Invention Grant
- Patent Title: Magnetic annealing apparatus
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Application No.: US14211360Application Date: 2014-03-14
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Publication No.: US10297481B2Publication Date: 2019-05-21
- Inventor: Yuji Ono , Toru Ishii , Makoto Saito , Mitsuru Obara , Yasushi Takeuchi
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Abelmam, Frayne & Schwab
- Priority: JP2013-058324 20130321; JP2013-058327 20130321
- Main IPC: H05B6/10
- IPC: H05B6/10 ; H01L21/677 ; G11C11/16

Abstract:
A magnetic annealing apparatus is provided which performs a magnetic annealing on workpieces held in a workpiece boat by using a horizontal superconducting magnet as a magnetic field generating unit. The magnetic annealing apparatus includes a carrier configured to accommodate the workpieces before the magnetic annealing process; and a workpiece conveyance mechanism configured to convey the workpieces held in the carrier to the workpiece boat. The workpiece conveyance mechanism is capable of holding the workpieces in either a horizontal state or in a vertical state.
Public/Granted literature
- US20140284321A1 MAGNETIC ANNEALING APPARATUS Public/Granted day:2014-09-25
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