Cut first self-aligned litho-etch patterning
Abstract:
The present disclosure relates to an integrated chip formed by a self-aligned litho-etch process. In some embodiments, the integrated chip has a first plurality of shapes of an integrated chip layer arranged along a first direction at a first pitch. The first plurality of shapes include a first two shapes separated by a first end-to-end space along a second direction perpendicular to the first direction. A second plurality of shapes of the integrated chip layer are arranged along the first direction at a second pitch. The second plurality of shapes include a second two shapes separated by a second end-to-end space along the second direction. A ratio of the first end-to-end space to the second end-to-end space is approximately equal to 2.5:1.
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