Invention Grant
- Patent Title: Electrode pair, method for fabricating the same, substrate for device, and device
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Application No.: US14916970Application Date: 2014-03-09
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Publication No.: US10164080B2Publication Date: 2018-12-25
- Inventor: Yutaka Majima , Toshiharu Teranishi , Shuhei Takeshita
- Applicant: JAPAN SCIENCE AND TECHNOLOGY AGENCY
- Applicant Address: JP Kawaguchi-shi, Saitama
- Assignee: JAPAN SCIENCE AND TECHNOLOGY AGENCY
- Current Assignee: JAPAN SCIENCE AND TECHNOLOGY AGENCY
- Current Assignee Address: JP Kawaguchi-shi, Saitama
- Agency: Westerman, Hattori, Daniels & Adrian
- Priority: JP2013-185650 20130906
- International Application: PCT/JP2014/056081 WO 20140309
- International Announcement: WO2015/033600 WO 20150312
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L31/09 ; H01L21/445 ; B82Y10/00 ; H01L29/417 ; H01L29/12 ; H01L29/06 ; B82Y30/00

Abstract:
Art electrode pair enables the performance of a device to be accurately delivered, a method for manufacturing the same. An electrode pair 10, wherein one electrode 12A and the other electrode 12B are provided on the same plane so as to face each other with a gap 17 therebetween, and portions of the one electrode 12A and the oilier electrode 12B facing each other are respectively curved so as to get away from the plane along a direction nearing each other. This electrode pair 10 is manufactured by preparing, as a sample, a substrate on which a pair of seed electrodes is formed with a space therebetween so as to have an initial gap, immersing the sample in an electroless plating solution, changing the electroless plating solution after a lapse of a certain period of time, and adjusting the number of times of changing.
Public/Granted literature
- US20160197172A1 ELECTRODE PAIR, METHOD FOR FABRICATING THE SAME, SUBSTRATE FOR DEVICE, AND DEVICE Public/Granted day:2016-07-07
Information query
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