Invention Grant
- Patent Title: Electronic component, electric component manufacturing apparatus, and electronic component manufacturing method
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Application No.: US15730361Application Date: 2017-10-11
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Publication No.: US10244670B2Publication Date: 2019-03-26
- Inventor: Akihiko Ito , Yoshinao Kamo , Shigeki Matsunaka , Atsushi Fujita
- Applicant: SHIBAURA MECHATRONICS CORPORATION
- Applicant Address: JP Yokohama-Shi, Kanagawa
- Assignee: SHIBAURA MECHATRONICS CORPORATION
- Current Assignee: SHIBAURA MECHATRONICS CORPORATION
- Current Assignee Address: JP Yokohama-Shi, Kanagawa
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer; Joshua B. Goldberg
- Priority: JP2016-201521 20161013
- Main IPC: H05K9/00
- IPC: H05K9/00 ; H01L21/56 ; H01L21/67 ; H01L23/552 ; H01L21/683 ; H01L21/687

Abstract:
An electronic component, an electronic component manufacturing apparatus, and an electronic component manufacturing method are provided which enable an electromagnetic wave shielding film formed on a package to achieve an excellent shielding characteristic. An electronic component 10 includes an electromagnetic wave shielding film 13 formed on the top face of a package sealing elements. The thickness of the electromagnetic wave shielding film 13 on the top face of the package 12 is 0.5 to 9 μm, and the relationship between the average height Rc of the roughness curvature factor of the top face of the package 12 and the thickness Te of the electromagnetic wave shielding film 13 is Rc≤2Te.
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