Invention Grant
- Patent Title: Semiconductor device having asymmetric fin-shaped pattern
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Application No.: US15461934Application Date: 2017-03-17
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Publication No.: US10199377B2Publication Date: 2019-02-05
- Inventor: Jung-Gun You , Se-Wan Park , Baik-Min Sung , Bo-Cheol Jeong
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Ward and Smith, P.A.
- Priority: KR10-2015-0007315 20150115
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/78 ; H01L27/088 ; H01L21/762 ; H01L21/311 ; H01L21/8234

Abstract:
Semiconductor devices are provided including a first fin-shaped pattern having first and second sidewalls facing one another and a field insulating film contacting at least a portion of the first fin-shaped pattern. The first fin-shaped pattern includes a lower portion of the first fin-shaped pattern contacting the field insulating film; an upper portion of the first fin-shaped pattern not contacting the field insulating film; a first boundary between the lower portion of the first fin-shaped pattern and the upper portion of the first fin-shaped pattern; and a first fin center line perpendicular to the first boundary and meeting the top of the upper portion of the first fin-shaped pattern. The first sidewall of the upper portion of the first fin-shaped pattern and the second sidewall of the upper portion of the first fin-shaped pattern are asymmetric with respect to the first fin center line.
Public/Granted literature
- US20170194324A1 Semiconductor Device Having Asymmetric FIN-Shaped Pattern Public/Granted day:2017-07-06
Information query
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