- Patent Title: Formation of full metal gate to suppress interficial layer growth
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Application No.: US15406985Application Date: 2017-01-16
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Publication No.: US10297598B2Publication Date: 2019-05-21
- Inventor: Ruqiang Bao , Hemanth Jagannathan , Paul Jamison , Choonghyun Lee , Vijay Narayanan
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L27/092 ; H01L21/8234 ; H01L29/66 ; H01L29/78 ; H01L29/49 ; H01L29/51

Abstract:
A semiconductor device is provided and has an n-channel field effect transistor (nFET) bottom junction and a p-channel field effect transistor (pFET) bottom junction. The semiconductor device includes first and second fin formations operably disposed in the nFET and pFET bottom junctions, respectively. The semiconductor device can also include an nFET metal gate layer deposited for oxygen absorption onto a high-k dielectric layer provided about the first fin formation in the nFET bottom junction and onto a pFET metal gate layer provided about the second fin formation in the pFET bottom junction. Alternatively, the semiconductor device can include an oxygen scavenging layer deposited onto the pFET metal gate layer about the second fin formation in the pFET bottom junction and, with the pFET metal gate layer deposited onto the nFET metal gate layer about the first fin formation in the nFET bottom junction, onto the pFET metal gate layer in the nFET bottom junction.
Public/Granted literature
- US20180204839A1 FORMATION OF FULL METAL GATE TO SUPPRESS INTERFICIAL LAYER GROWTH Public/Granted day:2018-07-19
Information query
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