Invention Grant
- Patent Title: Method of reconstituted substrate formation for advanced packaging applications
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Application No.: US15840900Application Date: 2017-12-13
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Publication No.: US10211072B2Publication Date: 2019-02-19
- Inventor: Han-Wen Chen , Steven Verhaverbeke , Roman Gouk , Guan Huei See , Yu Gu , Arvind Sundarrajan , Kyuil Cho , Colin Costano Neikirk , Boyi Fu
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: H01L21/50
- IPC: H01L21/50 ; H01L21/56 ; H01L23/31

Abstract:
Embodiments of the present disclosure generally describe methods for minimizing the occurrence and the extent of die shift during the formation of a reconstituted substrate in fan-out wafer level packaging processes. Die shift is a process defect that occurs when a die (device) moves from its intended position within a reconstituted substrate during the formation thereof. Generally, the methods disclosed herein include depositing a device immobilization layer and/or a plurality of device immobilization beads over and/or adjacent to a plurality of singular devices (individual dies), and the carrier substrate they are positioned on, before forming a reconstituted substrate with an epoxy molding compound. The device immobilization layer and/or the plurality of device immobilization beads immobilize the plurality of singular devices and prevents them from shifting on the carrier substrate during the molding process.
Public/Granted literature
- US20180374718A1 METHOD OF RECONSTITUTED SUBSTRATE FORMATION FOR ADVANCED PACKAGING APPLICATIONS Public/Granted day:2018-12-27
Information query
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