Invention Grant
- Patent Title: Pressure sensor
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Application No.: US15921504Application Date: 2018-03-14
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Publication No.: US10254185B2Publication Date: 2019-04-09
- Inventor: Johannes Schumm , Andreas Reinhard , Thomas Kraehenbuehl , Stefan Thiele , Rene Hummel , Chung-Hsien Lin , Wang Shen Su , Tsung Lin Tang , Chia Min Lin
- Applicant: InvenSense, Inc.
- Applicant Address: US CA San Jose
- Assignee: InvenSense, Inc.
- Current Assignee: InvenSense, Inc.
- Current Assignee Address: US CA San Jose
- Priority: EP15000967 20150402
- Main IPC: H01L29/84
- IPC: H01L29/84 ; G01L9/00 ; B81C1/00 ; B81B3/00

Abstract:
A sensor includes a deformable membrane that deflects in response to a stimuli. The sensor further includes a capacitive element coupled to the deformable membrane. The capacitive element is disposed within an enclosed cavity of the sensor. The capacitive element changes capacitance in response to the deformable membrane deflecting. The capacitive element comprises a getter material for collecting gas molecules within the enclosed cavity.
Public/Granted literature
- US20180202882A1 PRESSURE SENSOR Public/Granted day:2018-07-19
Information query
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