF-ALIGNED LITHO-ETCH PATTERNING Public/Granted day:2017-10-12
Information query
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