公开(公告)号：US20180202882A1

公开(公告)日：2018-07-19

申请号：US15921504

申请日：2018-03-14

申请人： InvenSense, Inc.

发明人： Johannes Schumm ,  Andreas Reinhard ,  Thomas Kraehenbuehl ,  Stefan Thiele ,  Rene Hummel ,  Chung-Hsien Lin ,  Wang Shen Su ,  Tsung Lin Tang ,  Chia Min Lin

IPC分类号： G01L9/00 ,  H01L29/84 ,  B81C1/00

CPC分类号： G01L9/0042 ,  B81B3/0089 ,  B81B2201/0264 ,  B81B2203/0315 ,  B81C1/00285 ,  G01L9/0045 ,  G01L9/0073 ,  H01L29/84

摘要： A sensor includes a deformable membrane that deflects in response to a stimuli. The sensor further includes a capacitive element coupled to the deformable membrane. The capacitive element is disposed within an enclosed cavity of the sensor. The capacitive element changes capacitance in response to the deformable membrane deflecting. The capacitive element comprises a getter material for collecting gas molecules within the enclosed cavity.

公开(公告)号：US10254185B2

公开(公告)日：2019-04-09

申请号：US15921504

申请日：2018-03-14

申请人： InvenSense, Inc.

发明人： Johannes Schumm ,  Andreas Reinhard ,  Thomas Kraehenbuehl ,  Stefan Thiele ,  Rene Hummel ,  Chung-Hsien Lin ,  Wang Shen Su ,  Tsung Lin Tang ,  Chia Min Lin

IPC分类号： H01L29/84 ,  G01L9/00 ,  B81C1/00 ,  B81B3/00

摘要： A sensor includes a deformable membrane that deflects in response to a stimuli. The sensor further includes a capacitive element coupled to the deformable membrane. The capacitive element is disposed within an enclosed cavity of the sensor. The capacitive element changes capacitance in response to the deformable membrane deflecting. The capacitive element comprises a getter material for collecting gas molecules within the enclosed cavity.

公开(公告)号：US10712218B2

公开(公告)日：2020-07-14

申请号：US16370752

申请日：2019-03-29

申请人： InvenSense, Inc.

发明人： Johannes Schumm ,  Andreas Reinhard ,  Thomas Kraehenbuehl ,  Stefan Thiele ,  Rene Hummel ,  Chung-Hsien Lin ,  Wang Shen Su ,  Tsung Lin Tang ,  Chia Ming Lin

IPC分类号： G01L9/00 ,  B81B3/00 ,  B81C1/00 ,  H01L29/84

摘要： A sensor includes a deformable membrane that deflects in response to a stimuli. The sensor further includes a capacitive element coupled to the deformable membrane. The capacitive element is disposed within an enclosed cavity of the sensor. The capacitive element changes capacitance in response to the deformable membrane deflecting. The capacitive element comprises a getter material for collecting gas molecules within the enclosed cavity.

公开(公告)号：US09958349B2

公开(公告)日：2018-05-01

申请号：US15085592

申请日：2016-03-30

申请人： InvenSense, Inc.

发明人： Johannes Schumm ,  Andreas Reinhard ,  Thomas Kraehenbuehl ,  Stefan Thiele ,  Rene Hummel ,  Chung-Hsien Lin ,  Wang Shen Su ,  Tsung Lin Tang ,  Chia Min Lin

IPC分类号： G01L9/00 ,  B81C1/00 ,  H01L29/84

CPC分类号： G01L9/0042 ,  B81B3/0089 ,  B81B2201/0264 ,  B81B2203/0315 ,  B81C1/00285 ,  G01L9/0045 ,  G01L9/0073 ,  H01L29/84

摘要： A pressure sensor comprises a deformable membrane deflecting in response to pressure applied, a first stationary electrode, and a second electrode coupled to the deformable membrane, for determining a change in a capacitance between the first and the second electrode in response to the pressure applied. At least one of the first and the second electrode comprises a getter material for collecting gas molecules.