Invention Grant
- Patent Title: Polishing agent, storage solution for polishing agent and polishing method
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Application No.: US15736221Application Date: 2015-06-17
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Publication No.: US10119049B2Publication Date: 2018-11-06
- Inventor: Makoto Mizutani , Satoyuki Nomura , Haruaki Sakurai , Masaya Nishiyama , Masayuki Hanano
- Applicant: HITACHI CHEMICAL COMPANY, LTD.
- Applicant Address: JP Tokyo
- Assignee: HITACHI CHEMICAL COMPANY, LTD.
- Current Assignee: HITACHI CHEMICAL COMPANY, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Fitch, Even, Tabin & Flannery, L.L.P.
- International Application: PCT/JP2015/067508 WO 20150617
- International Announcement: WO2016/203586 WO 20161222
- Main IPC: C09G1/02
- IPC: C09G1/02 ; B24B37/00 ; B24B37/013 ; C09K3/14 ; H01L21/304 ; B24B37/04 ; H01L21/3105

Abstract:
A polishing agent for chemomechanically polishing a base having a carbon-based material and an insulating material to remove at least a part of the carbon-based material, the carbon-based material having a carbon content of 60 to 95 atm % as measured by X-ray photoelectron spectroscopy, the polishing agent comprising: an abrasive grain comprising silica; an allylamine-based polymer; and water, wherein a mass ratio of a content of the allylamine-based polymer with respect to a content of the abrasive grain is 0.002 to 0.400, and the abrasive grain has a positive charge in the polishing agent.
Public/Granted literature
- US20180179417A1 POLISHING AGENT, STORAGE SOLUTION FOR POLISHING AGENT AND POLISHING METHOD Public/Granted day:2018-06-28
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