Invention Grant
- Patent Title: Absorbing reflector for semiconductor processing chamber
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Application No.: US15824489Application Date: 2017-11-28
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Publication No.: US10306708B2Publication Date: 2019-05-28
- Inventor: Kin Pong Lo , Paul Brillhart , Balasubramanian Ramachandran , Satheesh Kuppurao , Daniel Redfield , Joseph M. Ranish , James Francis Mack , Kailash Kiran Patalay , Michael Olsen , Eddie Feigel , Richard Halpin , Brett Vetorino
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: G02B5/08
- IPC: G02B5/08 ; H05B3/00 ; H01L21/67

Abstract:
Embodiments of the disclosure generally relate to a reflector for use in a thermal processing chamber. In one embodiment, the thermal processing chamber generally includes an upper dome, a lower dome opposing the upper dome, the upper dome and the lower dome defining an internal volume of the processing chamber, a substrate support disposed within the internal volume, and a reflector positioned above and proximate to the upper dome, wherein the reflector has a heat absorptive coating layer deposited on a side of the reflector facing the substrate support.
Public/Granted literature
- US20180084610A1 ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER Public/Granted day:2018-03-22
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