公开(公告)号：US20160197172A1

公开(公告)日：2016-07-07

申请号：US14916970

申请日：2014-03-09

Applicant: JAPAN SCIENCE AND TECHNOLOGY AGENCY

Inventor： Yutaka Majima ,  Toshiharu Teranishi ,  Shuhei Takeshita

IPC: H01L29/76 ,  H01L21/445

CPC classification number: H01L29/7613 ,  B82Y10/00 ,  B82Y30/00 ,  H01L21/445 ,  H01L29/0649 ,  H01L29/0665 ,  H01L29/127 ,  H01L29/41725 ,  H01L31/09

Abstract: Art electrode pair enables the performance of a device to be accurately delivered, a method for manufacturing the same. An electrode pair 10, wherein one electrode 12A and the other electrode 12B are provided on the same plane so as to face each other with a gap 17 therebetween, and portions of the one electrode 12A and the oilier electrode 12B facing each other are respectively curved so as to get away from the plane along a direction nearing each other. This electrode pair 10 is manufactured by preparing, as a sample, a substrate on which a pair of seed electrodes is formed with a space therebetween so as to have an initial gap, immersing the sample in an electroless plating solution, changing the electroless plating solution after a lapse of a certain period of time, and adjusting the number of times of changing.

Abstract translation: 艺术电极对能够精确地传送装置的性能，其制造方法。 电极对10，其中一个电极12A和另一个电极12B以相互平行的方式设置在同一平面上，间隙为17，并且一个电极12A和油层电极12B彼此面对的部分分别是弯曲的 以便沿着彼此靠近的方向远离飞机。 该电极对10通过以下方式制作作为样品的基板，其上形成有一定距离的种子电极，以便具有初始间隙，将样品浸入化学镀溶液中，改变化学镀溶液 经过一段时间后，调整变更次数。

公开(公告)号：US10164080B2

公开(公告)日：2018-12-25

申请号：US14916970

申请日：2014-03-09

Applicant: JAPAN SCIENCE AND TECHNOLOGY AGENCY

Inventor： Yutaka Majima ,  Toshiharu Teranishi ,  Shuhei Takeshita

IPC: H01L29/76 ,  H01L31/09 ,  H01L21/445 ,  B82Y10/00 ,  H01L29/417 ,  H01L29/12 ,  H01L29/06 ,  B82Y30/00

Abstract: Art electrode pair enables the performance of a device to be accurately delivered, a method for manufacturing the same. An electrode pair 10, wherein one electrode 12A and the other electrode 12B are provided on the same plane so as to face each other with a gap 17 therebetween, and portions of the one electrode 12A and the oilier electrode 12B facing each other are respectively curved so as to get away from the plane along a direction nearing each other. This electrode pair 10 is manufactured by preparing, as a sample, a substrate on which a pair of seed electrodes is formed with a space therebetween so as to have an initial gap, immersing the sample in an electroless plating solution, changing the electroless plating solution after a lapse of a certain period of time, and adjusting the number of times of changing.