- 专利标题: High voltage field effect transistors
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申请号: US15605795申请日: 2017-05-25
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公开(公告)号: US10263074B2公开(公告)日: 2019-04-16
- 发明人: Han Wui Then , Robert Chau , Benjamin Chu-Kung , Gilbert Dewey , Jack Kavalieros , Matthew Metz , Niloy Mukherjee , Ravi Pillarisetty , Marko Radosavljevic
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Schwabe, Williamson & Wyatt, P.C.
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L29/66 ; H01L29/775 ; G05F3/02 ; H01L29/786 ; B82Y10/00 ; H01L21/02 ; H01L21/225 ; H01L21/283 ; H01L21/306 ; H01L21/31 ; H01L21/311 ; H01L21/3213 ; H01L21/324 ; H01L29/04 ; H01L29/417 ; H01L29/423 ; H01L29/20
摘要:
Transistors suitable for high voltage and high frequency operation are disclosed. A nanowire is disposed vertically or horizontally on a substrate. A longitudinal length of the nanowire is defined into a channel region of a first semiconductor material, a source region electrically coupled with a first end of the channel region, a drain region electrically coupled with a second end of the channel region, and an extrinsic drain region disposed between the channel region and drain region. The extrinsic drain region has a wider bandgap than that of the first semiconductor. A gate stack including a gate conductor and a gate insulator coaxially wraps completely around the channel region, drain and source contacts similarly coaxially wrap completely around the drain and source regions.
公开/授权文献
- US20170263708A1 HIGH VOLTAGE FIELD EFFECT TRANSISTORS 公开/授权日:2017-09-14
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