Invention Grant
- Patent Title: Apparatus and methods for integrating magnetoresistive devices
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Application No.: US15958444Application Date: 2018-04-20
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Publication No.: US10297747B2Publication Date: 2019-05-21
- Inventor: Sarin A. Deshpande , Sanjeev Aggarwal , Moazzem Hossain
- Applicant: Everspin Technologies, Inc.
- Applicant Address: US AZ Chandler
- Assignee: Everpsin Technologies, Inc.
- Current Assignee: Everpsin Technologies, Inc.
- Current Assignee Address: US AZ Chandler
- Agency: Bookoff McAndrews, PLLC
- Main IPC: G11C11/16
- IPC: G11C11/16 ; H01L27/22 ; H01L43/02 ; H01L43/08 ; H01L43/12 ; H01L21/768

Abstract:
The present disclosure is drawn to, among other things, a method of fabricating an integrated circuit device having a magnetoresistive device. In some aspects, the method includes forming the magnetoresistive device on a first contact of a substrate, wherein the magnetoresistive device includes a fixed magnetic region and a free magnetic region separated by an intermediate region; depositing a first dielectric material over the magnetoresistive device; depositing a second dielectric material over the first dielectric material; polishing a surface of the second dielectric material; forming a first cavity through the polished surface of the second dielectric material to expose a surface of the magnetoresistive device; and depositing an electrically conductive material in the first cavity to form a via.
Public/Granted literature
- US20180309051A1 APPARATUS AND METHODS FOR INTEGRATING MAGNETORESISTIVE DEVICES Public/Granted day:2018-10-25
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